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公开(公告)号：US20050287050A1
公开(公告)日：2005-12-29
申请号：US11213181
申请日：2005-08-25
CPC分类号： B01D53/0423 , B01D53/04 , B01D53/26 , B01D53/74 , B01D53/75 , B01D53/86 , B01D53/864 , B01D2253/10 , B01D2257/404 , B01D2257/504 , B01D2257/80 , B01D2259/40001 , B01D2259/40003 , B01D2259/40086 , Y02C10/08
摘要： The invention teaches a purification system which uses a series of operations, in a single unit, to purify air, while extending the life of the purification units. Air is passed through a coarse water trap to remove liquid. The semi-dry air, which is usually less than 3000 ppm of water vapor, is then passed through adsorbers, which remove the remaining moisture and all the carbon dioxide in a purification process. The drying of the air before passing it through the adsorbers allows for greatly improved efficiency of air purification and extends the life of both the oxygen catalyst and the adsorption columns. The present invention also flows the air to be purified through adsorption columns twice, before and after passing the air through an oxygen catalyst unit. The oxidizing catalyst, which is heated to a temperature of approximately 300 degrees centigrade, converts carbon monoxide and hydrocarbons to H2O and CO2. The newly converted H2O and CO2 are then removed by the second pass through a second adsorption column in the second flow direction or downstream. The flows of air are then rotated with a third column, which is thermally regenerating with the facilitation of a regeneration air supply from the purified air.
摘要翻译： 本发明教导了一种净化系统，其在单个单元中使用一系列操作来净化空气，同时延长净化单元的寿命。 空气通过粗水阱以除去液体。 通常小于3000ppm的水蒸气的半干燥空气通过吸附器，其在净化过程中除去剩余的水分和所有的二氧化碳。 空气在通过吸附器之前的干燥允许大大提高空气净化的效率并延长氧气催化剂和吸附塔的寿命。 在通过氧气催化剂单元之前和之后，本发明还通过吸附塔将待净化的空气流过两次。 加热到约300摄氏度的氧化催化剂将一氧化碳和烃转化为H 2 O和CO 2。 然后通过在第二流动方向或下游的第二吸附塔的第二次通过除去新转化的H 2 O 2和CO 2 2。 然后空气流随着第三塔旋转，第三塔是热再生，促进来自净化空气的再生空气供应。
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公开(公告)号：US6109880A
公开(公告)日：2000-08-29
申请号：US997974
申请日：1997-12-24
申请人： Gordon Krueger , D'Arcy Lorimer , Sergio Carella , Andrea Conte
发明人： Gordon Krueger , D'Arcy Lorimer , Sergio Carella , Andrea Conte
CPC分类号： C23C14/564 , F04B37/02
摘要： An improved getter pump module includes a number of getter elements and a heating element that heats the getter elements. The getter elements are preferably porous, sintered getter disks. The heating element is disposed proximate to the getter elements and provides heat to activate the getter material and cause it to pump desired gasses. The getter elements and heater element are partially surrounded by a focus shield that is positioned between the getter elements and a wall of a processing chamber that encloses the getter elements, the heater element, and the focus shield. The focus shield is provided to reflect thermal energy to the getter material from the heater element, to provide high pumping speeds or short activation/baking times, and to reduce the heat seen by the chamber from the heating element. In certain embodiments of the present invention the focus shield is angled as to be wedge shaped, and may include planar extension portions. Multiple focus shields are provided in some embodiments.
摘要翻译： 改进的吸气泵模块包括多个吸气元件和加热吸气元件的加热元件。 吸气元件优选是多孔的，烧结的吸气剂盘。 加热元件靠近吸气元件设置并提供热量以激活吸气剂材料并使其泵送期望的气体。 吸气元件和加热器元件被聚焦屏蔽部分地围绕，该聚焦屏蔽件位于吸气剂元件和包围吸气元件，加热器元件和聚焦屏蔽的处理室的壁之间。 提供聚焦屏蔽以将热能从加热器元件反射到吸气材料，以提供高泵送速度或短的激活/烘烤时间，并且减少腔室与加热元件所看到的热量。 在本发明的某些实施例中，聚焦屏蔽物是楔形的，并且可以包括平面延伸部分。 在一些实施例中提供了多个聚焦屏蔽。
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公开(公告)号：US5158106A
公开(公告)日：1992-10-27
申请号：US711629
申请日：1991-06-06
申请人： Glen E. McIntosh
发明人： Glen E. McIntosh
CPC分类号： F16K41/10 , Y10T137/7036
摘要： A cryogenic valve that uses conventional materials in unusual ways to achieve very low heat leak, excellent strength, pressure or vacuum integrity and modest manufacturing cost. Heat leak rates on the order of 0.5 watt have been obtained in a 1.5 inch valve. Such performance is made possible by the unique structure of the valve stem, of the bonnet extension, and of certain insulative spacers. The valve stem consists of a thin wall tube of wound glass filaments in an epoxy matrix. The bonnet extension consists of a thin wall stainless steel bellows wound with glass fibers in an epoxy matrix. The insulative spacers have a shape that results in a long tortuous conduction path when they are stacked inside the valve stem and in the space between the valve stem and the bonnet extension.
