公开(公告)号：US20010043903A1

公开(公告)日：2001-11-22

申请号：US09783441

申请日：2001-02-14

Inventor： Marl Philip D'Evelyn ,  Dong-Sil Park ,  Thomas Richard Anthony ,  Clifford Lawrence Spiro ,  Yue Meng ,  Christopher Allen Long

IPC: C01B031/06 ,  B01J003/08

CPC classification number: C30B25/02 ,  B01J3/062 ,  B01J2203/061 ,  B01J2203/062 ,  B01J2203/0655 ,  B01J2203/068 ,  C01B32/25 ,  C30B29/04 ,  C30B31/00 ,  Y10T428/30

Abstract: An element-doped diamond crystal is disclosed herein. The crystal includes at least one dopant element which has a greater concentration toward or near an outermost surface of the crystal than in the center of the crystal. The concentration of the dopant element is at a local minimum at least about 5 micrometers below the surface. The concentration-profile of the dopant element for these diamond crystals causes an expansion of the diamond lattice, thereby generating tangential compressive stresses at the surface of the diamond crystal. These stresses beneficially increase the compressive fracture strength of the diamond.

Abstract translation: 本文公开了元素掺杂金刚石晶体。 所述晶体包括至少一种掺杂元素，所述至少一种掺杂元素朝向或接近晶体的最外表面具有比在晶体中心更大的浓度。 掺杂剂元素的浓度在表面下方至少约5微米的局部最小值。 用于这些金刚石晶体的掺杂剂元素的浓度分布导致金刚石晶格的膨胀，从而在金刚石晶体的表面产生切向压应力。 这些应力有利地增加了金刚石的压缩断裂强度。

公开(公告)号：US20030133851A1

公开(公告)日：2003-07-17

申请号：US10345767

申请日：2003-01-15

Applicant: TOKYO ELECTRON LIMITED

Inventor： Shigenori Kitahara

IPC: B01J003/08

CPC classification number: B01J3/08 ,  Y10S134/902

Abstract: Pluralities of ultrasonic transducers are arranged on the bottom wall of the cleaning tank. The output power of the ultrasonic oscillator is supplied to the transducers through the switching unit, which switches the drive mode between a first mode in which all the ultrasonic transducers are supplied with the output power and thus are excited, and a second mode in which only a part or parts of the ultrasonic transducers are supplied with the output power generated by the ultrasonic oscillator. The first mode is used when cleaning substrates not-resistant to vibration, and the second mode is used when cleaning substrates resistant to vibration.

Abstract translation: 多个超声波换能器布置在清洗槽的底壁上。 超声波振荡器的输出功率通过切换单元提供给换能器，该切换单元将所有超声换能器所提供的第一模式与输出功率进行激励并将其激励的第二模式切换到第二模式， 向超声波换能器的一部分供给由超声波振荡器产生的输出功率。 当清洁不耐振动的基材时，使用第一种模式，当清洁耐振动的基材时，使用第二种模式。

公开(公告)号：US20020064496A1

公开(公告)日：2002-05-30

申请号：US09995854

申请日：2001-11-29

Inventor： Yoshiki Nishibayashi ,  Kiichi Meguro ,  Takahiro Imai ,  Yutaka Ando

IPC: B01J003/08 ,  B44C001/22

CPC classification number: H01J9/025 ,  C30B29/04 ,  C30B33/00 ,  H01J1/3044 ,  Y10T428/24355 ,  Y10T428/24628 ,  Y10T428/30

Abstract: The method of making a diamond product in accordance with the present invention comprises the steps of forming a diamond substrate (50) with a mask layer (52), and etching the diamond substrate (50) formed with the mask layer (52) with a plasma of a mixed gas composed of a gas containing an oxygen atom and a gas containing a fluorine atom, whereas the fluorine atom concentration is within the range of 0.04% to 6% with respect to the total number of atoms in the mixed gas.

Abstract translation: 制造根据本发明的金刚石产品的方法包括以下步骤：用掩模层（52）形成金刚石基底（50），并用形成有掩模层（52）的金刚石基底（50）蚀刻 由含有氧原子的气体和含有氟原子的气体组成的混合气体的等离子体，而氟原子浓度相对于混合气体中的原子总数为0.04〜6％的范围。