摘要:
A method for determining operability of a tool includes generating an event log including a plurality of events associated with the operation of the tool; parsing the event log to identify a crucial event; and initiating an automatic corrective action in response to identifying a crucial event. A manufacturing system includes a tool and a tool monitor. The tool is adapted to generate an event log including a plurality of events associated with the operation of the tool. The tool monitor is adapted to parse the event log to identify a crucial event and initiate an automatic corrective action in response to identifying a crucial event.
摘要:
Method and apparatus for a utility for monitoring, tracking and scheduling the performance of periodic activities in a manufacturing environment is disclosed. In a preferred embodiment, the monitor utility of present invention is a VAX-based menu-driven program that is used to schedule and track periodic activities. erformed on tools and machines, or "entities." In one aspect of the invention, a user may create a family of entities to be monitored and may schedule various monitor items to be performed in connection with each entity, which items may be "triggered" by the occurrence of a designated event a designated number of times or by the elapse of a designated period of time. In another aspect of the invention, the utility may be used easily to generate and display and/or print reports in various formats showing the status of monitor items for a particular family and/or entity. In another aspect of the invention, the utility is capable of sending one or more VAX mail messages to designated users when certain monitor items are due. In addition, the utility may be configured to send a VAX mail warning message to designated users a predetermined amount of time before a monitor item becomes due so that the recipient(s) can take steps to perform the monitor item by the due date. In yet another aspect of the invention, if a monitor item is not performed by the due date, the utility is capable of logging down the entity with which the overdue monitor item is associated.
摘要:
A board production management device configured to manage a board production line including an initial notification section configured to issue notification information including at least one of a contents of an error cause or a contents of countermeasures when the error cause that requires countermeasures occurs at the board production line; and an escalation notification section configured to issue the notification information after escalating in a case in which the error cause is not resolved after a specified time has elapsed since the error cause occurred. Accordingly, because when the specified time has elapsed, a notification is issued as escalating the notifyee or escalating the contents of countermeasures to resolve error causes more effectively, and compared to conventional technology in which only re-notification of the occurrence of the error cause is performed, notification is performed more efficiently, enabling an error cause that requires countermeasures to be resolved more quickly.
摘要:
The invention relates to an automation network and to automation equipment, network components and field devices for an automation network of this type. The network components transmit messages concerning their status to the automation equipment by means of a communication mechanism that functions according to field communication automation technology. Said automation equipment receives the status messages, evaluates them, monitors the operation of the network and controls said operation using the status messages. As the automation equipment thus contains the complete picture of the process and the network, it can react directly and rapidly to problems of the network. This eliminates the need, for example, for an additional SNMP/OPC server or a network management station.
摘要:
The invention relates to an automation network and to automation equipment, network components and field devices for an automation network of this type. The network components transmit messages concerning their status to the automation equipment by means of a communication mechanism that functions according to field communication automation technology. Said automation equipment receives the status messages, evaluates them, monitors the operation of the network and controls said operation using the status messages. As the automation equipment thus contains the complete picture of the process and the network, it can react directly and rapidly to problems of the network. This eliminates the need, for example, for an additional SNMP/OPC server or a network management station.
摘要:
Operating information about an operating part for performing an operation for processing in a substrate processing apparatus is detected by a detector, and is transmitted as an operating information signal from a unit controller to a data controller. An obtaining part in the data controller accumulates such operating information signals to obtain operating state transition information indicating a change with time in operating state of the operating part, and judges whether or not the operating state transition information is abnormal. When the operating state transition information is abnormal, a warning signal indicating that the operating state of the operating part is abnormal is transmitted from the data controller to a main controller. When the main controller receives the warning signal, a warning issuing part in the main controller issues a warning indicating that there is a possibility of the occurrence of a failure in the operating part.