公开(公告)号：WO0250334A2

公开(公告)日：2002-06-27

申请号：PCT/US0147895

申请日：2001-12-10

Applicant: APPLIED MATERIALS INC

Inventor： SHANG QUANYUAN ,  HARSHBARGER WILLIAM R ,  YADAV SANJAY ,  LAW KAM S

IPC: C23C16/44 ,  B08B9/08 ,  H01L21/00

CPC classification number: H01J37/32862 ,  C23C16/4405 ,  Y10S134/902 ,  Y10S438/905

Abstract: Provided herein is a method for cleaning a process chamber for semiconductor and/or flat panel display manufacturing. This method comprises the steps of converting a non-cleaning feed gas to a cleaning gas in a remote location and then delivering the cleaning gas to the process chamber for cleaning. Such method may further comprise the step of activating the cleaning gas outside the chamber before the delivery of the gas to the chamber. Also provided is a method of eliminating non-cleaning feed gas from the cleaning gas by cryocondensation.

Abstract translation: 本文提供了一种用于清洁用于半导体和/或平板显示器制造的处理室的方法。 该方法包括以下步骤：将非清洁进料气体转化为远处的清洁气体，然后将清洁气体输送至处理室进行清洁。 这种方法可以进一步包括在将气体输送到腔室之前激活腔室外部的清洁气体的步骤。 还提供了通过低温冷凝从清洁气体中除去非清洁进料气体的方法。

公开(公告)号：WO2011028529A3

公开(公告)日：2011-06-23

申请号：PCT/US2010046501

申请日：2010-08-24

Applicant: APPLIED MATERIALS INC ,  SHANG QUANYUAN ,  YANG LU ,  BROWN KARL M ,  OLGADO DONALD J K ,  PEBENITO VICTOR ,  BOLANDI HOOMAN ,  ISHIKAWA TETSUYA ,  BACHRACH ROBERT Z ,  CHEN LIANG-YUH

Inventor： SHANG QUANYUAN ,  YANG LU ,  BROWN KARL M ,  OLGADO DONALD J K ,  PEBENITO VICTOR ,  BOLANDI HOOMAN ,  ISHIKAWA TETSUYA ,  BACHRACH ROBERT Z ,  CHEN LIANG-YUH

IPC: C23C4/12 ,  B05D1/08 ,  B05D3/00 ,  B05D7/14 ,  C23C4/04 ,  C23C4/18

CPC classification number: H01M4/0419 ,  H01M4/1391

Abstract: A method and apparatus for forming an electrochemical layer of a thin film battery is provided. A precursor mixture comprising electrochemically active precursor particles dispersed in a carrying medium is provided to a processing chamber and thermally treated using a combustible gas mixture also provided to the chamber. The precursor is converted to nanocrystals by the thermal energy, and the nanocrystals are deposited on a substrate. A second precursor may be blended with the nanocrystals as they deposit on the surface to enhance adhesion and conductivity.

Abstract translation: 提供一种用于形成薄膜电池的电化学层的方法和装置。 将包含分散在承载介质中的电化学活性前体颗粒的前体混合物提供到处理室，并使用也提供给室的可燃气体混合物进行热处理。 通过热能将前体转化成纳米晶体，并将纳米晶体沉积在基底上。 当第二前体沉积在表面上以增强粘附性和导电性时，可与纳米晶体共混。

公开(公告)号：WO2011028527A2

公开(公告)日：2011-03-10

申请号：PCT/US2010046498

申请日：2010-08-24

Applicant: APPLIED MATERIALS INC ,  SHANG QUANYUAN ,  YANG LU ,  BROWN KARL M ,  OLGADO DONALD J K ,  PEBENITO VICTOR ,  BOLANDI HOOMAN ,  ISHIKAWA TETSUYA ,  BACHRACH ROBERT Z ,  CHEN LIANG-YUH

