公开(公告)号：WO1991000608A1

公开(公告)日：1991-01-10

申请号：PCT/US1990003659

申请日：1990-06-25

Applicant: TINI ALLOY COMPANY

Inventor： TINI ALLOY COMPANY ,  BUSCH, John, Douglas ,  JOHNSON, Alfred, David

IPC: H01H61/06

CPC classification number: H01H37/323 ,  F03G7/065 ,  F16F2224/0258 ,  H01H1/0036 ,  H01H2001/0042 ,  H01H2037/008 ,  H01H2061/0122

Abstract: A method of producing an integral piece of thermo-sensitive material, which is responsive to a shift in temperature from below to above a phase transformation temperature range to alter the material's condition to a shape-memory condition and move from one position to another. The method is characterized by depositing a thin film of shape-memory material (11 and 12), such as nickel titanium (Ni-Ti) onto a substrate (10) by vacuum deposition process such that the alloy exhibits an amorphous non-crystalline structure. The coated substrate is then annealed in a vacuum or in the presence of an inert atmosphere at a selected temperature, time and cool down rate to produce on ordered, partially disordered or fully disordered BCC structure. Also disclosed are actuator devices employing 'shape-memory material' (1) actuators.

公开(公告)号：WO2007109203A3

公开(公告)日：2008-11-06

申请号：PCT/US2007006752

申请日：2007-03-19

Applicant: INNOVATIVE MICRO TECHNOLOGY ,  PARANJPYE ALOK ,  SUMMERS JEFFERY F

Inventor： PARANJPYE ALOK ,  SUMMERS JEFFERY F

IPC: H01H33/02

CPC classification number: B81B3/0024 ,  B81B2201/018 ,  B81B2201/0278 ,  H01H2037/008 ,  H01H2061/008 ,  Y10T29/49105 ,  Y10T29/49147 ,  Y10T29/49204 ,  Y10T29/53248

Abstract: A MEMS thermal switch is disclosed which couples a hot, expanding beam to a cool flexor beam using a slideably engaged tether, and bends the cool, flexor beam by the expansion of the hot beam. A rigidly engaged tether ties the distal ends of the hot, expanding beam and the cool, flexor beam together, whereas the slideably engaged tether allows the hot, expanding beam to elongate with respect to the cool, flexor beam, without loading the slideably engaged tether with a large shear force. As a result, the material of the tether can be made stiffer, and therefore transmit the bending force of the hot, expanding beam more efficiently to the cool, flexor beam.

Abstract translation: 公开了一种MEMS热开关，其使用可滑动接合的系绳将热膨胀梁耦合到冷弯头梁，并且通过热梁的膨胀来弯曲冷弯曲梁。 刚性接合的系绳将热的，扩张的梁和冷的弯曲梁的远端连接在一起，而可滑动地接合的系绳允许热的，膨胀的梁相对于冷的屈肌梁而伸长，而不加载可滑动地接合的系绳 具有很大的剪切力。 结果，系链的材料可以变得更硬，并且因此将热膨胀梁的弯曲力更有效地传递到凉爽的弯曲梁。

公开(公告)号：WO2008020668A1

公开(公告)日：2008-02-21

申请号：PCT/KR2007/000853

申请日：2007-02-16

Applicant: GWANGJU INSTITUTE OF SCIENCE AND TECHNOLOGY ,  LEE, Sun Kyu ,  JEONG, Su Heon ,  MOON, Hee Gon ,  NAKAYAMA, Wataru

Inventor： LEE, Sun Kyu ,  JEONG, Su Heon ,  MOON, Hee Gon ,  NAKAYAMA, Wataru

IPC: H01H37/36

CPC classification number: F28F13/00 ,  F28F2013/008 ,  H01H37/36 ,  H01H2037/008