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公开(公告)号：US07449054B2
公开(公告)日：2008-11-11
申请号：US11213181
申请日：2005-08-25
CPC分类号： B01D53/0423 , B01D53/04 , B01D53/26 , B01D53/74 , B01D53/75 , B01D53/86 , B01D53/864 , B01D2253/10 , B01D2257/404 , B01D2257/504 , B01D2257/80 , B01D2259/40001 , B01D2259/40003 , B01D2259/40086 , Y02C10/08
摘要： The invention teaches a purification system which uses a series of operations, in a single unit, to purify air, while extending the life of the purification units. Air is passed through a coarse water trap to remove liquid. The semi-dry air, is then passed through adsorbers, which remove the remaining moisture and all the carbon dioxide in a purification process. The present invention flows the air to be purified through adsorption columns twice, before and after passing the air through an oxygen catalyst unit. The flows of air are then rotated to a third column, which is thermally regenerating with the facilitation of a regeneration air supply from the purified air.
摘要翻译： 本发明教导了一种净化系统，其在单个单元中使用一系列操作来净化空气，同时延长净化单元的寿命。 空气通过粗水阱以除去液体。 半干燥空气然后通过吸附器，在净化过程中除去剩余的水分和所有的二氧化碳。 在通过氧气催化剂单元之前和之后，本发明通过吸附塔将待净化的空气流动两次。 然后将空气流旋转至第三塔，该第三塔是热净化，促进来自净化空气的再生空气供应。
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5.发明授权Gas purification system with an integrated hydrogen sorption and filter assembly 有权具有集成氢吸附和过滤组件的气体净化系统公开(公告)号：US06890376B2
公开(公告)日：2005-05-10
申请号：US10607190
申请日：2003-06-26
CPC分类号： C01B23/0084 , B01D46/2403 , B01D46/4272 , B01D46/448 , B01D53/04 , B01D53/0423 , B01D53/0438 , B01D53/0454 , B01D2253/10 , B01D2253/112 , B01D2253/25 , B01D2253/304 , B01D2253/342 , B01D2256/10 , B01D2256/18 , B01D2257/108 , B01D2258/0216 , B01D2259/40001 , B01D2259/40009 , B01D2259/40088 , B01D2259/40098 , B01D2259/402 , B01D2259/65 , B01D2267/00 , C01B21/0433 , C01B21/0483 , C01B23/0036 , C01B2210/0053
摘要： The present invention provides a gas purification system with improved efficiency, simpler construction, cost reductions, form factor improvements, and increased durability. The present invention provides cost and form factor improvements through fewer components overall and through utilizing multiple integrated components. Prior art gas purification systems are more bulky and complicated. The present invention achieves increased thermal efficiency through utilization of a regenerative heat exchanger to recapture a portion of the heat energy transferred to the gas during the purification process. Prior art purifiers lacked a regenerative heat exchanger. The present invention integrates the two components into one integrated heater and purification vessel assembly. The present invention integrates the two discrete components into one integrated hydrogen sorption and particle filter assembly. The integrated hydrogen sorption and particle filter assembly is also capable of operating at higher temperatures. This eases maintenance and manufacture. The resulting gas purification system is simpler through utilizing fewer components, smaller by utilizing fewer and integrated components, and reduced cost through fewer components, smaller components and through reduced manufacture labor requirements.