Inventor： SHANG QUANYUAN ,  YANG LU ,  BROWN KARL M ,  OLGADO DONALD J K ,  PEBENITO VICTOR ,  BOLANDI HOOMAN ,  ISHIKAWA TETSUYA ,  BACHRACH ROBERT Z ,  CHEN LIANG-YUH

IPC: C23C4/12 ,  B05D1/04 ,  B05D3/00 ,  B05D7/14 ,  C23C4/04 ,  C23C4/18

CPC classification number: H01M4/0419 ,  H01M4/1391

Abstract: A method and apparatus for forming an electrochemical layer of a thin film battery is provided. A precursor mixture comprising precursor particles dispersed in a carrying medium is activated in an activation chamber by application of an electric field to ionize at least a portion of the precursor mixture. The activated precursor mixture is then mixed with a combustible gas mixture to add thermal energy to the precursor particles, converting them to nanocrystals, which deposit on a substrate. A second precursor may be blended with the nanocrystals as they deposit on the surface to enhance adhesion and conductivity

Abstract translation: 提供了一种用于形成薄膜电池的电化学层的方法和设备。 包含分散在载体介质中的前体颗粒的前体混合物通过施加电场在活化室中被活化以电离至少一部分前体混合物。 然后将活化的前体混合物与可燃气体混合物混合以向前体颗粒添加热能，将它们转化为沉积在基底上的纳米晶体。 当它们沉积在表面上时，第二前体可以与纳米晶体混合以增强粘附性和导电性

公开(公告)号：WO2007106180A3

公开(公告)日：2007-12-06

申请号：PCT/US2006060568

申请日：2006-11-06

Applicant: APPLIED MATERIALS INC ,  BACHRACH ROBERT Z ,  SHANG QUANYUAN ,  YE YAN

Inventor： BACHRACH ROBERT Z ,  SHANG QUANYUAN ,  YE YAN

IPC: H01L21/441 ,  H01L21/4763

CPC classification number: C23C14/35 ,  C23C14/564 ,  H01L31/022425 ,  H01L31/18 ,  H05K3/048 ,  Y02E10/50

Abstract: A method and apparatus for fabricating a solar cell and forming metal contact is disclosed. Solar cell contact and wiring is formed by depositing a thin film stack of a first metal material and a second metal material as an initiation layer or seed layer for depositing a bulk metal layer in conjunction with additional sheet processing, photolithography, etching, cleaning, and annealing processes. In one embodiment, the thin film stack for forming metal silicide with reduced contact resistance over the sheet is deposited by sputtering or physical vapor deposition. In another embodiment, the bulk metal layer for forming metal lines and wiring is deposited by sputtering or physical vapor deposition. In an alternative embodiment, electroplating or electroless deposition is used to deposit the bulk metal layer.

Abstract translation: 公开了一种用于制造太阳能电池和形成金属接触的方法和装置。 太阳能电池接触和布线是通过沉积第一金属材料和第二金属材料的薄膜堆叠形成的，作为起始层或种子层，用于结合额外的片材加工，光刻，蚀刻，清洁和 退火工艺。 在一个实施例中，通过溅射或物理气相沉积来沉积用于在薄片上形成具有降低的接触电阻的金属硅化物的薄膜叠层。 在另一个实施例中，通过溅射或物理气相沉积沉积用于形成金属线和布线的体金属层。 在替代实施例中，使用电镀或无电沉积来沉积体金属层。

公开(公告)号：WO2006052828A3

公开(公告)日：2006-07-13

申请号：PCT/US2005040172

申请日：2005-11-03

Applicant: APPLIED MATERIALS INC

Inventor： WHITE JOHN M ,  SZE FAN CHEUNG ,  SHANG QUANYUAN ,  KURITA SHINICHI ,  JI HONGBIN ,  JOZWIAK JANUSZ ,  HUANG INCHEN ,  BEER EMANUAL