Abstract: The present invention relates to a thermal switch, particularly a thermal switch that improves heat transfer efficiency and allows easy control form opening/closing a thermal connection through heat transfer fluid by supplying heat transfer fluid stored or supplied in a fluid storage channel to a tunnel or a switching channel to allow the heat transfer fluid opened to the upper part of the switching channel to be in surface contact with a panel to transfer heat. The present invention provides thermal switch controlling heat transfer between a heat source and a heat sink, which includes: a main panel; a groove-shaped fluid storage channel formed on the downside of the main panel, and containing or supplied with heat transfer fluid; a tunnel formed on the upside of the main panel, connected with the fluid storage channel, and supplied with the heat transfer fluid from the fluid storage channel; and an air discharge channel formed on the upside of the main panel and connected with the tunnel to form an air passage. Further, the thermal switch controls heat transfer between the heat source and heat sink by adjusting a level of the heat transfer fluid in the tunnel.

Abstract translation: 本发明涉及一种热开关，特别是一种提高传热效率的热开关，并且允许通过将储存或供应在流体储存通道中的传热流体供应给隧道，通过传热流体开启/关闭热连接来简化控制，或者 切换通道，允许向开关通道的上部开放的传热流体与面板进行表面接触以传递热量。 本发明提供一种控制热源与散热器之间热传递的热开关，其包括：主面板; 形成在主面板的下侧上并且容纳或供应有传热流体的槽形流体存储通道; 形成在主面板的上侧的隧道，与流体存储通道连接，并从流体存储通道供给传热流体; 以及形成在主面板的上侧并与隧道连接以形成空气通道的排气通道。 此外，热开关通过调节隧道中的传热流体的水平来控制热源和散热器之间的热传递。

公开(公告)号：WO2004017351A3

公开(公告)日：2004-07-29

申请号：PCT/US0325632

申请日：2003-08-13

Applicant: INTEL CORP

Inventor： MA QING

IPC: B81B3/00 ,  H01H1/00 ,  H01H37/54 ,  H01H61/00 ,  H01H61/01

CPC classification number: H01H1/0036 ,  H01H37/5409 ,  H01H2001/0042 ,  H01H2037/008

Abstract: A microelectromechanical system (MEMS) that includes a first electro-thermal actuator, a second electro-thermal actuator and a beam having a first side and a second side. The first electro-thermal actuator applies a force to the first side of the beam as current passes through the first electro-thermal actuator and the second electro-thermal actuator applies a force to the second side of the beam as current passes through the second electro-thermal actuator.

Abstract translation: 一种微机电系统（MEMS），其包括第一电热致动器，第二电热致动器和具有第一侧和第二侧的梁。 当电流通过第一电热致动器时，第一电热致动器向梁的第一侧施加力，并且当电流通过第二电热致动器时，第二电热致动器向梁的第二侧施加力 热致动器。

公开(公告)号：WO2004046807A1

公开(公告)日：2004-06-03

申请号：PCT/ES2003/000584

申请日：2003-11-18

Applicant: BAOLAB MICROSYSTEMS S.L. ,  MONTANYÀ SILVESTRE, Josep

Inventor： MONTANYÀ SILVESTRE, Josep

IPC: G02F1/21

CPC classification number: G01C19/5755 ,  G01C19/5726 ,  G01P15/093 ,  G01P15/131 ,  H01H35/02 ,  H01H35/14 ,  H01H35/24 ,  H01H36/00 ,  H01H59/0009 ,  H01H2036/0093 ,  H01H2037/008

Abstract: Dispositivo electroóptico miniaturizado que comprende una primera zona enfrenta­da a una segunda zona, una primera placa de condensador, una segunda placa de condensador dispuesta en la segunda zona y menor o igual que la primera placa, un espacio intermedio dispuesto entre ambas zonas con un elemento conductor dispuesto en él y que es independiente de las paredes laterales y se desplaza a través suyo en función de unos voltajes presentes entre ambas placas, dos puntos de entrada/salida de luz de un circuito óptico, y un tope, donde el elemento con­ ductor modifica el estado de paso de luz entre los puntos de entrada/salida cuando está en contacto con el tope. El dispositivo se puede usar como acelerómetro, incli­nómetro, detector de fuerzas de Coriolis, micrófono, para aplicaciones acústicas, para la fabricación de una matriz de conmutación óptica, para la proyección de imágenes, como sensor de presión, caudal, temperatura, gas, etc.

