公开(公告)号：US06772513B1

公开(公告)日：2004-08-10

申请号：US10184782

申请日：2002-06-27

申请人： Gregory C. Frye-Mason ,  David Martinez ,  Ronald P. Manginell ,  Edwin J. Heller ,  Rajen Chanchani

发明人： Gregory C. Frye-Mason ,  David Martinez ,  Ronald P. Manginell ,  Edwin J. Heller ,  Rajen Chanchani

IPC分类号： H25K334

CPC分类号： B01L3/502715 ,  B01J2219/0081 ,  B01L3/502707 ,  B01L3/565 ,  B01L2200/027 ,  B01L2200/028 ,  B01L2200/10 ,  B01L2300/044 ,  B01L2300/0645 ,  B01L2300/0816 ,  B01L2300/0867 ,  B01L2400/0415 ,  G01N30/6095 ,  Y10T29/49117 ,  Y10T29/4913 ,  Y10T29/49144 ,  Y10T137/87249

摘要： A method for forming electro-fluidic interconnections in microfluidic devices comprises forming an electrical connection between matching bond pads on a die containing an active electrical element and a microfluidic substrate and forming a fluidic seal ring that circumscribes the active electrical element and a fluidic feedthrough. Preferably, the electrical connection and the seal ring are formed in a single bonding step. The simple method is particularly useful for chemical microanalytical systems wherein a plurality of microanalytical components, such as a chemical preconcentrator, a gas chromatography column, and a surface acoustic wave detector, are fluidically interconnected on a hybrid microfluidic substrate having electrical connection to external support electronics.

摘要翻译： 用于在微流体装置中形成电流互连的方法包括在包含有源电子元件和微流体基底的模具上的匹配接合焊盘之间形成电连接，并形成限定有源电元件和流体馈通的流体密封环。 优选地，电连接和密封环在单个结合步骤中形成。 简单的方法对于化学微量分析系统特别有用，其中多个微量分析组分例如化学预浓缩器，气相色谱柱和表面声波检测器在具有与外部支持电子器件电连接的混合微流体衬底上流体互连 。