IPC: B41J3/407 ,  G02B5/20

CPC classification number: B41J25/003 ,  B41J3/407 ,  B41J3/543 ,  G02F1/1303 ,  G02F1/133516

Abstract: In a first aspect, a system is provided for inkjet printing. The system includes (1) at least one apparatus for inkjet printing having (a) a first inkjet print head including a first plurality of nozzles adapted to selectively dispense a first ink; (b) a second inkjet print head including a second plurality of nozzles adapted to selectively dispense a second ink; and (c) a set including the first and second print heads arranged such that the set is adapted to dispense the first and second inks into respective adjacent color wells of a display pixel on a substrate during a printing pass; and (2) a stage adapted'to support the substrate and transport the substrate below the at least one apparatus for inkjet printing during the printing pass. Numerous other aspects are provided.

Abstract translation: 在第一方面，提供一种用于喷墨打印的系统。 该系统包括（1）至少一种用于喷墨打印的设备，其具有（a）第一喷墨打印头，其包括适于选择性地分配第一墨的第一多个喷嘴; （b）第二喷墨打印头，包括适于选择性地分配第二墨的第二多个喷嘴; 以及（c）包括第一和第二打印头的组合，其布置成使得该组适于在打印通过期间将第一和第二墨水分配到基板上的显示像素的相应相邻色阱中; 和（2）在打印通过期间适于“支撑衬底并将衬底输送到用于喷墨打印的至少一个装置下方的阶段”。 提供了许多其他方面。

公开(公告)号：WO2004093163A3

公开(公告)日：2004-12-23

申请号：PCT/US2004010543

申请日：2004-04-05

Applicant: APPLIED MATERIALS INC ,  YADAV SANJAY D ,  SHANG QUANYUAN ,  BLONIGAN WENDELL T

Inventor： YADAV SANJAY D ,  SHANG QUANYUAN ,  BLONIGAN WENDELL T

IPC: C23C16/40 ,  C23C16/448 ,  H01L21/316

CPC classification number: C23C16/402 ,  C23C16/4485

Abstract: A method and apparatus for depositing a dielectric material at a rate of at least 4000 Angstroms per minute on a large area substrate that has a surface area of at least about 0.35 square meters is provided. In one embodiment, the dielectric material is silicon oxide. Also provided is a vaporizer comprising a plurality of grooves.

Abstract translation: 提供了一种用于在具有至少大约0.35平方米的表面积的大面积衬底上以至少4000埃/分钟的速率沉积介电材料的方法和装置。 在一个实施例中，介电材料是氧化硅。 还提供了包括多个凹槽的蒸发器。

公开(公告)号：WO2004094693A2

公开(公告)日：2004-11-04

申请号：PCT/US2004011477

申请日：2004-04-14

Applicant: APPLIED MATERIALS INC ,  CHOI SOO YOUNG ,  SHANG QUANYUAN ,  GREENE ROBERT I ,  HOU LI

Inventor： CHOI SOO YOUNG ,  SHANG QUANYUAN ,  GREENE ROBERT I ,  HOU LI

IPC: C23C16/44 ,  C23C16/455 ,  C23C16/509

CPC classification number: C23C16/45565 ,  C23C16/5096

Abstract: Embodiments of a gas distribution plate for distributing gas in a processing chamber are provided. In one embodiment, a gas distribution plate includes a diffuser plate having a plurality of gas passages passing between an upstream side and a downstream side of the diffuser plate. At least one of the gas passages includes a first hole and a second hole coupled by an orifice hole. The first hole extends from the upstream side of the diffuser plate while the second hole extends from the downstream side. The orifice hole has a diameter less than the respective diameters of the first and second holes.