Abstract translation: 本发明涉及一种微型电光装置，包括：与第二区面对面设置的第一区域; 第一电容器板; 第二电容器板，其设置在所述第二区域中并且小于或等于所述第一板; 所述两个区域之间的中间空间; 导电元件，其设置在上述中间空间中，其独立于所述侧壁并且随着在所述两个板之间存在的电压的函数而在其中移动; 属于光电路的两个光输入/输出点; 和一个停止元素。 根据本发明，当与上述停止元件接触时，导电元件改变输入/输出点之间的光通过状态。 本发明的装置可用作用于声学应用的加速度计，倾角仪，科里奥利力检测器，麦克风，用于生产光学开关矩阵，用于投影图像，以及作为压力，流量，温度，气体 传感器等

公开(公告)号：WO2004046019A1

公开(公告)日：2004-06-03

申请号：PCT/ES2003/000583

申请日：2003-11-18

Applicant: BAOLAB MICROSYSTEMS S.L. ,  MONTANYÀ SILVESTRE, Josep

Inventor： MONTANYÀ SILVESTRE, Josep

IPC: B81B5/00

CPC classification number: G01C19/5755 ,  G01C19/5726 ,  G01P15/093 ,  G01P15/131 ,  H01H35/02 ,  H01H35/14 ,  H01H35/24 ,  H01H36/00 ,  H01H59/0009 ,  H01H2036/0093 ,  H01H2037/008

Abstract: La invención tiene por objeto un relé miniaturizado que comprende una primera zona enfrentada a una segunda zona, una primera placa de condensador (3), una segunda placa de condensador (9) dispuesta en la segunda zona, y menor o igual que la primera placa, un espacio intermedio (25) entre ambas zonas, un elemento conductor (7) dispuesto en el espacio intermedio (25) y que es mecánicamente independiente de las paredes adyacentes y puede desplazarse libremente a través del espacio intermedio (25) en función de unos voltajes presentes entre ambas placas, unos puntos de contacto (15, 17) de un circuito eléctrico, donde el elemento conductor (7) cierra el circuito eléctrico al topar con los puntos de contacto (15, 17). Estos relés pueden usarse, por ejemplo, como: acelerómetro, acelerómetro en airbags, inclinómetro, detector de fuerzas de Coriolis, micrófono, para aplicaciones acústicas, sensor de presión, caudal, temperatura, gas, campo magnético, etc.

Abstract translation: 本发明涉及一种微型继电器，包括：与第二区域面对面设置的第一区域; 第一电容器板（3）; 第二电容器板（9），其设置在所述第二区域中并且小于或等于所述第一板; 所述两个区域之间的中间空间（25）; 设置在上述中间空间（25）中的导电元件（7），其机械地独立于相邻壁并且可以随着在所述板之间的电压的函数自由移动通过所述中间空间（25）; 和属于电路的接触点（15,17）。 根据本发明，上述导电元件（7）通过抵靠接触点（15,17）来封闭电路。 本发明的继电器可以用作例如用于声学应用的加速度计，气囊加速度计，倾斜计，科里奥利力检测器，麦克风，以及压力，流量，温度，气体，磁场传感器等。

公开(公告)号：WO2003023805A1

公开(公告)日：2003-03-20

申请号：PCT/US2002/026357

申请日：2002-08-19

Applicant: MCNC ,  GOODWIN-JOHANSSON, Scott, H.

Inventor： GOODWIN-JOHANSSON, Scott, H.

IPC: H01H59/00

CPC classification number: H01H59/0009 ,  H01H1/06 ,  H01H1/20 ,  H01H2037/008 ,  H01H2059/0081

Abstract: A MEMS (Micro Electro Mechanical System) electrostatically operated high voltage switch or relay device is provided. These devices can switch high voltages while using relatively low electrostatic operating voltages. The MEMS device comprises a substrate, a substrate electrode, and one or more substrate contacts. The MEMS device also includes a flexible composite overlying the substrate, one or more composite contacts, and at least one insulator. The switch or relay device is provided overdrive potential through protrusions on the contact surface of the switch or relay contacts. In one embodiment the substrate contacts define protrusions on the contact surface that extend toward the flexible composite contacts. In another embodiment the flexible composite contacts define protrusions on the contact surface that extend toward the substrate contacts.

