公开(公告)号：WO2008009879A1

公开(公告)日：2008-01-24

申请号：PCT/GB2007/002329

申请日：2007-06-22

Applicant: PLASTICORE LIMITED ,  DYER, Timothy, J. ,  WEIR, John, M. ,  THOMAS, Craig

Inventor： DYER, Timothy, J. ,  WEIR, John, M. ,  THOMAS, Craig

IPC: E01C5/00

CPC classification number: E01C3/006 ,  E01C5/223 ,  E01C9/004 ,  E01C13/02 ,  Y02A30/32

Abstract: A rigid plastics tray (100) has a planar base (102), an outer periphery (104) and internal walls (106) that form compartments on the base. The tray is used in the substructure of pavements and the like, e.g. in lieu of hardcore or other sub-base material. In use, the tray can be placed on a ground surface with its base uppermost, wherein an upper layer of paving (112,114,116) can be supported by the tray. The tray can also be used with its base lowermost, wherein the tray is used to contain fill material, typically below ground level, e.g. for use as a soakaway. The tray may include drainage apertures in its base and service apertures in the internal walls for passing service cables and conduits through the tray.

Abstract translation: 刚性塑料托盘（100）具有在基座上形成隔间的平面基座（102），外周边（104）和内壁（106）。 托盘用于人行道等的子结构中，例如， 代替铁杆或其他亚基材料。 在使用中，托盘可以放置在其基部最上面的地面上，其中铺层的上层（112,114,116）可以由托盘支撑。 托盘也可以与底部最下部一起使用，其中托盘用于容纳填充材料，通常在地平面以下，例如， 用作浸泡。 托盘可以包括其底部的排水孔和内壁中的维护孔，用于使服务电缆和导管通过托盘。

公开(公告)号：WO2005104313A3

公开(公告)日：2007-02-01

申请号：PCT/US2005007168

申请日：2005-03-03

Applicant: CYMER INC ,  PARTLO WILLIAM N ,  AMADA YOSHIHO ,  CARMICHAEL JAMES A ,  DYER TIMOTHY S ,  GILLESPIE WALTER D ,  MOOSMAN BRYAN G ,  RETTIG CURTIS L ,  STRATE BRIAN D ,  STEIGER THOMAS D ,  TRINTCHOUK FEDOR B ,  UJAZDOWSKI RICHARD C

Inventor： PARTLO WILLIAM N ,  AMADA YOSHIHO ,  CARMICHAEL JAMES A ,  DYER TIMOTHY S ,  GILLESPIE WALTER D ,  MOOSMAN BRYAN G ,  RETTIG CURTIS L ,  STRATE BRIAN D ,  STEIGER THOMAS D ,  TRINTCHOUK FEDOR B ,  UJAZDOWSKI RICHARD C

IPC: H01S3/22 ,  H01S3/03 ,  H01S3/036 ,  H01S3/038 ,  H01S3/041 ,  H01S3/097 ,  H01S3/0971 ,  H01S3/225

CPC classification number: H01S3/036 ,  H01S3/0384 ,  H01S3/041 ,  H01S3/0971 ,  H01S3/225

Abstract: A method and apparatus if disclosed which may comprise a high power high repetition rate gas discharge laser UV light source which may comprise: a gas discharge chamber comprising an interior wall comprising a vertical wall and an adjacent bottom wall; a gas circulation fan creating a gas flow path adjacent the interior vertical wall and the adjacent bottom wall; an in-chamber dust trap positioned a region of low gas flow, which may be along an interior wall and may comprise at least one meshed screen, e.g., a plurality of meshed screens, which may comprise at least two different gauge meshed screens. The dust trap may extend along the bottom interior wall of the chamber and/or a vertical portion of the interior wall. The dust trap may comprise a first meshed screen having a first gauge; a second meshed screen having a second gauge smaller than the first gauge; and the second meshed screen intermediate the first meshed screen and the interior wall. The chamber may comprise a plurality of dust collecting recesses in at least one of the vertical interior wall and the bottom wall of the chamber which may be selected from a group comprising a one-part recess and a multi-part recess, which may comprise two sections angled with respect to each other. The dust trap may comprise a pressure trap positioned between a portion of a main insulator and an interior wall of the chamber. The chamber may comprise a gas circulating fan comprising a cross-flow fan with a fan cutoff that may comprise a vortex control pocket. The chamber may comprise a preionization mechanism comprising a preionization tub containing a ground rod within an elongated opening in the preionization tube that may comprise a compliant member, an automatic preionization shut-off mechanism, a preionization onset control mechanism and/or a focusing element. The chamber may comprise an elongated baffle plate that may comprise a plurality of pyramidal structures including varying numbers of generally pyramidal elements and oriented in groups of varying numbers of generally pyramidal elements and oriented along and transverse to the longitudinal axis. Acoustic resonances within the chamber may also be reduced by introducing an artificial fitter into the timing of the laser discharges varying the inter-pulse period randomly or in a repeating pattern from pulse to pulse within a burst.