摘要翻译： 本发明提供了一种提高效率，更简单的结构，降低成本，改善形状因素和提高耐久性的气体净化系统。 本发明通过更少的组件和通过利用多个集成组件来提供成本和形状因素的改进。 现有技术的气体净化系统更加庞大和复杂。 本发明通过利用再生式热交换器来实现提高的热效率，以在净化过程中重新捕获转移到气体中的一部分热能。 现有技术的净化器缺少再生热交换器。 本发明将两个部件集成到一个集成的加热器和净化容器组件中。 本发明将两个分立组件集成到一个集成的氢吸附和颗粒过滤器组件中。 集成的氢吸附和颗粒过滤器组件也能够在较高的温度下运行。 这有助于维护和制造。 所得到的气体净化系统通过使用较少的部件，通过使用较少的和集成的部件较小，并且通过较少的部件，较小的部件以及通过减少的制造劳动力要求降低成本而更简单。
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公开(公告)号：US6156105A
公开(公告)日：2000-12-05
申请号：US335801
申请日：1999-06-17
CPC分类号： B01D53/0446 , B01D53/0423 , B01D53/0454 , B01D53/30 , B01D53/346 , C23C16/4402 , C23C16/45561 , C30B25/14 , B01D2258/0216 , Y10S438/909
摘要： A semiconductor manufacturing system includes a getter-based gas purifier coupled in flow communication with a gas distribution network for a semiconductor fabrication facility. The gas distribution network supplies purified gas to at least one wafer processing chamber in the semiconductor fabrication facility. The gas purifier includes a getter column having a metallic vessel with an inlet, an outlet, and a containment wall extending between the inlet and the outlet. Getter material which purifies gas flowing therethrough by sorbing impurities therefrom is disposed in the vessel. A first temperature sensor is disposed in a top portion of the getter material. The first temperature sensor is located in a melt zone to detect rapidly the onset of an exothermic reaction which indicates the presence of excess impurities in the incoming gas to be purified. A second temperature sensor is disposed in a bottom portion of the getter material. The second temperature sensor is located in a melt zone to detect rapidly the onset of an exothermic reaction which indicates that excess impurities are being backfed into the getter column. First and second high melting point, nonmetallic liners are disposed in the vessel such that at least some of the top and bottom portions, respectively, of the getter material is separated from the containment wall of the vessel. A getter-based gas purifier, a method of making an integrated circuit device, and a method of protecting a getter column are also described.
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公开(公告)号：US06142742A
公开(公告)日：2000-11-07
申请号：US826866
申请日：1997-04-11
CPC分类号： F04B37/02 , C23C14/564
摘要： A getter pump module includes a number of getter disks provided with axial holes, and a heating element which extends through the holes to support and heat the getter disks. The getter disks are preferably solid, porous, sintered getter disks that are provided with a titanium hub that engages the heating element. A thermally isolating shield is provided to shield the getter disks from heat sources and heat sinks within the chamber, and to aid in the rapid regeneration of the getter disks. In certain embodiments of the present invention the heat shields are fixed, and in other embodiments the heat shield is movable. In one embodiment, a focus shield is provided to reflect thermal energy to the getter material from an external heater element and provide high pumping speeds. An embodiment of the present invention also provides for a rotating getter element to enhance getter material utilization.
摘要翻译： 吸气泵模块包括设置有轴向孔的多个吸气盘，以及延伸穿过孔以加热吸气盘的加热元件。 吸气盘优选是固体，多孔，烧结的吸气剂盘，其具有与加热元件接合的钛毂。 提供了一种隔热屏蔽件，用于屏蔽吸气剂盘从室内的热源和散热器，并帮助吸气剂盘的快速再生。 在本发明的某些实施例中，隔热罩是固定的，并且在其它实施例中，隔热罩是可移动的。 在一个实施例中，提供聚焦屏蔽以将来自外部加热器元件的吸热材料的热能反射并提供高的泵送速度。 本发明的一个实施方案还提供了一种旋转吸气剂元件以增强吸气剂材料的利用。
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公开(公告)号：US6068685A
公开(公告)日：2000-05-30
申请号：US950929
申请日：1997-10-15
CPC分类号： B01D53/0446 , B01D53/0423 , B01D53/0454 , B01D53/30 , B01D53/346 , C23C16/4402 , C23C16/45561 , C30B25/14 , B01D2258/0216 , Y10S438/909
摘要： A semiconductor manufacturing system includes a getter-based gas purifier coupled in flow communication with a gas distribution network for a semiconductor fabrication facility. The gas distribution network supplies purified gas to at least one wafer processing chamber in the semiconductor fabrication facility. The gas purifier includes a getter column having a metallic vessel with an inlet, an outlet, and a containment wall extending between the inlet and the outlet. Getter material which purifies gas flowing therethrough by sorbing impurities therefrom is disposed in the vessel. A first temperature sensor is disposed in a top portion of the getter material. The first temperature sensor is located in a melt zone to detect rapidly the onset of an exothermic reaction which indicates the presence of excess impurities in the incoming gas to be purified. A second temperature sensor is disposed in a bottom portion of the getter material. The second temperature sensor is located in a melt zone to detect rapidly the onset of an exothermic reaction which indicates that excess impurities are being backfed into the getter column. First and second high melting point, nonmetallic liners are disposed in the vessel such that at least some of the top and bottom portions, respectively, of the getter material is separated from the containment wall of the vessel. A getter-based gas purifier, a method of making an integrated circuit device, and a method of protecting a getter column are also described.
