公开(公告)号：US06434841B1

公开(公告)日：2002-08-20

申请号：US09563033

申请日：2000-05-01

申请人： William H. Stahl ,  Max E. Israel ,  David P. Wildemann ,  Richard D. Young ,  Richard Beach

发明人： William H. Stahl ,  Max E. Israel ,  David P. Wildemann ,  Richard D. Young ,  Richard Beach

IPC分类号： G01B1127

CPC分类号： G01B11/272 ,  Y10S33/21

摘要： A pulley alignment tool for checking the centerline alignment between a driving pulley and a driven pulley which are connected by a V-belt includes a targeting laser which is constructed and arranged to generate a beam of light which will be directed from a location adjacent the driving pulley to a location on the surface of the driven pulley. The targeting laser is mounted in a holder and the holder is constructed and arranged for attachment into the groove of the driving pulley. As a preliminary step, the V-belt which initially connects the driving pulley and driven pulley is removed, thereby making the driving pulley groove accessible for mounting the holder. An elastic cord is used to encircle the driving pulley and is connected to opposite ends of the holder in order to maintain the holder in a fixed position on the surface of the driving pulley. The targeting laser is used to check the centerline alignment between the driving and driven pulleys. The uppermost edge of the driven pulley is used as one check point and the lowermost edge of the driven pulley is used a second check point. Cooperating support bracketry is used as the means to make adjustments in the position of the driven pulley. All of the required components for the pulley alignment tool are provided as part of a tool alignment kit.

摘要翻译： 用于检查通过V形带连接的驱动滑轮和从动皮带轮之间的中心线对准的滑轮对准工具包括瞄准激光器，其被构造和布置成产生将从邻近驾驶的位置引导的光束 滑轮到从动皮带轮表面上的一个位置。 靶向激光器安装在保持器中，并且保持器被构造和布置成用于附接到驱动滑轮的凹槽中。 作为初步步骤，最初连接驱动滑轮和从动皮带轮的V形皮带被移除，从而使驱动皮带轮槽可以安装在支架上。 弹性绳用于围绕驱动滑轮并且连接到保持器的相对端，以将保持器保持在驱动滑轮表面上的固定位置。 瞄准激光器用于检查驱动和从动皮带轮之间的中心线对齐。 从动皮带轮的最上边缘用作一个检查点，从动皮带轮的最下边缘用作第二个检查点。 作为调整从动皮带轮位置的手段，使用协同支撑支架。 皮带轮对准工具的所有必需部件都作为刀具对准套件的一部分提供。

公开(公告)号：US06513255B1

公开(公告)日：2003-02-04

申请号：US09906339

申请日：2001-07-16

申请人： Michael L. Creekmore

发明人： Michael L. Creekmore

IPC分类号： G01B1127

CPC分类号： G01B11/00 ,  G01B11/27

摘要： A tool for use by a machinist in testing the accuracy of a workpiece has an edge to be abutted against the workpiece to be tested and an encased light source connected by a plurality of passages extending within the member to conduct light emitted from the source to an array of apertures spaced at intervals in a bevel of the edge. The array of apertures directs the light at the workpiece on one side of the edge so that defects in accuracy are illuminated to the machinist viewing the workpiece from the other side of the edge. Preferably, a plurality of fiber optic cords extend in the passages from the light source to the apertures.

摘要翻译： 机械师在测试工件精度时使用的工具具有与待测试的工件邻接的边缘，以及通过在构件内延伸的多个通道连接的被封装的光源，以将从源发射的光传导到 在边缘的斜面上以间隔隔开的孔阵列。 孔阵列将边缘的一侧的光引导到工件处，使精度缺陷照亮从边缘另一侧观察工件的机械师。 优选地，多个光纤线在从光源到孔的通道中延伸。