Abstract translation: 提供了一种MEMS（微机电系统）静电操作的高压开关或继电器。 这些器件可以在使用相对较低的静电工作电压的同时切换高电压。 MEMS器件包括衬底，衬底电极和一个或多个衬底触点。 MEMS器件还包括覆盖衬底，一个或多个复合触点和至少一个绝缘体的柔性复合材料。 开关或继电器装置通过开关或继电器触点的接触表面上的突起提供过驱动电位。 在一个实施例中，基板触点限定了朝向柔性复合触点延伸的接触表面上的凸起。 在另一个实施例中，柔性复合触点限定在接触表面上朝向基板触点延伸的凸起。

公开(公告)号：WO2003017301A1

公开(公告)日：2003-02-27

申请号：PCT/US2002/026439

申请日：2002-08-20

Applicant: HONEYWELL INTERNATIONAL INC.

Inventor： DAVIS, George ,  BECKA, Stephen

IPC: H01H1/00

CPC classification number: H01H1/0036 ,  H01H1/20 ,  H01H37/46 ,  H01H2001/0084 ,  H01H2037/008

Abstract: A simplified snap-action micromachined thermal switch having a bimodal thermal actuator fabricated from non-ductile materials such as silicon, glass, silicon oxide, tungsten, and other suitable materials using MEMS techniques.

Abstract translation: 具有由非延性材料如硅，玻璃，氧化硅，钨以及使用MEMS技术的其它合适材料制成的双峰型热致动器的简化的快动式微加工热开关。

公开(公告)号：WO01018831A1

公开(公告)日：2001-03-15

申请号：PCT/US2000/040837

申请日：2000-09-07

IPC: H01H1/00 ,  H01H37/48

CPC classification number: H01H1/0036 ,  H01H37/48 ,  H01H2037/008

Abstract: A micro miniature solid state mechanical switch device operated by thermal electrical or optical energy for the control of thermal and electrical energy is shown. A gap in an energy path is bridged by an energy conductor that is mechanically moved into and out of operative position within the gap in the energy path by the application of energy to a support for said energy conductor.

Abstract translation: 示出了通过热电或光能操作以控制热和电能的微型固态机械开关装置。 能量路径上的间隙由能量导体桥接，该能量导体通过向能量导体的支撑件施加能量而机械地移入和移出能量路径内的间隙内的操作位置。

公开(公告)号：WO1985003383A1

公开(公告)日：1985-08-01

申请号：PCT/US1985000129

申请日：1985-01-24

Applicant: TRANSENSORY DEVICES, INC.

Inventor： TRANSENSORY DEVICES, INC. ,  PETERSEN, Kurt, E. ,  ALLEN, Henry, V. ,  KNUTTI, James, W.

IPC: H01H35/34

CPC classification number: H01H1/0036 ,  G01P2015/0828 ,  H01H35/14 ,  H01H35/2657 ,  H01H35/346 ,  H01H37/46 ,  H01H2001/0005 ,  H01H2037/008 ,  Y10T307/773

Abstract: A microminiature switch (104) for digitizing different valued external conditions, such as pressure, temperature or acceleration. The switch (104) includes a silicon wafer (108) having a deflectable, reduced-thickness membrane (106) adapted to move from a relaxed position toward increasingly flexed or bulged positions in response to greater-value changes in such external condition. Movement of the membrane (106) from its relaxed position to more strained positions establishes electrical contact between a conductive expanse (130) connected to a common terminal and first one and then progressively more switch state terminals (118) in the switch, wherein the number of switch states which are closed corresponds to the external condition acting on the switch. This construction satisfies the need for reliable, low cost switching devices in microminiature sensing system.