公开(公告)号：US20240186124A1

公开(公告)日：2024-06-06

申请号：US18435923

申请日：2024-02-07

Applicant: iSenseCloud, Inc.

Inventor： William J. O'Banion ,  An-Dien Nguyen ,  Huy D. Nguyen

IPC: H01J37/32 ,  G01J3/02 ,  G01J3/18 ,  G01K1/14 ,  G01K11/3206 ,  G01N29/14 ,  G01N29/24 ,  G02B6/02 ,  G02B6/42 ,  H01L21/687 ,  H01S5/06 ,  H01S5/068 ,  H01S5/40

CPC classification number: H01J37/32917 ,  G01J3/0208 ,  G01K1/14 ,  G01K11/3206 ,  G01N29/14 ,  G01N29/2418 ,  G01N29/2462 ,  G02B6/0208 ,  G02B6/4204 ,  G01J3/18 ,  H01J2237/24585 ,  H01L21/68742 ,  H01S5/0617 ,  H01S5/06804 ,  H01S5/06808 ,  H01S5/4087

Abstract: An apparatuses relating generally to a test wafer, processing chambers, and method relating generally to monitoring or calibrating a processing chamber, are described. In one such an apparatus for a test wafer, there is a platform. An optical fiber with Fiber Bragg Grating sensors is located over the platform. A layer of material is located over the platform and over the optical fiber.

公开(公告)号：US20210090865A1

公开(公告)日：2021-03-25

申请号：US16952884

申请日：2020-11-19

Applicant: iSenseCloud, Inc.

Inventor： William J. O'Banion ,  An-Dien Nguyen ,  Huy D. Nguyen

IPC: H01J37/32 ,  G02B6/02 ,  G02B6/42 ,  G01K11/32 ,  G01N29/24 ,  G01N29/14 ,  G01K1/14 ,  G01J3/02

Abstract: An apparatuses relating generally to a test wafer, processing chambers, and method relating generally to monitoring or calibrating a processing chamber, are described. In one such an apparatus for a test wafer, there is a platform. An optical fiber with Fiber Bragg Grating sensors is located over the platform. A layer of material is located over the platform and over the optical fiber.

公开(公告)号：US20190006157A1

公开(公告)日：2019-01-03

申请号：US16036359

申请日：2018-07-16

Applicant: iSenseCloud, Inc.

Inventor： William J. O'Banion ,  An-Dien Nguyen ,  Huy D. Nguyen

IPC: H01J37/32 ,  G02B6/02 ,  G02B6/42 ,  G01K11/32 ,  G01N29/14 ,  G01N29/24

Abstract: An apparatuses relating generally to a test wafer, processing chambers, and method relating generally to monitoring or calibrating a processing chamber, are described. In one such an apparatus for a test wafer, there is a platform. An optical fiber with Fiber Bragg Grating sensors is located over the platform. A layer of material is located over the platform and over the optical fiber.

公开(公告)号：US11901165B2

公开(公告)日：2024-02-13

申请号：US16952884

申请日：2020-11-19

Applicant: iSenseCloud, Inc.

Inventor： William J. O'Banion ,  An-Dien Nguyen ,  Huy D. Nguyen

IPC: H01J37/32 ,  G02B6/02 ,  G02B6/42 ,  G01K11/3206 ,  G01N29/24 ,  G01N29/14 ,  G01K1/14 ,  G01J3/02 ,  H01L21/687 ,  H01S5/06 ,  H01S5/068 ,  H01S5/40 ,  G01J3/18

CPC classification number: H01J37/32917 ,  G01J3/0208 ,  G01K1/14 ,  G01K11/3206 ,  G01N29/14 ,  G01N29/2418 ,  G01N29/2462 ,  G02B6/0208 ,  G02B6/4204 ,  G01J3/18 ,  H01J2237/24585 ,  H01L21/68742 ,  H01S5/0617 ,  H01S5/06804 ,  H01S5/06808 ,  H01S5/4087

Abstract: An apparatuses relating generally to a test wafer, processing chambers, and method relating generally to monitoring or calibrating a processing chamber, are described. In one such an apparatus for a test wafer, there is a platform. An optical fiber with Fiber Bragg Grating sensors is located over the platform. A layer of material is located over the platform and over the optical fiber.

公开(公告)号：US10861682B2

公开(公告)日：2020-12-08

申请号：US16036359

申请日：2018-07-16

Applicant: iSenseCloud, Inc.

Inventor： William J. O'Banion ,  An-Dien Nguyen ,  Huy D. Nguyen

IPC: G02B6/02 ,  H01J37/32 ,  G02B6/42 ,  G01K11/32 ,  G01N29/24 ,  G01N29/14 ,  G01K1/14 ,  G01J3/02 ,  H01L21/687 ,  H01S5/06 ,  H01S5/068 ,  H01S5/40 ,  G01J3/18

Abstract: An apparatuses relating generally to a test wafer, processing chambers, and method relating generally to monitoring or calibrating a processing chamber, are described. In one such an apparatus for a test wafer, there is a platform. An optical fiber with Fiber Bragg Grating sensors is located over the platform. A layer of material is located over the platform and over the optical fiber.