公开(公告)号：US06801315B2

公开(公告)日：2004-10-05

申请号：US10303052

申请日：2002-11-25

申请人： Moshe Finarov ,  David Scheiner

发明人： Moshe Finarov ,  David Scheiner

IPC分类号： G01B1127

CPC分类号： G03F7/70633

摘要： An optical measurement method and system are presented for imaging two target structures in two parallel layers, respectively, of a sample, to enable determination of a registration between the two target structures along two mutually perpendicular axes of the layer. The sample is illuminated with incident radiation to produce a radiation response of the sample. The radiation response is collected by an objective lens arrangement, and the collected radiation response is split into two spatially separated radiation components. The split radiation components are directed towards at least one imaging plane along different optical channels characterized by optical paths of different lengths, respectively. The two split radiation components are detected in said at least one imaging plane, and two image parts are thereby acquired, each image part containing images of the two target structures. This enables determination of the relative distance between the two target structures.

摘要翻译： 提出了一种光学测量方法和系统，用于分别对样本的两个平行层中的两个目标结构进行成像，以便能够沿着该层的两个相互垂直的轴确定两个目标结构之间的配准。 用入射辐射照射样品以产生样品的辐射响应。 辐射响应由物镜布置收集，并且收集的辐射响应被分成两个空间上分离的辐射分量。 分裂的辐射分量被引导到沿着不同长度的光路的不同光通道的至少一个成像平面。 在所述至少一个成像平面中检测到两个分离的辐射分量，从而获得两个图像部分，每个图像部分包含两个目标结构的图像。 这使得能够确定两个目标结构之间的相对距离。

公开(公告)号：US06427347B1

公开(公告)日：2002-08-06

申请号：US09488338

申请日：2000-01-20

申请人： Roy Butler, Sr.

发明人： Roy Butler, Sr.

IPC分类号： G01B1127

CPC分类号： G01C15/002 ,  Y10S33/21

摘要： A line transfer instrument and method for aligning a pipe laser's laser beam are disclosed wherein the instrument includes a base, a self-leveling scope rotatably mounted to the base so that it is capable of looking downward and slightly backward, a horizontal dove-tail slide for horizontally translating the base perpendicular to the line of sight, and a spotting laser for illuminating the pipe laser so that the scope can be centered more easily on it. The method includes positioning the scope over the pipe laser using the spotting laser and slide to illuminate the center of the pipe laser and center the scope over the pipe laser.

摘要翻译： 公开了用于对准管道激光器的激光束的线传输仪器和方法，其中仪器包括基座，可自由调节的示意图可旋转地安装到基座，使得其能够向下和稍微向后看，水平的鸠尾滑块 用于水平平移垂直于视线的底座，以及用于照亮管道激光器的点样激光器，使得其范围可以更容易地集中在其上。 该方法包括使用点样激光器将管道激光器定位在管道激光器上，并滑动以照亮管道激光器的中心并使管道激光器的范围居中。

公开(公告)号：US06636535B1

公开(公告)日：2003-10-21

申请号：US09598456

申请日：2000-06-22

申请人： Yoshitaka Iwashita ,  Akihiro Otani

发明人： Yoshitaka Iwashita ,  Akihiro Otani

IPC分类号： G01B1127

CPC分类号： G01J1/4257 ,  B23K26/705 ,  H01S3/005

摘要： A laser apparatus which has a laser resonator 2 for emitting a laser beam 8, an optical fiber 23, on which the laser beam 8 transmitted from the laser resonator 2 through a beam transmission optical path is made incident, for transmitting the laser beam 8 to a workpiece, a measurement and adjustment jig 44 for measuring laser beam output of an annular pattern occurring in the periphery of a beam pattern of the laser beam 8 emitted from the optical fiber 23, and a fiber incidence section 22 for adjusting incidence of the laser beam 8 on the optical fiber 23 based on output from the measurement and adjustment jig 44.

