公开(公告)号：WO01001439A1

公开(公告)日：2001-01-04

申请号：PCT/EP2000/005800

申请日：2000-06-23

IPC分类号： G01Q30/02 ,  H01J37/244 ,  H01J37/28

CPC分类号： H01J37/244 ,  H01J37/28 ,  H01J2237/0535

摘要： The invention provides a charged particle device (1) comprising: a particle source (2) for providing a charged particle beam (4), an objective lens (10) for directing the particle beam onto a specimen (8), said objective lens (10) having an optical axis (6); a particle mirror (14) located on the optical axis (6) of the objective lens (10), said particle mirror having a front surface, a back surface, a drift region (26) reaching from the back surface to the front surface for letting the charged particle beam pass from the back surface to the front surface, said drift region (26) being positioned away from the optical axis (6), and a deflecting region located on the front surface for deflecting charge particles coming from the specimen towards a detector (16).

摘要翻译： 本发明提供一种带电粒子装置（1），包括：用于提供带电粒子束（4）的粒子源（2），用于将粒子束引导到样本（8）上的物镜（10），所述物镜 10）具有光轴（6）; 位于物镜（10）的光轴（6）上的粒子反射镜（14），所述粒子反射镜具有前表面，后表面，从后表面到前表面的漂移区（26） 使带电粒子束从后表面传播到前表面，所述漂移区域（26）远离光轴（6）定位，并且位于前表面上的偏转区域用于偏转来自试样的电荷颗粒朝向 检测器（16）。

公开(公告)号：WO00039836A1

公开(公告)日：2000-07-06

申请号：PCT/EP1999/010193

申请日：1999-12-17

IPC分类号： G01N23/02 ,  H01J37/244 ,  H01J37/28

CPC分类号： H01J37/244 ,  H01J37/28

摘要： The SEM according to the invention is arranged to detect scattered electrons transmitted by the specimen (22). The detector is constructed so as to have a flat detector surface (26) for a large angular range. In order to select a given angular range, a mask (24) with an eccentric opening (40) is arranged between the specimen and the detector surface and it is also arranged so as to be rotatable. An optimum angle relative to a given direction in the specimen can thus be selected for a given type of contrast. The mask is preferably displaceable in the specimen direction, the detector surface being subdivided into a plurality of parts (26a, 26b) and the assembly formed by the specimen and the detector surface is tiltable through an angle relative to the optical axis (4). A high degree of flexibility is thus achieved for the selection of the electrons to be detected which are scattered by the specimen, so that adjustments can be made so as to achieve an optimum contrast situation.

摘要翻译： 根据本发明的SEM被设置为检测由样品（22）传输的散射电子。 检测器构造成具有用于大角度范围的平坦检测器表面（26）。 为了选择给定的角度范围，具有偏心开口（40）的掩模（24）布置在样本和检测器表面之间，并且还被布置成可旋转。 因此，对于给定类型的对比度，可以选择相对于给定方向的最佳角度。 掩模优选地在试样方向上可移动，检测器表面被细分为多个部分（26a，26b），并且由试样和检测器表面形成的组件可相对于光轴（4）倾斜一角度。 因此，对于被检测体散射的被检测电子，可以实现高度的灵活性，从而能够进行调整，以达到最佳的对比度。

公开(公告)号：WO00031769A2

公开(公告)日：2000-06-02

申请号：PCT/US1999/027689

申请日：1999-11-22

IPC分类号： G01N23/203 ,  G01N23/225 ,  G21K1/087 ,  G21K5/04 ,  H01J37/12 ,  H01J37/244 ,  H01J

CPC分类号： H01J37/244 ,  H01J2237/1205

摘要： A structure and associated method for detecting secondary and backscatter electrons in a microcolumn. A secondary electron detector and a backscatter electron detector, both located upstream of the Einzel (objective) lens in the microcolumn, provide a highly efficient axially symmetric electron detector, short column length, and short working distance. The secondary electron detector is located between the deflection system and the Einzel lens, between the suppressor plate and the Einzel lens, or between the deflection system and the beam-limiting aperture. The backscatter electron detector is located between a beam-limiting aperture and the deflection system and can be incorporated into the aperture. A secondary electron extractor placed between the sample and the Einzel lens further improves the spatial resolution caused by surface imperfection or local surface potential on the sample surface.