Abstract translation: 如果公开的方法和装置，其可以包括高功率高重复率气体放电激光UV光源，其可以包括：气体放电室，其包括包括垂直壁和相邻底壁的内壁; 气体循环风扇，其产生邻近内部垂直壁和相邻底壁的气体流动路径; 室内除尘器定位了低气流区域，其可以沿着内壁并且可以包括至少一个网状筛网，例如多个网状筛网，其可以包括至少两个不同的规格网状筛网。 除尘器可以沿着室的底部内壁和/或内壁的垂直部分延伸。 除尘器可以包括具有第一量规的第一网状筛网; 第二网状筛，其具有小于第一量规的第二规格; 并且第二网状屏幕在第一网状筛网和内壁之间。 腔室可以包括在腔室的垂直内壁和底壁中的至少一个中的多个集尘凹部，其可以从包括一部分凹部和多部分凹部的组中选择，该组包括两个凹部 相对于彼此成角度的部分。 除尘器可以包括定位在主绝缘体的一部分和室的内壁之间的压力阱。 该腔室可包括气体循环风扇，其包括具有风扇切断装置的横流风扇，其可包括涡流控制口袋。 所述腔室可以包括预除垢机构，其包括在所述预分离管内的细长开口内包含接地棒的预除菌槽，所述前置离子槽可以包括柔顺构件，自动预除电切断机构，预电离起始控制机构和/或聚焦元件。 腔室可以包括细长的挡板，该挡板可以包括多个金字塔形结构，包括不同数量的通常为锥体的元件，并且以不同数量的大致金字塔形元件组成并且沿纵向轴线并且横向于纵向轴线定向。 腔内的声共振也可以通过将人造钳工器引入激光放电的定时中，从而在脉冲串内从脉冲到脉冲随机地或以重复模式改变脉冲间周期。

公开(公告)号：WO2005050794A3

公开(公告)日：2006-01-05

申请号：PCT/US2004024062

申请日：2004-07-27

Applicant: CYMER INC ,  STEIGER THOMAS D ,  UJAZDOWSKI RICHARD C ,  DYER TIMOTHY S ,  DUFFEY THOMAS P ,  GILLESPIE WALTER D ,  MOOSMAN BRYAN G ,  MORTON RICHARD G ,  STRATE BRIAN D

Inventor： STEIGER THOMAS D ,  UJAZDOWSKI RICHARD C ,  DYER TIMOTHY S ,  DUFFEY THOMAS P ,  GILLESPIE WALTER D ,  MOOSMAN BRYAN G ,  MORTON RICHARD G ,  STRATE BRIAN D

IPC: H01S20060101 ,  H01S3/038 ,  H01S3/097 ,  H01S3/0971 ,  H01S3/22 ,  H01S3/225 ,  H01S3/97

CPC classification number: H01S3/225 ,  H01S3/0381 ,  H01S3/0385 ,  H01S3/0388 ,  H01S3/0971 ,  H01S3/09713

