公开(公告)号：US5386115A

公开(公告)日：1995-01-31

申请号：US124873

申请日：1993-09-22

申请人： Carl B. Freidhoff ,  Robert M. Young ,  Saptharishi Sriram

发明人： Carl B. Freidhoff ,  Robert M. Young ,  Saptharishi Sriram

IPC分类号： H01J49/28 ,  D01D59/44 ,  H01J49/00

CPC分类号： H01J49/288 ,  H01J49/0018

摘要： A solid state mass spectrograph includes an inlet, a gas ionizer, a mass filter and a detector array all formed within a cavity in a semiconductor substrate. The gas ionizer can be a solid state electron emitter with ion optics provided by electrodes formed on apertured partitions in the cavity forming compartments through which the cavity is evacuated by differential pumping. The mass filter is preferably a Wien filter with the magnetic field provided by a permanent magnet outside the substrate or by magnetic film on the cavity walls. The electric field of the Wien filter is provided by electrodes formed on walls of the cavity. The detector array is a linear array oriented in the dispersion plane of the mass filter and includes converging electrodes at the end of the cavity serving as Faraday cages which pass charge to signal generators such as charge coupled devices formed in the substrate but removed from the cavity.

摘要翻译： 固态质谱仪包括全部形成在半导体衬底的空腔内的入口，气体离子发生器，质量过滤器和检测器阵列。 气体离子发生器可以是具有离子光学器件的固态电子发射器，该离子光学器件由形成在空腔形成室中的多孔分隔壁上的电极提供，空腔通过差分泵送而被排空。 质量过滤器优选为具有由基板外部的永磁体提供的磁场或在腔壁上的磁性膜提供的维恩滤波器。 维恩滤波器的电场由形成在空腔的壁上的电极提供。 检测器阵列是在质量过滤器的色散平面中定向的线性阵列，并且包括在用作法拉第笼的腔的端部处的会聚电极，其将电荷传递到信号发生器，例如形成在衬底中的电荷耦合器件，但是从腔 。