摘要翻译： 用于检测微柱中的次级和背散射电子的结构和相关方法。 二级电子探测器和背散射电子探测器均位于微柱中Einzel（物镜）镜头的上游，提供高效的轴向对称电子探测器，柱长度短，工作距离短。 二次电子探测器位于偏转系统和Einzel透镜之间，抑制板和Einzel透镜之间，或偏转系统和光束限制孔之间。 反向散射电子探测器位于光束限制孔径和偏转系统之间，可以结合到孔径中。 置于样品和Einzel透镜之间的二次电子提取器进一步提高了由表面缺陷或样品表面局部表面电位引起的空间分辨率。

公开(公告)号：WO00002230A1

公开(公告)日：2000-01-13

申请号：PCT/EP1999/004326

申请日：1999-06-22

IPC分类号： H01J37/244 ,  H01J43/04

CPC分类号： H01J37/244 ,  H01J2237/2444 ,  H01J2237/28

摘要： An electron detector is proposed particularly for detecting secondary electrons in a micro electron column based e-beam tool such as e.g. a scanning electron microscope. The electron detector has a flat detector body (10) and a plurality of trench-shaped channels (12) extending parallel to the body surface and being e.g. open on this surface. The channels (12) extend radially from an opening (11) for the primary electron beam (1) of the tool. Furthermore, the detector comprises an inner and an outer ring electrode (15, 16) for generating an electric field which is rotationally symmetrical in relation to the axis of the opening (11) and by which the secondary electrons are accelerated along the length of the channels (12). The rotational symmetry of the electric field prevents unwanted interaction with the primary electron beam. The preferred embodiment of the electron detector is manufactured by micro-machining, starting from a silicon on insulator wafer.

摘要翻译： 特别提出一种电子检测器，用于检测基于微电子束的电子束工具中的二次电子，例如， 扫描电子显微镜。 电子检测器具有平坦的检测器本体（10）和平行于身体表面延伸的多个沟槽形通道（12）。 在这个表面打开。 通道（12）从用于工具的一次电子束（1）的开口（11）径向延伸。 此外，检测器包括用于产生相对于开口（11）的轴线旋转对称的电场的内环电极（15,16），并且二次电子沿着 通道（12）。 电场的旋转对称性防止与一次电子束的不必要的相互作用。 电子检测器的优选实施例通过微加工制造，从绝缘体上硅晶片开始。

公开(公告)号：WO99046798A1

公开(公告)日：1999-09-16

申请号：PCT/JP1999/000990

申请日：1999-03-01

IPC分类号： G01Q30/02 ,  H01J37/244 ,  H01J37/28

CPC分类号： H01J37/244 ,  H01J37/28 ,  H01J2237/0475 ,  H01J2237/04756

摘要： A scanning electron microscope using a retarding-field formation technique and still capable of high-efficient separation and detection of secondary electrons. The scanning electron microscope comprises an electron source, a converging lens for converging a primary electron beam emitted from the electron source, a detector for detecting electrons derived from the irradiation of a sample with the converged primary electron beam, first retarding means for slowing down the primary electron beam directed to the sample, second retarding means for slowing down the electrons emitted from the sample, and a deflector for directing the electrons from the second retarding means toward the detector.

摘要翻译： 使用延迟场形成技术的扫描电子显微镜，仍然能够高效地分离和检测二次电子。 扫描电子显微镜包括电子源，用于会聚从电子源发射的一次电子束的会聚透镜，用于用会聚的一次电子束检测源自样品的照射的电子的检测器，用于使电子源减速的第一延迟装置 指向样品的一次电子束，用于减缓从样品发射的电子的第二延迟装置，以及用于将电子从第二延迟装置引向检测器的偏转器。

公开(公告)号：WO99039367A1

公开(公告)日：1999-08-05

申请号：PCT/IB1999/000056

申请日：1999-01-18

IPC分类号： H01J37/244 ,  H01J37/28

CPC分类号： H01J37/244 ,  H01J2237/2608

摘要： An environmental scanning electron microscope is provided which is capable of only detecting backscattered electron signals emanating from the specimen with the detector assembly being positioned within the gaseous environment of the ESEM specimen chamber. This detector assembly includes a biased converter plate and a collection grid/collection plate/collector ring arrangement. The primary beam passes through the final pressure limiting aperture formed in the converter plate and then through a central aperture of the collection grid/plate/ring before striking the sample. The collection grid is held at ground potential and therefore does not collect secondary electron signals generated at the sample. The backscattered electrons are not collected by the collector grid/plate/ring and strike the converter plate creating converted backscattered electrons. The converted backscattered electrons are amplified in the gas by the electric field created between the converter plate and the collection grid. As a result, the collection grid/plate/ring will not collect secondary electron signals from the sample but will collect only an amplified converted backscattered electron signal. This dedicated gaseous backscattered electron detector can also be utilized to make a simple, low cost electron detector that can easily be switched between secondary electron detection, backscattered electron detection or both together.