Abstract: A method and apparatus for operating a gas discharge laser is disclosed which may comprise a laser chamber containing a laser gas, the laser gas comprising a halogen, two elongated electrode elements defining a cathode and an anode, each of the cathode and anode having an elongated discharge receiving region having a discharge receiving region width defining a width of an electric discharge between the electrode elements in the laser gas, the discharge receiving region defining two longitudinal edges, and the anode comprising: a first elongated anode portion comprising a first anode material defining a first anode material erosion rate, located entirely within the discharge receiving region of the anode, a pair of second elongated anode portions comprising a second anode material defining a second anode material erosion rate, respectively located on each side of the first anode portion and at least partially within the discharge receiving region; an elongated electrode center base portion integral with the first elongated anode portion; and wherein each of the respective pair of second elongated anode portions is mechanically bonded to the center base portion. The electrode element may comprise a cathode. The first and second materials may be different materials such as different brass alloys with different erosion rates in the halogen gas. The first elongated cathode portion may comprising a first cathode material, located entirely within the discharge receiving region comprising a first portion of an ellipse intersecting elongated side walls, with a bottom wall opposite the portion of the ellipse; and a pair of second elongated cathode side portions comprising a second cathode material with the intersection of each respective second cathode portion and the portion of the ellipse forming the discharge receiving region of the first cathode portion, forming respective ellipsoidal extensions of the first portion. The members may be mechanically bonded to the center base portion. Some may be diffusion bonded to the center base portion and/or each other. The electrode assembly may have a hooded discharge receiving region extension at respective ends of the electrode and the electrode portion may be formed with or bonded to the center base portion and may have slanted side walls.

Abstract translation: 公开了一种用于操作气体放电激光器的方法和装置，其可以包括包含激光气体的激光室，激光气体包括卤素，限定阴极和阳极的两个细长电极元件，阴极和阳极中的每一个具有细长的 放电接收区域具有限定激光气体中的电极元件之间的放电宽度的放电接收区域宽度，放电接收区域限定两个纵向边缘，阳极包括：第一细长阳极部分，包括限定 第一阳极材料侵蚀速率，完全位于阳极的放电接收区域内;一对第二细长阳极部分，包括限定第二阳极材料侵蚀速率的第二阳极材料，第二阳极材料分别位于第一阳极部分的每一侧， 最少部分地在放电接收区域内; 与所述第一细长阳极部分成一体的细长电极中心基部; 并且其中相应的一对第二细长阳极部分中的每一个机械地结合到中心基部。 电极元件可以包括阴极。 第一和第二材料可以是不同的材料，例如在卤素气体中具有不同侵蚀速率的不同的黄铜合金。 第一细长阴极部分可以包括第一阴极材料，其全部位于放电接收区域内，包括与细长侧壁相交的椭圆的第一部分，其中与壁的部分相对的底壁; 以及一对第二细长阴极侧部分，其包括第二阴极材料，每个相应的第二阴极部分和形成第一阴极部分的放电接收区域的椭圆形部分的交点形成第一部分的相应的椭圆形延伸部分。 构件可以机械地结合到中心基部。 一些可以扩散结合到中心基部和/或彼此。 电极组件可以在电极的相应端部处具有连接的放电接收区域延伸部，并且电极部分可以形成有或结合到中心基部并且可以具有倾斜的侧壁。

公开(公告)号：WO2005104313A2

公开(公告)日：2005-11-03

申请号：PCT/US2005/007168

申请日：2005-03-03

Applicant: CYMER, INC. ,  PARTLO, William, N. ,  AMADA, Yoshiho ,  CARMICHAEL, James, A. ,  DYER, Timothy, S. ,  GILLESPIE, Walter, D. ,  MOOSMAN, Bryan, G. ,  RETTIG, Curtis, L. ,  STRATE, Brian, D. ,  STEIGER, Thomas, D. ,  TRINTCHOUK, Fedor, B. ,  UJAZDOWSKI, Richard, C.

Inventor： PARTLO, William, N. ,  AMADA, Yoshiho ,  CARMICHAEL, James, A. ,  DYER, Timothy, S. ,  GILLESPIE, Walter, D. ,  MOOSMAN, Bryan, G. ,  RETTIG, Curtis, L. ,  STRATE, Brian, D. ,  STEIGER, Thomas, D. ,  TRINTCHOUK, Fedor, B. ,  UJAZDOWSKI, Richard, C.

IPC: H01S3/22

CPC classification number: H01S3/036 ,  H01S3/0384 ,  H01S3/041 ,  H01S3/0971 ,  H01S3/225

