公开(公告)号：US06242879B1

公开(公告)日：2001-06-05

申请号：US09524025

申请日：2000-03-13

申请人： Paul Sagues ,  Robert T. Wiggers ,  Steven M. Kraft

发明人： Paul Sagues ,  Robert T. Wiggers ,  Steven M. Kraft

IPC分类号： G03B1910

CPC分类号： G03F7/7075 ,  H01L21/67766 ,  H01L21/67778

摘要： A method and apparatus for automatically calibrating the precise positioning of a wafer handling robot relative to a target structure is disclosed. The apparatus comprises a machine controller connected to robot having an end-effector with three degrees of movement. The controller has a memory with stored rough distance and geometrical data defining the general location of structural features of the target structure. The robot is programmed to move toward the target structure in a series of sequential movements, each movement culminating with the robot end-effector touching a preselected exterior feature of the target structure. Each touching of the end-effector is sensed and provides data for the controller which then calculates the precise location of the target structure. The data accumulated during a series of touching steps by the robot end-effector is utilized by the controller to provide a precise calibrated control program for future operation of the robot.

摘要翻译： 公开了一种用于自动校准晶片处理机器人相对于目标结构的精确定位的方法和装置。 该装置包括连接到机器人的机器控制器，其具有三个运动程度的末端执行器。 控制器具有存储有粗略距离的存储器和定义目标结构的结构特征的一般位置的几何数据。 机器人被编程为以一系列顺序移动朝着目标结构移动，每个运动最终导致机器人末端执行器接触目标结构的预选的外部特征。 检测到末端执行器的每次触摸并提供控制器的数据，然后控制器计算目标结构的精确位置。 由机器人末端执行器进行的一系列触摸步骤期间累积的数据由控制器利用，为机器人的未来操作提供精确的校准控制程序。

公开(公告)号：US06659660B2

公开(公告)日：2003-12-09

申请号：US10317949

申请日：2002-12-12

申请人： William B. Mills

发明人： William B. Mills

IPC分类号： G03B1910

CPC分类号： G03B19/04 ,  G03B17/04

摘要： A photographic film cartridge for a camera with a compact configuration and that may use standard 35 mm film is disclosed. A light-sensitive medium, such as photographic film, is positioned therein. The light-sensitive medium may be separate individually stacked photographic film frames, a fan folded photographic film strip or individual film frames residing on a film carrier web. When individual frames are used, they may be assembled into a continuous strip configuration for development using standard photographic equipment. The cartridge includes a housing with a light exposure window and an exposure region in front of said light exposure window and a storage region not in front of said light exposure region. Opaque material is provided to block passage of light through said light exposure window in a closed position while permitting passage of light through said light exposure window in an open position. The opaque material is movable between an open position and a closed position. The cartridge further includes a film support track where a stack of photographic film is positionable in front of the light exposure window for exposure of the film with the stack of photographic film being movable between the exposure region and the storage region.

摘要翻译： 公开了一种具有紧凑结构并且可以使用标准35mm膜的照相机的照相胶卷暗盒。 诸如摄影胶片的光敏介质被定位在其中。 感光介质可以是单独的单独堆叠的照相胶片框架，风扇折叠照相胶片条或位于胶片载体网上的各个胶片胶片。 当使用单个框架时，可以使用标准照相设备将它们组装成用于显影的连续带状结构。 盒包括具有曝光窗的外壳和在所述曝光窗前面的曝光区域和不在所述曝光区域前面的存储区域。 提供不透光材料以阻止光通过所述曝光窗处于关闭位置，同时允许光在打开位置通过所述曝光窗。 不透明材料可在打开位置和关闭位置之间移动。 墨盒还包括胶片支撑轨道，其中可以在曝光窗口的前面定位照相胶片堆，以便曝光胶卷，其中可以在曝光区域和存储区域之间移动照相胶卷。