Method and apparatus for parsing event logs to determine tool operability
    1.
    发明授权
    Method and apparatus for parsing event logs to determine tool operability 有权
    用于解析事件日志以确定工具可操作性的方法和设备

    公开(公告)号:US06564171B1

    公开(公告)日:2003-05-13

    申请号:US09661694

    申请日:2000-09-14

    IPC分类号: G06F1760

    摘要: A method for determining operability of a tool includes generating an event log including a plurality of events associated with the operation of the tool; parsing the event log to identify a crucial event; and initiating an automatic corrective action in response to identifying a crucial event. A manufacturing system includes a tool and a tool monitor. The tool is adapted to generate an event log including a plurality of events associated with the operation of the tool. The tool monitor is adapted to parse the event log to identify a crucial event and initiate an automatic corrective action in response to identifying a crucial event.

    摘要翻译: 一种用于确定工具的可操作性的方法包括生成包括与所述工具的操作相关联的多个事件的事件日志; 解析事件日志以识别关键事件; 以及响应于识别关键事件而启动自动纠正措施。 制造系统包括工具和工具监视器。 该工具适于生成包括与工具的操作相关联的多个事件的事件日志。 工具监视器适于解析事件日志以识别关键事件,并响应于识别关键事件而启动自动纠正措施。

    Monitor utility for use in manufacturing environment
    2.
    发明授权
    Monitor utility for use in manufacturing environment 失效
    监控实用程序用于制造环境

    公开(公告)号:US5548535A

    公开(公告)日:1996-08-20

    申请号:US335994

    申请日:1994-11-08

    申请人: John G. Zvonar

    发明人: John G. Zvonar

    摘要: Method and apparatus for a utility for monitoring, tracking and scheduling the performance of periodic activities in a manufacturing environment is disclosed. In a preferred embodiment, the monitor utility of present invention is a VAX-based menu-driven program that is used to schedule and track periodic activities. erformed on tools and machines, or "entities." In one aspect of the invention, a user may create a family of entities to be monitored and may schedule various monitor items to be performed in connection with each entity, which items may be "triggered" by the occurrence of a designated event a designated number of times or by the elapse of a designated period of time. In another aspect of the invention, the utility may be used easily to generate and display and/or print reports in various formats showing the status of monitor items for a particular family and/or entity. In another aspect of the invention, the utility is capable of sending one or more VAX mail messages to designated users when certain monitor items are due. In addition, the utility may be configured to send a VAX mail warning message to designated users a predetermined amount of time before a monitor item becomes due so that the recipient(s) can take steps to perform the monitor item by the due date. In yet another aspect of the invention, if a monitor item is not performed by the due date, the utility is capable of logging down the entity with which the overdue monitor item is associated.

    摘要翻译: 公开了用于在制造环境中监视,跟踪和调度周期性活动的性能的实用程序的方法和装置。 在优选实施例中,本发明的监视实用程序是用于调度和跟踪周期性活动的基于VAX的菜单驱动程序。 在工具和机器上,或“实体”上发生变化。 在本发明的一个方面,用户可以创建要监视的一系列实体,并且可以安排与每个实体相关联地执行的各种监视项目,哪些项可以通过指定事件的发生指定数字“触发” 的时间或经过指定的时间段。 在本发明的另一方面,该实用程序可以容易地用于生成和/或打印各种格式的报告,显示特定家庭和/或实体的监视项目的状态。 在本发明的另一方面,当某些监视项目到期时,该实用程序能够向指定用户发送一个或多个VAX邮件消息。 此外,该实用程序可以被配置为在监视项目到期之前向指定用户发送预定时间量的VAX邮件警告消息,使得接收者可以在到期日期之前执行监视项目的步骤。 在本发明的另一方面,如果监视项目在到期日期之前未执行,则该实用程序能够记录与逾期监视项目相关联的实体。

    Automation network comprising network components that produce status messages
    5.
    发明申请
    Automation network comprising network components that produce status messages 有权
    包括产生状态消息的网络组件的自动化网络

    公开(公告)号:US20090204695A1

    公开(公告)日:2009-08-13

    申请号:US11547942

    申请日:2005-04-08

    IPC分类号: G06F15/16

    摘要: The invention relates to an automation network and to automation equipment, network components and field devices for an automation network of this type. The network components transmit messages concerning their status to the automation equipment by means of a communication mechanism that functions according to field communication automation technology. Said automation equipment receives the status messages, evaluates them, monitors the operation of the network and controls said operation using the status messages. As the automation equipment thus contains the complete picture of the process and the network, it can react directly and rapidly to problems of the network. This eliminates the need, for example, for an additional SNMP/OPC server or a network management station.

    摘要翻译: 本发明涉及自动化网络以及用于这种自动化网络的自动化设备,网络组件和现场设备。 网络组件通过根据现场通信自动化技术起作用的通信机制将有关其状态的消息传送到自动化设备。 所述自动化设备接收状态消息,评估它们,监视网络的操作并且使用状态消息来控制所述操作。 因为自动化设备因此包含过程和网络的完整图像,所以它可以直接和快速地对网络的问题做出反应。 这样就不需要额外的SNMP / OPC服务器或网络管理站。

    SUBSTRATE PROCESSING SYSTEM CAPABLE OF MONITORING OPERATION OF SUBSTRATE PROCESSING APPARATUS
    6.
    发明申请
    SUBSTRATE PROCESSING SYSTEM CAPABLE OF MONITORING OPERATION OF SUBSTRATE PROCESSING APPARATUS 审中-公开
    能够监测基板加工装置运行的基板处理系统

    公开(公告)号:US20070179658A1

    公开(公告)日:2007-08-02

    申请号:US11670018

    申请日:2007-02-01

    申请人: Tetsuya HAMADA

    发明人: Tetsuya HAMADA

    IPC分类号: G06F19/00

    摘要: Operating information about an operating part for performing an operation for processing in a substrate processing apparatus is detected by a detector, and is transmitted as an operating information signal from a unit controller to a data controller. An obtaining part in the data controller accumulates such operating information signals to obtain operating state transition information indicating a change with time in operating state of the operating part, and judges whether or not the operating state transition information is abnormal. When the operating state transition information is abnormal, a warning signal indicating that the operating state of the operating part is abnormal is transmitted from the data controller to a main controller. When the main controller receives the warning signal, a warning issuing part in the main controller issues a warning indicating that there is a possibility of the occurrence of a failure in the operating part.

    摘要翻译: 用于执行基板处理装置中的处理操作的操作部件的操作信息由检测器检测,并作为操作信息信号从单元控制器发送到数据控制器。 数据控制器中的获取部分累积这样的操作信息信号以获得指示操作部分的操作状态随时间的变化的操作状态转换信息,并且判断操作状态转换信息是否异常。 当操作状态转移信息异常时,从数据控制器向主控制器发送表示操作部的动作状态异常的警告信号。 当主控制器接收到警告信号时,主控制器中的警告发出部分发出指示在操作部分发生故障的可能性的警告。