Abstract: A method and apparatus if disclosed which may comprise a high power high repetition rate gas discharge laser UV light source which may comprise: a gas discharge chamber comprising an interior wall comprising a vertical wall and an adjacent bottom wall; a gas circulation fan creating a gas flow path adjacent the interior vertical wall and the adjacent bottom wall; an in-chamber dust trap positioned a region of low gas flow, which may be along an interior wall and may comprise at least one meshed screen, e.g., a plurality of meshed screens, which may comprise at least two different gauge meshed screens. The dust trap may extend along the bottom interior wall of the chamber and/or a vertical portion of the interior wall. The dust trap may comprise a first meshed screen having a first gauge; a second meshed screen having a second gauge smaller than the first gauge; and the second meshed screen intermediate the first meshed screen and the interior wall. The chamber may comprise a plurality of dust collecting recesses in at least one of the vertical interior wall and the bottom wall of the chamber which may be selected from a group comprising a one-part recess and a multi-part recess, which may comprise two sections angled with respect to each other. The dust trap may comprise a pressure trap positioned between a portion of a main insulator and an interior wall of the chamber. The chamber may comprise a gas circulating fan comprising a cross-flow fan with a fan cutoff that may comprise a vortex control pocket. The chamber may comprise a preionization mechanism comprising a preionization tub containing a ground rod within an elongated opening in the preionization tube that may comprise a compliant member, an automatic preionization shut-off mechanism, a preionization onset control mechanism and/or a focusing element. The chamber may comprise an elongated baffle plate that may comprise a plurality of pyramidal structures including varying numbers of generally pyramidal elements and oriented in groups of varying numbers of generally pyramidal elements and oriented along and transverse to the longitudinal axis. Acoustic resonances within the chamber may also be reduced by introducing an artificial fitter into the timing of the laser discharges varying the inter-pulse period randomly or in a repeating pattern from pulse to pulse within a burst.

Abstract translation: 如果公开的方法和装置，其可以包括高功率高重复率气体放电激光器UV光源，其可以包括：气体放电室，其包括包括垂直壁和相邻底壁的内壁; 气体循环风扇，其产生邻近内部垂直壁和相邻底壁的气体流动路径; 室内除尘器定位低气流区域，其可以沿着内壁并且可以包括至少一个网状筛网，例如多个网状筛网，其可以包括至少两个不同的规格网状筛网。 除尘器可以沿着室的底部内壁和/或内壁的垂直部分延伸。 除尘器可以包括具有第一量规的第一网状筛网; 第二网眼屏幕，其具有小于第一规格的第二规格; 并且第二网状屏幕在第一网状筛网和内壁之间中间。 腔室可以包括在腔室的垂直内壁和底壁中的至少一个中的多个集尘凹部，其可以从包括一部分凹部和多部分凹部的组中选择，该组包括两个 相对于彼此成角度的部分。 除尘器可以包括定位在主绝缘体的一部分和室的内壁之间的压力阱。 该腔室可以包括气体循环风扇，其包括具有风扇切断装置的横流风扇，其可以包括涡流控制袋。 所述腔室可以包括预电离机构，其包括在所述预电离管内的细长开口内包含接地棒的前置离子槽，其可以包括柔顺构件，自动预除电切断机构，预电离起始控制机构和/或聚焦元件。 腔室可以包括细长的挡板，其可以包括多个金字塔结构，其包括不同数量的大体锥体元件，并且以不同数量的大体锥体元件组成并且沿纵向轴线并且横向于纵向轴线定向。 通过将人工钳位器引入激光放电的定时，也可以通过在脉冲串内从脉冲到脉冲随机地或以重复模式改变脉冲周期的时间来减小腔室内的声共振。

公开(公告)号：WO2005050794A2

公开(公告)日：2005-06-02

申请号：PCT/US2004/024062

申请日：2004-07-27

Applicant: CYMER, INC. ,  STEIGER, Thomas, D. ,  UJAZDOWSKI, Richard, C. ,  DYER, Timothy, S. ,  DUFFEY, Thomas, P. ,  GILLESPIE, Walter, D ,  MOOSMAN, Bryan, G ,  MORTON, Richard, G. ,  STRATE, Brian, D

Inventor： STEIGER, Thomas, D. ,  UJAZDOWSKI, Richard, C. ,  DYER, Timothy, S. ,  DUFFEY, Thomas, P. ,  GILLESPIE, Walter, D ,  MOOSMAN, Bryan, G ,  MORTON, Richard, G. ,  STRATE, Brian, D

IPC: H01S

CPC classification number: H01S3/225 ,  H01S3/0381 ,  H01S3/0385 ,  H01S3/0388 ,  H01S3/0971 ,  H01S3/09713

