公开(公告)号：US09244208B2

公开(公告)日：2016-01-26

申请号：US14094804

申请日：2013-12-03

Applicant: BIOZOOM TECHNOLOGIES, INC.

Inventor： Hartmut Hillmer ,  Wolfgang Koecher ,  Juergen Krieg ,  Carl Sandhagen ,  Hardy Hoheisel ,  Winfried Willemer

IPC: G01B9/02 ,  G02B5/28 ,  B82Y10/00 ,  B82Y40/00 ,  G01J3/02 ,  G01J3/28 ,  G01J3/36 ,  G02B5/20 ,  H01L27/146 ,  A61B5/00 ,  G01J3/44 ,  G01J3/51 ,  G03F7/00

CPC classification number: G02B5/284 ,  A61B5/0075 ,  B82Y10/00 ,  B82Y40/00 ,  G01J3/02 ,  G01J3/0259 ,  G01J3/2803 ,  G01J3/36 ,  G01J3/4406 ,  G01J3/51 ,  G02B5/201 ,  G02B5/288 ,  G03F7/0002 ,  H01L27/14621 ,  H01L27/14685 ,  Y10T29/49826

Abstract: An optical filter array includes a substrate permeable to an electromagnetic radiation to be detected, a first DBR mirror arranged on the substrate, a second DBR minor arranged above the first DBR mirror, and a plurality of cavity sections. The cavity sections have different respective optical lengths, and are arranged so as to be spatially separated from each other between the first DBR mirror and the second DBR mirror. Each of the first DBR mirror, the second DBR mirror, and the plurality of cavity sections with different optical lengths form filter elements of a filter. The filter reflects in a stopband determined by the first DBR mirror and the second DBR mirror. Each filter element has at least one narrow transmission band determined by the optical length of its respective cavity section located inside the stopband. A different thicknesses of the cavity sections is provided via a nanoimprint process.

Abstract translation: 光学滤波器阵列包括可透过要检测的电磁辐射的基底，布置在基底上的第一DBR镜，布置在第一DBR镜上方的第二DBR微镜，以及多个空腔部分。 空腔部分具有不同的各自的光学长度，并且被布置成在第一DBR反射镜和第二DBR反射镜之间在空间上彼此分离。 第一DBR镜，第二DBR镜和具有不同光学长度的多个空腔部分中的每一个形成过滤器的过滤器元件。 滤波器以由第一DBR镜和第二DBR镜确定的阻带反射。 每个滤光元件具有由其位于阻挡带内部的相应空腔部分的光学长度确定的至少一个窄透射带。 通过纳米压印工艺提供不同厚度的空腔部分。

公开(公告)号：US20140151575A1

公开(公告)日：2014-06-05

申请号：US14094804

申请日：2013-12-03

Applicant: Hartmut Hillmer ,  Wolfgang Koecher ,  Juergen Krieg ,  Carl Sandhagen ,  Hardy Hoheisel ,  Winfried Willemer

Inventor： Hartmut Hillmer ,  Wolfgang Koecher ,  Juergen Krieg ,  Carl Sandhagen ,  Hardy Hoheisel ,  Winfried Willemer

IPC: G02B5/28 ,  G01J3/44 ,  A61B5/00 ,  G01J3/51

CPC classification number: G02B5/284 ,  A61B5/0075 ,  B82Y10/00 ,  B82Y40/00 ,  G01J3/02 ,  G01J3/0259 ,  G01J3/2803 ,  G01J3/36 ,  G01J3/4406 ,  G01J3/51 ,  G02B5/201 ,  G02B5/288 ,  G03F7/0002 ,  H01L27/14621 ,  H01L27/14685 ,  Y10T29/49826

Abstract: An optical filter array includes a substrate permeable to an electromagnetic radiation to be detected, a first DBR mirror arranged on the substrate, a second DBR minor arranged above the first DBR mirror, and a plurality of cavity sections. The cavity sections have different respective optical lengths, and are arranged so as to be spatially separated from each other between the first DBR minor and the second DBR mirror. Each of the first DBR minor, the second DBR mirror, and the plurality of cavity sections with different optical lengths form filter elements of a filter. The filter reflects in a stopband determined by the first DBR mirror and the second DBR mirror. Each filter element has at least one narrow transmission band determined by the optical length of its respective cavity section located inside the stopband. A different thicknesses of the cavity sections is provided via a nanoimprint process.