摘要翻译： 提供一种环境扫描电子显微镜，其能够仅在检测器组件位于ESEM样品室的气体环境内时才能检测从样品发出的反向散射电子信号。 该检测器组件包括偏置的转换器板和收集栅格/收集板/收集环结构。 初级光束穿过形成在转换器板中的最终压力限制孔，然后穿过采集栅格/板/环的中心孔，然后撞击样品。 采集栅格保持接地电位，因此不会收集在样品处产生的二次电子信号。 反向散射电子不会被集电栅格/板/环收集，并且撞击转换器板产生转换的反向散射电子。 转换的反向散射电子通过在转换器板和收集栅之间产生的电场在气体中放大。 结果，采集栅/板/环不会从样品中收集二次电子信号，而是仅收集放大的转换后向散射电子信号。 这种专用的气体背散射电子检测器也可以用于制造简单，低成本的电子检测器，其可以容易地在二次电子检测，背散射电子检测或二者之间切换。

公开(公告)号：WO99030345A1

公开(公告)日：1999-06-17

申请号：PCT/IB1998/001662

申请日：1998-10-19

IPC分类号： H01J37/244 ,  H01J37/28

CPC分类号： H01J37/244 ,  H01J2237/2448 ,  H01J2237/2608

摘要： The current of secondary electrons emanating from the specimen (14) in an ESEM is amplified by an avalanche-like ionization of the molecules (41) of the gas atmosphere. However, in order to achieve an adequate number of successive ionizations, a comparatively high voltage is required at the detector electrode (30) and, because of the risk of electric breakdowns, the distance between the specimen and the detector may not be smaller than a comparatively large minimum distance. Consequently, the number of successive ionizations is limited and hence also the current amplification. In order to achieve a higher amplification, the invention proposes the application of an additional magnetic field B in the ionization space. The path length of the secondary electrons is thus substantially increased so that a significantly larger number of ionizations takes place and hence a higher amplification is achieved.

摘要翻译： 在ESEM中从样品（14）发出的二次电子的电流通过气体气氛的分子（41）的雪崩状电离放大。 然而，为了实现足够数量的连续电离，在检测器电极（30）处需要相当高的电压，并且由于电击穿的风险，试样和检测器之间的距离可以不小于 比较大的最小距离。 因此，连续电离的数量是有限的，因此也是电流放大。 为了实现更高的放大，本发明提出了在电离空间中应用附加磁场B. 因此，二次电子的路径长度显着增加，从而发生显着更大数量的电离，因此实现更高的放大。

公开(公告)号：WO98040906A1

公开(公告)日：1998-09-17

申请号：PCT/CZ1998/000014

申请日：1998-03-09

IPC分类号： H01J37/28 ,  H01J37/244 ,  H01J37/252 ,  H01J37/26

CPC分类号： H01J37/244 ,  H01J2237/188 ,  H01J2237/2443

摘要： The detection system of the scanning electron microscope with the tube separated from the sample chamber (11) by means of the differential chamber (2) consists of the single-crystal scintillator (6) with the aperture stop (9); said single-crystal scintillator (6) is divided into two halves, and based on double yttrium-aluminium oxides or on yttrium silicate activated by trivalent cerium, and having the central conical opening (46), smaller base of which is on the side near to incidence of the primary electron beams, and forms the aperture stop (9). Said conical opening (46) is coated with the reflecting metal layer (37) on the contact areas of the both halves, and with the reflective layer (34) of dielectric and heavy metal on its inner surface. The single-crystal scintillator (6) is placed between the left and the right lightguides (18, 19) in space of the sample chamber (11) above the sample (10). From the external bottom (3) of the differential chamber, it is separated with the sealing (45), and from the side of the sample (10) placing, it is equipped with the circular electrode system (7) consisting of at least two electrodes (27, 28) symmetrical around the axis (47) of the primary electron beams (33).

摘要翻译： 扫描电子显微镜的检测系统由具有孔径光阑（9）的单晶闪烁体（6）组成，其中通过差分腔（2）从样品室（11）分离的管。 所述单晶闪烁体（6）分为两半，基于双钇铝氧化物或由三价铈活化的硅酸钇，并具有中心圆锥形开口（46），较小的基底位于靠近 一次电子束入射，形成孔径光阑（9）。 所述锥形开口（46）在两个半部的接触区域上与反射金属层（37）一起被涂覆，并且在其内表面上与电介质和重金属的反射层（34）一起涂覆。 将单晶闪烁体（6）放置在样品（10）上方的样品室（11）的空间中的左和右光导（18,19）之间。 从差速器室的外部底部（3）开始，它与密封件（45）分离，并从样品（10）的一侧放置，配备圆形电极系统（7），由至少两个 围绕一次电子束（33）的轴线（47）对称的电极（27,28）。

公开(公告)号：WO1998014979A1

公开(公告)日：1998-04-09

申请号：PCT/US1997017117

申请日：1997-09-26

申请人： ETEC SYSTEMS, INC.