Abstract: A method and apparatus for operating a gas discharge laser is disclosed which may comprise a laser chamber containing a laser gas, the laser gas comprising a halogen, two elongated electrode elements defining a cathode and an anode, each of the cathode and anode having an elongated discharge receiving region having a discharge receiving region width defining a width of an electric discharge between the electrode elements in the laser gas, the discharge receiving region defining two longitudinal edges, and the anode comprising: a first elongated anode portion comprising a first anode material defining a first anode material erosion rate, located entirely within the discharge receiving region of the anode, a pair of second elongated anode portions comprising a second anode material defining a second anode material erosion rate, respectively located on each side of the first anode portion and at least partially within the discharge receiving region; an elongated electrode center base portion integral with the first elongated anode portion; and wherein each of the respective pair of second elongated anode portions is mechanically bonded to the center base portion. The electrode element may comprise a cathode. The first and second materials may be different materials such as different brass alloys with different erosion rates in the halogen gas. The first elongated cathode portion may comprising a first cathode material, located entirely within the discharge receiving region comprising a first portion of an ellipse intersecting elongated side walls, with a bottom wall opposite the portion of the ellipse; and a pair of second elongated cathode side portions comprising a second cathode material with the intersection of each respective second cathode portion and the portion of the ellipse forming the discharge receiving region of the first cathode portion, forming respective ellipsoidal extensions of the first portion. The members may be mechanically bonded to the center base portion. Some may be diffusion bonded to the center base portion and/or each other. The electrode assembly may have a hooded discharge receiving region extension at respective ends of the electrode and the electrode portion may be formed with or bonded to the center base portion and may have slanted side walls.

Abstract translation: 公开了一种用于操作气体放电激光器的方法和装置，其可以包括包含激光气体的激光室，激光气体包括卤素，限定阴极和阳极的两个细长电极元件，阴极和阳极中的每一个具有细长的 放电接收区域具有限定激光气体中的电极元件之间的放电宽度的放电接收区域宽度，放电接收区域限定两个纵向边缘，阳极包括：第一细长阳极部分，包括限定 第一阳极材料侵蚀速率，完全位于阳极的放电接收区域内;一对第二细长阳极部分，包括限定第二阳极材料侵蚀速率的第二阳极材料，第二阳极材料分别位于第一阳极部分的每一侧， 至少部分地在放电接收区域内; 与所述第一细长阳极部分成一体的细长电极中心基部; 并且其中相应的一对第二细长阳极部分中的每一个机械地结合到中心基部。 电极元件可以包括阴极。 第一和第二材料可以是不同的材料，例如在卤素气体中具有不同侵蚀速率的不同的黄铜合金。 第一细长阴极部分可以包括第一阴极材料，其全部位于放电接收区域内，包括与细长侧壁相交的椭圆的第一部分，其中与壁的部分相对的底壁; 以及一对第二细长阴极侧部分，其包括第二阴极材料，每个相应的第二阴极部分和形成第一阴极部分的放电接收区域的椭圆形部分的交点形成第一部分的相应的椭圆形延伸部分。 构件可以机械地结合到中心基部。 一些可以扩散结合到中心基部和/或彼此。 电极组件可以在电极的相应端部处具有连接的放电接收区域延伸部，并且电极部分可以形成有或结合到中心基部并且可以具有倾斜的侧壁。

公开(公告)号：WO2003023910A2

公开(公告)日：2003-03-20

申请号：PCT/US2002/028463

申请日：2002-09-06

Applicant: CYMER, INC. ,  MORTON, Richard, G. ,  DYER, Timothy, S. ,  STEIGER, Thomas, D. ,  UJAZDOWSKI, Richard, C. ,  WATSON, Tom, A. ,  MOOSMAN, Bryan ,  IVASCHENKO, Alex, P. ,  GILLESPIE, Walter, D ,  RETTIG, Curtis, L.

Inventor： MORTON, Richard, G. ,  DYER, Timothy, S. ,  STEIGER, Thomas, D. ,  UJAZDOWSKI, Richard, C. ,  WATSON, Tom, A. ,  MOOSMAN, Bryan ,  IVASCHENKO, Alex, P. ,  GILLESPIE, Walter, D ,  RETTIG, Curtis, L.