摘要翻译： 激光装置具有用于发射激光束8的激光谐振器2，激光束8通过光束透射光路从激光谐振器2透射的光纤23，用于将激光束8传输到 用于测量从光纤23发射的激光束8的光束图案的周围出现的环状图案的激光束输出的测量和调整夹具44，以及用于调整激光器入射的光纤入射部22 基于测量和调整夹具44的输出在光纤23上的光束8。

公开(公告)号：US06233837B1

公开(公告)日：2001-05-22

申请号：US09322868

申请日：1999-05-28

申请人： George Allan Hagelthorn ,  Nancy L. Saxon ,  Janelle M. Gilbert

发明人： George Allan Hagelthorn ,  Nancy L. Saxon ,  Janelle M. Gilbert

IPC分类号： G01B1127

CPC分类号： G01B11/275 ,  G01B2210/24 ,  G01B2210/303 ,  G01B2210/306 ,  Y10S33/21

摘要： An axle alignment system includes a transmitter, reflectors, and an indicator area. The transmitter transmits signals, preferably laser beams, to each reflector. Signals received by the reflectors attached to the end of the axles are reflected at a predetermined angle and direction to be viewed on an indicator area. The indicator area receives the redirected signals from each reflector and provides a visual illustration of the relationship between the suspension axle and another suspension part such as the suspension subframe siderails. Accordingly, the angularity of the axles relative to the siderails may be adjusted such that each of the reflected signals are displayed simultaneously on a reference marker. Once the reflected signals are aligned with respect to the reference marker, the axles are assured to be in accurate alignment.

摘要翻译： 轴对准系统包括发射器，反射器和指示器区域。 发射机将信号，最好是激光束发送到每个反射器。 由附接到轴端部的反射器接收的信号以预定的角度和方向反射以在指示器区域上观看。 指示器区域接收来自每个反射器的重定向信号，并且提供了悬架轴与另一个悬架部分（例如悬架子框架）之间的关系的视觉图示。 因此，可以调整轴相对于挡板的角度，使得每个反射信号同时显示在参考标记上。 一旦反射信号相对于参考标记对准，则确保轴准确对准。

公开(公告)号：US06763597B2

公开(公告)日：2004-07-20

申请号：US10365692

申请日：2003-02-13

申请人： Heinrich Lysen

发明人： Heinrich Lysen

IPC分类号： G01B1127

CPC分类号： G01B11/272 ,  Y10S33/21

摘要： A arrangement for determining the alignment of marked axes (22, 28, 36, 38, 48, 50) of a first (20, 30, 40) and a second body (26, 32, 42) relative to one another, which is provided with a first and a second measurement device (10, 12) which can be attached to the first body or to the second body in a fixed spatial relation to the respective marked axis, the first measurement device (10) having a first source (L2) for delivering a light beam and a second (D1) and a third optoelectronic sensor (D3), and the second measurement device (12) having a second (L1) and a third source (L3) for a light beam and a first optoelectronic sensor (D2), the optoelectronic sensors being made such that they can determine the impact point of a light beam on the sensor, and the first light source being assigned to the first sensor and the second and the third light source being assigned to the second and third sensor.

摘要翻译： 用于确定相对于彼此的第一（20,30,40）和第二主体（26,32,42）的标记轴线（22,28,36,38,48,50）的对准的布置，其是 设置有第一和第二测量装置（10,12），所述第一和第二测量装置可以以与所述标记轴线固定的空间关系附接到所述第一主体或所述第二主体，所述第一测量装置（10）具有第一源 L2）和第二（D1）和第三光电传感器（D3），第二测量装置（12）具有用于光束的第二（L1）和第三源（L3）和第一 光电传感器（D2），光电传感器被制成使得它们可以确定光束在传感器上的冲击点，并且第一光源被分配给第一传感器，第二和第三光源被分配给 第二和第三传感器。