Abstract translation: 提供了用于在处理室中分配气体的气体分配板的实施例。 在一个实施例中，气体分配板包括具有通过扩散板的上游侧和下游侧之间的多个气体通道的扩散板。 至少一个气体通道包括第一孔和通过孔口联接的第二孔。 第一孔从扩散板的上游侧延伸，而第二孔从下游侧延伸。 孔口的直径小于第一孔和第二孔的直径。

公开(公告)号：WO2008013902A3

公开(公告)日：2008-09-12

申请号：PCT/US2007016831

申请日：2007-07-26

Applicant: APPLIED MATERIALS INC ,  WHITE JOHN M ,  SHANG QUANYUAN

Inventor： WHITE JOHN M ,  SHANG QUANYUAN

IPC: B41J29/393 ,  B41J3/407

CPC classification number: B41J2/2128 ,  B41J25/003 ,  G02B5/201

Abstract: Methods and apparatus are provided in which a substrate is aligned so that a longitudinal dimension of a plurality of sub-pixel wells formed on the substrate are substantially perpendicular to a printing direction. Ink is deposited in a subset of the sub-pixel wells via nozzles of a print head wherein each of a plurality of the nozzles deposits a plurality of ink drops in each of the subset of the sub-pixel wells. Numerous other aspects are disclosed.

Abstract translation: 提供了一种方法和设备，其中衬底被对准，使得在衬底上形成的多个子像素阱的纵向尺寸基本垂直于印刷方向。 通过印刷头的喷嘴将油墨沉积在亚像素井的子集中，其中多个喷嘴中的每一个在多个子像素井的子集中的每一个中沉积多个墨滴。 披露了许多其他方面。

公开(公告)号：WO2007041229A3

公开(公告)日：2007-09-13

申请号：PCT/US2006037875

申请日：2006-09-28

Applicant: APPLIED MATERIALS INC

Inventor： SUN LIZHONG ,  SHANG QUANYUAN ,  WHITE JOHN M

IPC: B41J29/38 ,  C09D11/02

CPC classification number: G02F1/133516 ,  G02F1/1303 ,  G02F1/133377 ,  H01L51/0005

Abstract: For use in a color filter inkjet printing system (200) that may be part of a flat panel display manufacturing system, methods and apparatus for adjusting a pixel fill profile are provided. The methods include application of, and the apparatus are adapted to apply, pressurized gas (219) to at least one ink-filled pixel well on a substrate (226) having a plurality of pixel wells (402).

Abstract translation: 为了用作可以是平板显示器制造系统的一部分的滤色器喷墨打印系统（200），提供了用于调整像素填充轮廓的方法和装置。 所述方法包括施加并且该装置适于将加压气体（219）施加到具有多个像素阱（402）的基板（226）上的至少一个填充油墨的像素孔。

公开(公告)号：WO03015481A3

公开(公告)日：2003-07-31

申请号：PCT/US0224467

申请日：2002-08-02

Applicant: APPLIED MATERIALS INC

Inventor： KELLER ERNST ,  SHANG QUANYUAN

IPC: B01J19/08 ,  C23C16/44 ,  C23C16/455 ,  C23C16/509 ,  H01J37/32 ,  H01L21/205 ,  H01L21/302 ,  H01L21/3065 ,  H01L21/31 ,  H05H1/46

CPC classification number: C23C16/45565 ,  C23C16/455 ,  C23C16/5096 ,  H01J37/3244 ,  Y10T29/49948

Abstract: A gas inlet manifold for a plasma chamber having a perforated gas distribution plate suspended by a side wall comprising one or more sheets. The sheets preferably provide flexibility to alleviate stress in the gas distribution plate due to thermal expansion and contraction. In another aspect, the side wall provides thermal isolation between the gas distribution plate and other components of the chamber.

Abstract translation: 一种用于等离子体室的气体入口歧管，其具有由包括一个或多个片材的侧壁悬挂的穿孔气体分配板。 片材优选地提供柔性以缓解由于热膨胀和收缩而导致的气体分配板中的应力。 另一方面，侧壁在气体分配板和腔室的其他部件之间提供隔热。