IPC: H01S

CPC classification number: H01S3/038 ,  H01S3/036 ,  H01S3/0381 ,  H01S3/0388 ,  H01S3/09702 ,  H01S3/225

Abstract: The present invention provides a gas discharge laser having at least one long-life elongated electrode for producing at least 12 billion high voltage electric discharges in a fluorine containing laser gas. In a preferred embodiment at least one of the elctrodes is comprised of a first material having a relatively low anode erosion rate and a second anode material having a relatively higher anode erosion rate. The first anode material is positioned at a desired anode discharge region of the electrode. The second anode material is located adjacent to the first anode material along at least two long sides of the first material. During operation of the laser erosion occurs on both materials but the higher ero sion rate of the second material assures that any tendency of the discharge to spread onto the second material will quickly erode away the second material enough to stop the spread of the discharge. In a preferred embodiment the anode is as described above and the cathode is also a two-material electrode with the first material electrode with the first material at the discharge region being C26000 brass and the second material being C36000 brass. A pulse power system provides electrical pulses at rates of at least 1 KHz. A blower circulates laser gas between the electrodes at speeds of at least 5 m/s and a heat exchanger is provided to remove heat produced by the blower and the discharges.

Abstract translation: 本发明提供了一种气体放电激光器，其具有至少一个长寿命的细长电极，用于在含氟激光气体中产生至少120亿个高压放电。 在优选实施方案中，至少一个电极由具有相对低的阳极侵蚀速率的第一材料和具有相对较高的阳极侵蚀速率的第二阳极材料构成。 第一阳极材料位于电极的期望的阳极放电区域。 第二阳极材料沿第一材料的至少两个长边位于第一阳极材料附近。 在两种材料的激光冲蚀操作过程中，第二种材料的腐蚀速度较高，确保放电扩散到第二种材料上的任何趋势将迅速消除第二种材料，从而阻止放电扩散。 在优选实施例中，阳极如上所述，阴极也是具有第一材料电极的双材料电极，其中在放电区域处的第一材料为C26000黄铜，第二材料为C36000黄铜。 脉冲功率系统以至少1KHz的速率提供电脉冲。 鼓风机以至少5m / s的速度在电极之间循环激光气体，并且提供热交换器以去除由鼓风机和排出物产生的热量。

公开(公告)号：WO2017060715A3

公开(公告)日：2017-06-01

申请号：PCT/GB2016053119

申请日：2016-10-06

Applicant: DYER TIMOTHY

Inventor： DYER TIMOTHY

IPC: E02D31/02 ,  E01C9/00 ,  E02D17/20

CPC classification number: E02D17/202 ,  E01C3/006 ,  E01C2201/20 ,  E02D31/025

Abstract: A sheet for use in ground works, the sheet having an upper face with an plurality of openings therein, a lower face configured so as to permit liquid to drain through the sheet and a spacing arrangement to separate the upper face from the lower face and define a volume therebetween, where the volume is capable of receiving an infill material via the openings in the upper face. The lower face of the sheet is configured to be interengageably secured to an upper face of a similar further sheet.

Abstract translation: 一种用于地面工程的薄板，该薄板具有其中具有多个开口的上表面，被构造成允许液体排出通过薄板的下表面以及用于将上表面与下表面分开并且限定 其间的体积，其中体积能够经由上表面中的开口接收填充材料。 片材的下表面构造成可相互接合地固定到类似的另一片材的上表面。

公开(公告)号：WO2005013441A3

公开(公告)日：2005-10-20

申请号：PCT/US2004023663

申请日：2004-07-21

Applicant: CYMER INC ,  STEIGER THOMAS D ,  BROWN JOSHUA C ,  DUFFEY THOMAS P ,  GILLESPIE WALTER D ,  MORTON RICHARD G ,  DYER TIMOTHY S

Inventor： STEIGER THOMAS D ,  BROWN JOSHUA C ,  DUFFEY THOMAS P ,  GILLESPIE WALTER D ,  MORTON RICHARD G ,  DYER TIMOTHY S

IPC: H01R43/00 ,  H01S20060101 ,  H01S3/00 ,  H01S3/036 ,  H01S3/038 ,  H01S3/097 ,  H01S3/0971 ,  H01S3/225

CPC classification number: H01S3/038 ,  H01S3/036 ,  H01S3/0381 ,  H01S3/0382 ,  H01S3/0385 ,  H01S3/0388 ,  H01S3/097 ,  H01S3/09702 ,  H01S3/0971 ,  H01S3/225 ,  H01S3/2251 ,  H01S3/2256 ,  H01S3/2258

Abstract: A fluorine gas discharge laser electrode (70) for a gas discharge laser having a laser gas containing fluorine is disclosed which may comprise a copper and copper alloy cathode body having an upper curved region containing the discharge footprint (74) for the cathode comprising copper and a lower portion comprising a copper alloy.