Abstract translation: 光学滤波器阵列包括可透过要检测的电磁辐射的基底，布置在基底上的第一DBR镜，布置在第一DBR镜上方的第二DBR微镜，以及多个空腔部分。 空腔部分具有不同的各自的光学长度，并且被布置成在第一DBR次要和第二DBR反射镜之间在空间上彼此分离。 第一DBR次要装置，第二DBR反射镜和具有不同光学长度的多个空腔部分中的每一个形成过滤器的过滤元件。 滤波器以由第一DBR镜和第二DBR镜确定的阻带反射。 每个滤光元件具有由其位于阻挡带内部的相应空腔部分的光学长度确定的至少一个窄透射带。 通过纳米压印工艺提供不同厚度的空腔部分。

公开(公告)号：US08629986B2

公开(公告)日：2014-01-14

申请号：US12376690

申请日：2007-08-09

Applicant: Hartmut Hillmer ,  Wolfgang Koecher ,  Juergen Krieg ,  Carl Sandhagen ,  Hardy Hoheisel ,  Winfried Willemer

Inventor： Hartmut Hillmer ,  Wolfgang Koecher ,  Juergen Krieg ,  Carl Sandhagen ,  Hardy Hoheisel ,  Winfried Willemer

IPC: G01B9/02

CPC classification number: G02B5/284 ,  A61B5/0075 ,  B82Y10/00 ,  B82Y40/00 ,  G01J3/02 ,  G01J3/0259 ,  G01J3/2803 ,  G01J3/36 ,  G01J3/4406 ,  G01J3/51 ,  G02B5/201 ,  G02B5/288 ,  G03F7/0002 ,  H01L27/14621 ,  H01L27/14685 ,  Y10T29/49826

Abstract: The invention relates to an optical filter and a method for its production, and to a device for the examination of the spectral and spatial distribution of an electromagnetic radiation irradiated from an object. The invention is based on the task of providing an optical filter of the above described type that is inexpensive to produce, which can be used to detect a plurality of wavelengths, in which, however, tuning of the DBR mirrors by means of displacement is not necessary. Furthermore, a method for the production of such a filter is provided. According to a first aspect of the present invention this task is solved by a method for the production of an optical filter array having two DBR mirrors, and a cavity present between the same, comprising cavity sections having a plurality of different heights, each forming one Fabry Perot filter element, characterized by the following steps: applying a first DBR mirror onto a substrate, forming of a layer comprised of a cavity material on the DBR mirror, wherein this layer is equipped with a plurality of cavity sections forming the filter elements by means of utilizing a nanoimprint method, and applying the second DBR mirror on the cavity material having a structuring that is defined by the different heights of the cavity sections.

Abstract translation: 本发明涉及一种光学滤波器及其制造方法，以及用于检查从物体照射的电磁辐射的光谱和空间分布的装置。 本发明基于提供上述类型的光学滤波器的任务，该滤波器便于制造，其可用于检测多个波长，然而，通过位移调节DBR反射镜不是 必要。 此外，提供了一种用于生产这种过滤器的方法。 根据本发明的第一方面，该任务通过一种用于制造具有两个DBR反射镜的光学滤光片阵列的方法和在其之间存在的空腔来实现，该腔体包括具有多个不同高度的空腔部分，每个形成一个 法布里·珀罗滤光元件，其特征在于以下步骤：将第一DBR反射镜施加到基板上，在DBR反射镜上形成由空腔材料构成的层，其中该层配备有多个通过形成滤光元件的空腔部分 利用纳米压印方法的手段，以及将第二DBR反射镜应用于具有由空腔部分的不同高度限定的结构的腔体材料。