公开(公告)号：US07083740B2

公开(公告)日：2006-08-01

申请号：US10494640

申请日：2003-08-20

申请人： Masaya Nakatani ,  Hirofumi Tajika

发明人： Masaya Nakatani ,  Hirofumi Tajika

IPC分类号： B34C1/22

CPC分类号： G01C19/5628 ,  G01C19/5621 ,  H03H9/21 ,  H03H2003/026

摘要： A piezoelectric member and an electrode are formed over a silicon substrate. The piezoelectric member and the electrode are patterned by photolithography. The silicon substrate is etched to form a body. A protective film is formed on at least one surface of the body. Another surface having no protective film thereon is etched to obtain a resonant device. The body is etched in its thickness direction accurately while a resonance frequency of the body is measured. The manufacturing processes allow the resonance frequency and a gap frequency of the resonant device to be adjusted to predetermined values.

摘要翻译： 在硅衬底上形成压电元件和电极。 压电元件和电极通过光刻图案化。 硅衬底被蚀刻以形成体。 在身体的至少一个表面上形成保护膜。 在其上没有保护膜的另一表面被蚀刻以获得谐振装置。 在测量身体的共振频率的同时，精确地蚀刻身体的厚度方向。 制造过程允许共振频率和谐振装置的间隙频率被调节到预定值。