Abstract translation: 公开了一种用于具有含氟激光气体的气体放电激光器的氟气放电激光电极（70），该氟气气体放电激光电极（70）包括铜和铜合金阴极体，该铜和铜合金阴极体具有上部弯曲区域，该上部弯曲区域包含用于阴极的放电足迹（74） 包括铜合金的下部。

公开(公告)号：WO2003087867A2

公开(公告)日：2003-10-23

申请号：PCT/US2003/011139

申请日：2003-04-09

Applicant: CYMER, INC. ,  MELNYCHUK, Stephen, T. ,  PARTLO, William, N. ,  FOMENKOV, Igor, V. ,  OLIVER, I., Roger ,  NESS, Richard, M. ,  BOWERING, Norbert ,  KHODYKIN, Oleh ,  RETTIG, Curtis, L. ,  BLUMENSTOCK, Gerry, M. ,  DYER, Timothy, S. ,  SIMMONS, Rodney, D. ,  HOFFMAN, Jerzy, R. ,  JOHNSON, R., Mark

Inventor： MELNYCHUK, Stephen, T. ,  PARTLO, William, N. ,  FOMENKOV, Igor, V. ,  OLIVER, I., Roger ,  NESS, Richard, M. ,  BOWERING, Norbert ,  KHODYKIN, Oleh ,  RETTIG, Curtis, L. ,  BLUMENSTOCK, Gerry, M. ,  DYER, Timothy, S. ,  SIMMONS, Rodney, D. ,  HOFFMAN, Jerzy, R. ,  JOHNSON, R., Mark

IPC: G01S

CPC classification number: H05G2/003 ,  B82Y10/00 ,  G03F7/70033 ,  G03F7/70166 ,  G03F7/70175 ,  G03F7/70916 ,  H01S3/005 ,  H05G2/005 ,  H05G2/008 ,  H05H1/06

Abstract: The present invention provides a reliable, high-repetition rate, production line compatible high-energy photon source. Very hot plasma containing an active material is produced in vacuum chamber. The active material is an atomic element having an emission line within a desired extreme ultraviolet (EUV) range. A pulse power source comprising a charging capacitor and a magnetic compression circuit comprising a pulse transformer provides electrical pulses having sufficient energy and electrical potential sufficient to produce the EUV light at an intermediate focus at rates in excess of 5 Watts. In preferred embodiments designed by Applicants in-band, EUV light energy at the intermediate focus is 45 Watts extendable to 105.8 Watts.

Abstract translation: 在真空室中产生可靠的高重复率生产线相容的高能光子源，其中包含具有期望的极紫外（EUV）波长范围内的发射线的原子元素的热等离子体。 EUV光源单元直接集成到诸如步进机之类的光刻单元中。 集成部件可以包括评论者，以及如（120）所示的固态脉冲功率单元和真空容器的压缩头。 支撑设备位于支撑设备柜（122）中，粗抽真空泵和高压水泵位于第三柜（124）中。 脉冲功率单元提供电脉冲，其具有足够的能量和电势，足以在连续的基础上以超过5瓦的速率在中间焦点产生EUV光，并且在突发的基础上超过20瓦。

公开(公告)号：WO2017060715A2

公开(公告)日：2017-04-13

申请号：PCT/GB2016/053119

申请日：2016-10-06

Applicant: DYER, Timothy

Inventor： DYER, Timothy

CPC classification number: E02D17/202 ,  E01C3/006 ,  E01C2201/20 ,  E02D31/025

Abstract: A sheet for use in ground works, the sheet having an upper face with an plurality of openings therein, a lower face configured so as to permit liquid to drain through the sheet and a spacing arrangement to separate the upper face from the lower face and define a volume therebetween, where the volume is capable of receiving an infill material via the openings in the upper face. The lower face of the sheet is configured to be interengageably secured to an upper face of a similar further sheet.

Abstract translation: 一种用于地面工程的片材，该片材具有其上具有多个开口的上表面，被配置为允许液体通过片材排出的下表面，以及用于将上表面与下表面分开的间隔布置，并限定 其间的体积，其中体积能够经由上表面中的开口接收填充材料。 片材的下表面被构造成可相互固定地固定到类似的另外的片材的上表面。