发明人： ETEC SYSTEMS, INC. ,  VENEKLASEN, Lee, H. ,  GARCIA, Rudy, F.

IPC分类号： H01J37/244

CPC分类号： H01J37/244 ,  H01J2237/2441 ,  H01J2237/24465

摘要： A solid state electron or x-ray detector is mounted within the time-varying magnetic deflection fields of a charged particle beam system. A minimum volume of high resistivity conductors and insulating materials are used in the mounting to minimize eddy currents that otherwise cause dynamic deflection distortions. Segmented conductive elastomer members make electrical and mechanical contact with the active surface of the detector. A flexible PC board connects the detector active areas to external signal processing electronics.

摘要翻译： 固态电子或X射线检测器安装在带电粒子束系统的时变磁偏转场内。 在安装中使用最小体积的高电阻率导体和绝缘材料，以最小化导致动态偏转失真的涡流。 分段的导电弹性体构件与检测器的有源表面电气和机械接触。 灵活的PC板将检测器有效区域连接到外部信号处理电子设备。

公开(公告)号：WO1981003707A1

公开(公告)日：1981-12-24

申请号：PCT/AU1981000071

申请日：1981-06-10

申请人： COMMW SCIENT IND RES ORG ,  ZUIDERWYK M ,  REID A

发明人： COMMW SCIENT IND RES ORG

IPC分类号： G01N23/223

CPC分类号： H01J37/244 ,  G01N23/22 ,  G01N23/2252 ,  G01N2223/053 ,  G01N2223/071 ,  G01N2223/079 ,  G01N2223/102 ,  G01N2223/402 ,  G01N2223/418 ,  G01N2223/605 ,  G01N2223/606 ,  H01J37/256 ,  H01J37/28 ,  H01J2237/2445 ,  H01J2237/24495

摘要： Method and apparatus for material analysis in which X-rays generated pursuant to incidence of an electron beam on the material are detected by a detector (24) which generates signals representative of X-ray intensity. A first single channel analyser (SCA-1) is connected to receive the signals from the detector (24) and to pass to an associated first counter (CTR-1) a count signal whenever the signal applied to the first single channel analyser is representative of an X-ray energy within a relatively narrow range of such energies. A second single channel analyser (BG-1) is also connected to receive the signals from the detector (24) and to pass to an associated second counter (B-1) a count signal whenever the signal applied to the second analyser (BG-1) is representative of an X-ray energy falling within a much broader range of such energies than the first-mentioned range. The first and second counters (CTR-1 and B-1) accumulate the count signals applied thereto. The count in the second counter (B-1) is compared by a comparator (C-1) with a pre-established count in a third counter (A-1) and when the count in the second counter (B-1) assumes the same value as the count in the third counter (A-1) the counts in the first and second counters (CTR-1 and B-1) are held. The so held count in the first counter (CTR-1) then itself represents a normalized ratio of X-ray energy within the narrow range to the X-ray energy for the energy spectrum represented by the broad range of energies. On the basis of this normalized ratio information as to the makeup of the material can be derived.

摘要翻译： 用于材料分析的方法和装置，其中通过产生表示X射线强度的信号的检测器（24）检测根据材料上的电子束入射产生的X射线。 连接第一单通道分析器（SCA-1），以便每当施加到第一单通道分析仪的信号代表时，接收来自检测器（24）的信号并传递给相关联的第一计数器（CTR-1）计数信号 在这样的能量的相对窄的范围内的X射线能量。 每当施加到第二分析仪（BG-1）的信号时，第二单通道分析器（BG-1）也被连接以接收来自检测器（24）的信号并且传递到关联的第二计数器（B-1）计数信号， 1）代表了在比上述范围更大范围内的这种能量的X射线能量。 第一和第二计数器（CTR-1和B-1）累加施加到其上的计数信号。 第二计数器（B-1）中的计数通过比较器（C-1）与第三计数器（A-1）中的预先建立的计数进行比较，并且当第二计数器（B-1）中的计数 与第三计数器（A-1）中的计数相同的值保持第一和第二计数器（CTR-1和B-1）中的计数。 第一计数器（CTR-1）中所保持的计数本身代表由宽范围能量表示的能谱的X射线能量在窄范围内的X射线能量的归一化比率。 在这种归一化比例信息的基础上，可以推导出材料的组成。