Method of forming laterally distributed LEDs
    1.
    发明授权
    Method of forming laterally distributed LEDs 有权
    形成横向分布式LED的方法

    公开(公告)号:US07888152B2

    公开(公告)日:2011-02-15

    申请号:US12366609

    申请日:2009-02-05

    IPC分类号: H01L21/00

    CPC分类号: H01L27/153

    摘要: A method of forming laterally distributed light emitting diodes (LEDs) is disclosed. A first buffer layer with a first type of conductivity is formed on a semiconductor substrate, and a dielectric layer is formed on the first buffer layer. The dielectric layer is patterned to form a first patterned space therein, followed by forming a first active layer in the first patterned space. The dielectric layer is then patterned to form a second patterned space therein, followed by forming a second active layer in the second patterned space. Second buffer layers with a second type of conductivity are then formed on the first active layer and the second active layer. Finally, electrodes are formed on the second buffer layers and on the first buffer layer.

    摘要翻译: 公开了形成横向分布式发光二极管(LED)的方法。 在半导体衬底上形成具有第一导电类型的第一缓冲层,并且在第一缓冲层上形成电介质层。 图案化电介质层以在其中形成第一图案化空间,随后在第一图案化空间中形成第一有源层。 然后对电介质层进行图案化以在其中形成第二图案化空间,随后在第二图案化空间中形成第二有源层。 然后在第一有源层和第二有源层上形成具有第二类导电性的第二缓冲层。 最后,在第二缓冲层和第一缓冲层上形成电极。