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公开(公告)号：US5855118A
公开(公告)日：1999-01-05
申请号：US823748
申请日：1997-03-25
申请人： D'Arcy H. Lorimer
发明人： D'Arcy H. Lorimer
CPC分类号： F04B37/02 , F04B37/08 , Y10S417/901
摘要： A combination cryopump/getter pump including a cryopump section having a cryopump inlet, a getter pump section having a getter pump inlet, and a mechanism for coupling the cryopump section and the getter pump section to a single port of a process chamber to be evacuated. Preferably, a cylindrical cryopump section surrounds a cylindrical getter pump section. Preferably, the cryopump section and the getter pump section are coupled to the common port of the process chamber by a gate valve mechanism. In one embodiment of the present invention, the gate valve mechanism isolates the cryopump inlet and the getter pump inlet when in a closed position, and in another embodiment of the present invention the gate valve does not isolate the cryopump inlet from the getter pump inlet when in a closed position. Preferably, thermal insulation is provided between the getter pump section and the cryopump section to thermally isolate the two sections. The cryopump section preferably includes both a 15.degree. K array and a 80.degree. K array.
摘要翻译： 包括具有低温泵入口的低温泵部分，具有吸气泵入口的吸气泵部分和用于将低温泵部分和吸气泵部分耦合到要抽真空的处理室的单个端口的机构的组合式低温泵/吸气泵。 优选地，圆柱形低温泵部分围绕圆柱形吸气泵部分。 优选地，低温泵部分和吸气泵部分通过闸阀机构联接到处理室的公共端口。 在本发明的一个实施例中，闸阀机构在处于关闭位置时将低温泵入口和吸气泵入口隔离开，而在本发明的另一个实施例中，闸阀不将低温泵入口与吸气泵入口隔离， 处于关闭状态。 优选地，在吸气泵部分和低温泵部分之间提供热隔离以热隔离两个部分。 低温泵部分优选地包括15K阵列和80K阵列。
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10.再颁专利
公开(公告)号：USRE35725E
公开(公告)日：1998-02-10
申请号：US636029
申请日：1996-04-22
IPC分类号： B01D53/04
CPC分类号： B01D53/0407 , B01D53/04 , B01D2256/10 , B01D2256/18 , B01D2257/102 , B01D2257/108 , B01D2257/11 , B01D2258/0216 , B01D2259/402 , B01D2259/41
摘要： The invention relates generally to a gas purification system for the purification of noble gasses and nitrogen. An improved method of purification generally includes the following steps: (a) heating an impure gas; (b) contacting the impure gas with an impurity sorbing material to produce a purified gas; (c) cooling the purified gas to a temperature less than about 100.degree. C.; and (d) contacting the purified gas with a hydrogen sorbing gas to remove residual hydrogen. The system includes an improved heat exchange apparatus for cooling the purified gas and a low temperature hydrogen sorption apparatus.
摘要翻译： 本发明一般涉及用于净化贵重气体和氮气的气体净化系统。 改进的净化方法通常包括以下步骤：（a）加热不纯气体; （b）使不纯气体与杂质吸附材料接触以产生净化气体; （c）将净化的气体冷却至低于约100℃的温度; 和（d）使纯化的气体与吸氢气体接触以除去残留的氢气。 该系统包括用于冷却净化气体的改进的热交换装置和低温氢吸附装置。
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