公开(公告)号：US20040211913A1

公开(公告)日：2004-10-28

申请号：US10423289

申请日：2003-04-25

Applicant: Applied Materials Israel Ltd

Inventor： Igor Petrov

IPC: H01J037/145

CPC classification number: H01J37/145 ,  H01J37/28

Abstract: An objective lens arrangement is presented for mounting in a charged particle beam column adjacent to an anode tube that defines a beam drift space for a charged particle beam propagating towards a sample. The lens arrangement comprises a magnetic lens and an electrostatic lens, wherein the electrostatic lens includes upper and lower electrodes arranged in a spaced-apart coaxial relationship along an optical axis of the lens arrangement.

Abstract translation: 提出了一种用于安装在邻近阳极管的带电粒子束列中的物镜布置，其限定了朝向样品传播的带电粒子束的波束漂移空间。 透镜装置包括磁透镜和静电透镜，其中静电透镜包括沿着透镜装置的光轴以间隔开的同轴关系布置的上电极和下电极。

公开(公告)号：US20040084629A1

公开(公告)日：2004-05-06

申请号：US10619475

申请日：2003-07-16

Applicant: LEO Elektronenmikroskopie GmbH

Inventor： Dirk Preikszas ,  Michael Steigerwald ,  Peter Hoffrogge ,  Peter Gnauck

IPC: H01J037/145

CPC classification number: H01J37/145 ,  H01J2237/2817 ,  H01J2237/31745 ,  H01J2237/31749

Abstract: An objective lens with magnetic and electrostatic focusing for an electron microscopy system is provided whose at least partially conical outer shape allows orienting an object to be imaged at a large angle range in respect of an electron beam, said objective lens exhibiting, at the same time, good optical parameters. This is enabled by a specific geometry of the lens elements. Furthermore, an examination for the simultaneous imaging and processing of an object is proposed which comprises, besides an electron microscopy system with the above-mentioned objective lens, also an ion beam processing system and an object support.

Abstract translation: 提供了一种用于电子显微镜系统的具有磁性和静电聚焦的物镜，其至少部分为圆锥形的外部形状允许相对于电子束以大角度范围定向要成像的物体，所述物镜同时展现 ，光学参数好。 这可以通过镜头元件的特定几何形状来实现。 此外，提出了一种用于同时成像和处理物体的检查，除了具有上述物镜的电子显微镜系统之外，还包括离子束处理系统和物体支撑。

公开(公告)号：US20040211914A1

公开(公告)日：2004-10-28

申请号：US10829002

申请日：2004-04-21

Applicant: FEI Company

Inventor： Bart Buijsse

IPC: H01J037/145

CPC classification number: H01J37/26 ,  H01J37/145 ,  H01J2237/10

Abstract: Particle-optical apparatus are normally embodied with a magnetic or electrostatic lens so as to focus a beam 1 of charged particles onto a sample 8. It is desirable to be able to use these apparatus at different beam energies. It is, however, undesirable that the focus position 9 of the beam, as a result hereof, should shift with respect to the sample 8. Use of a permanent-magnetic material 6 in a magnetic lens has advantages as regards compact construction, but is normally avoided because it is not easily possible to adjust the lens power to match varying beam energies. The invention shows how it is possible to keep constant the focus position 9, independent of the energy of the particles in the beam 1, by combining a magnetic lensnullthat has been furnished with permanent-magnetic materialnullwith an electrostatic lens. The electrostatic lens is embodied in that case as an accelerating lens.

Abstract translation: 通常使用磁性或静电透镜来实现粒子光学装置，以将带电粒子的束1聚焦在样品8上。希望能够以不同的光束能量使用这些装置。 然而，不合适的是，作为其结果的光束的聚焦位置9应该相对于样品8移动。在磁性透镜中使用永久磁性材料6具有紧凑结构的优点，但是 通常避免，因为不容易调整透镜功率以匹配变化的光束能量。 本发明通过组合具有永久磁性材料的磁性透镜与静电透镜组合，可以不依赖于光束1中的颗粒的能量而保持聚焦位置9的恒定。 在这种情况下，静电透镜被体现为加速透镜。