公开(公告)号：US20070170428A1

公开(公告)日：2007-07-26

申请号：US11597766

申请日：2005-06-14

申请人： Shuji Hahakura ,  Kazuya Ohmatsu

发明人： Shuji Hahakura ,  Kazuya Ohmatsu

IPC分类号： H01L31/00 ,  H01L29/08 ,  C30B23/00 ,  C30B25/00 ,  B05D3/00 ,  H01L29/10

CPC分类号： H01L39/2461 ,  C23C14/024 ,  C23C14/028 ,  C30B29/22

摘要： A thin film material and a method of manufacturing the thin film material are obtained with which properties of films formed on a substrate can be improved. A superconducting wire 1 includes a substrate 2, an intermediate thin film layer (intermediate layer 3) formed on the substrate and comprised of one layer or at least two layers, and a single-crystal thin film layer (superconducting layer 4) formed on the intermediate thin film layer (intermediate layer 3). An upper surface (ground surface 10) that is the upper surface of at least one layer of the intermediate thin film layer (intermediate layer 3) and is opposite to the single-crystal thin film layer (superconducting layer 4) is ground.

摘要翻译： 获得薄膜材料和制造薄膜材料的方法，可以改善在基板上形成的膜的性质。 超导线1包括基板2，形成在基板上并由一层或至少两层构成的中间薄膜层（中间层3）和形成在该层上的单晶薄膜层（超导层4） 中间薄膜层（中间层3）。 研磨作为中间薄膜层（中间层3）的至少一层的上表面并与单晶薄膜层（超导层4）相反的上表面（接地面10）。