公开(公告)号：US06486954B1

公开(公告)日：2002-11-26

申请号：US09654318

申请日：2000-09-01

申请人： Walter Dean Mieher ,  Ady Levy

发明人： Walter Dean Mieher ,  Ady Levy

IPC分类号： G01B1127

CPC分类号： G03F7/70633 ,  G01B11/002

摘要： An alignment mark comprising a first test zone and a second test zone for measuring the relative position between different layers of a semiconductor device. The alignment mark is used to determine the overlay error between layers of a semiconductor wafer while minimizing measurement inaccuracies caused by semiconductor manufacturing processes. The first test zone includes two sections, one in which test structures are formed on one layer and a second in which test structures are formed on a second layer. Each of these test structures is composed of smaller sub-structures. The second test zone includes two similar sections that are also composed of smaller sub-structures. The first and second test zones are configured so that the section of each test zone formed one layer is adjacent to the section of the other test zone that is formed on the other layer. By forming each of the periodic structures with smaller sized sub-structures, a more accurate measurement of any alignment error may be obtained. Another aspect of the present invention pertains to a method of utilizing the alignment mark so that an overlay measurement may be obtained.

摘要翻译： 对准标记包括第一测试区和第二测试区，用于测量半导体器件的不同层之间的相对位置。 对准标记用于确定半导体晶片的层之间的重叠误差，同时最小化由半导体制造工艺引起的测量不准确。 第一测试区包括两个部分，一个测试结构形成在一个层上，另一个测试结构形成在第二层上。 这些测试结构中的每一个都由较小的子结构组成。 第二测试区域包括两个类似的部分，它们也由较小的子结构组成。 第一和第二测试区被配置成使得形成一层的每个测试区的部分与形成在另一层上的另一测试区的部分相邻。 通过用较小尺寸的子结构形成每个周期性结构，可以获得任何对准误差的更准确的测量。 本发明的另一方面涉及一种利用对准标记以便可以获得覆盖测量的方法。

公开(公告)号：US06462818B1

公开(公告)日：2002-10-08

申请号：US09603120

申请日：2000-06-22

申请人： Noah Bareket

发明人： Noah Bareket

IPC分类号： G01B1127

CPC分类号： G03F7/70633

摘要： A mark comprising at least one set of calibration periodic structures and at least two sets of test periodic structures, both types of which are positioned along an axis. The mark is used to measure the relative position between two layers of a device. Each set of test periodic structures has its periodic structures formed within first and second sections. The periodic structures of the first and second sections are each formed on one of the two layers of the device, respectively. The first and second sections of each test set is positioned proximate to the second and first sections of the next test set, respectively. This mark allows two beams which scan the mark to travel over both a test section formed on one layer of the device and a test section formed on the other of the two layers. Scanning multiple test sets provides multiple registration error values which are then averaged to obtain an average registration error value. Another aspect of the present invention is directed towards a method for measuring the relative position between two layers of a device. The method begins by providing a mark as described above. A beam is scanned in a first path across the mark. A beam is then scanned in a second path across the mark. Signals are generated with respect to the portion of each beam which reflects off the surface of the device so that the registration error between the two layers may be calculated.

摘要翻译： 包括至少一组校准周期性结构和至少两组测试周期性结构的标记，其两种类型沿轴线定位。 该标记用于测量设备两层之间的相对位置。 每组测试周期结构具有形成在第一和第二部分内的周期性结构。 第一和第二部分的周期性结构分别形成在装置的两层之一上。 每个测试集的第一和第二部分分别位于下一个测试集的第二和第一部分附近。 该标记允许扫描标记的两个光束在形成在装置的一层上的测试部分和形成在两个层中的另一层上的测试部分上行进。 扫描多个测试集提供多个配准误差值，然后对其进行平均以获得平均配准误差值。 本发明的另一方面涉及一种用于测量装置的两层之间的相对位置的方法。 该方法通过提供如上所述的标记开始。 在标记上的第一条路径中扫描光束。 然后在标记上的第二条路径中扫描光束。 相对于从设备表面反射的每个光束的部分产生信号，从而可以计算两层之间的配准误差。