公开(公告)号：WO2012046133A3

公开(公告)日：2012-08-02

申请号：PCT/IB2011002365

申请日：2011-10-07

Applicant: GIGAPHOTON INC ,  KAMEDA HIDENOBU ,  WAKABAYASHI OSAMU

Inventor： KAMEDA HIDENOBU ,  WAKABAYASHI OSAMU

IPC: G02B7/18 ,  G03F7/20 ,  G21K1/06

CPC classification number: G02B7/1815 ,  G03F7/70033 ,  G03F7/70891 ,  G21K1/06 ,  G21K2201/065

Abstract: A mirror includes a mirror base provided with a flow channel through which a heat medium passes for cooling the mirror. The flow channel includes a buffer tank, portion for adjusting a flow rate of the heat medium in the flow channel. A reflective film is provided on the mirror base.

Abstract translation: 反射镜包括设置有流动通道的反射镜基座，热介质通过该流动通道用于冷却反射镜。 流路包括缓冲罐，用于调节流路中的热介质的流量的部分。 反射膜设在镜底座上。

公开(公告)号：WO2012085638A2

公开(公告)日：2012-06-28

申请号：PCT/IB2011003068

申请日：2011-12-15

Applicant: GIGAPHOTON INC ,  NOWAK DRZYSZTOF ,  WAKABAYASHI OSAMU ,  HOSHINO HIDEO

Inventor： NOWAK DRZYSZTOF ,  WAKABAYASHI OSAMU ,  HOSHINO HIDEO

IPC: H01S3/23

CPC classification number: H01S3/0085 ,  H01S3/0064 ,  H01S3/2316 ,  H01S3/235 ,  H01S3/2366 ,  H01S3/2375 ,  H01S2301/02 ,  H05G2/008

Abstract: A laser apparatus may include: a master oscillator configured to output a pulsed laser beam at a repetition rate; at least one amplifier disposed on a beam path of the pulsed laser beam; at least one optical shutter disposed on the beam path of the pulsed laser beam; and a controller configured to switch the at least one optical shutter.

Abstract translation: 激光装置可以包括：主振荡器，被配置为以重复率输出脉冲激光束; 至少一个放大器，设置在脉冲激光束的光束路径上; 设置在脉冲激光束的光束路径上的至少一个光学快门; 以及配置成切换至少一个光学快门的控制器。

公开(公告)号：WO2012073086A8

公开(公告)日：2012-06-07

申请号：PCT/IB2011/002794

申请日：2011-11-23

Applicant: GIGAPHOTON INC. ,  MIZOGUCHI, Hakaru ,  WAKABAYASHI, Osamu

Inventor： MIZOGUCHI, Hakaru ,  WAKABAYASHI, Osamu

IPC: G02B5/00 ,  G02B27/09 ,  H01S3/00 ,  G03F7/20

Abstract: An optical device may include: a first beam shaping unit configured to transform a first laser beam incident thereon into a second laser beam having an annular cross section; and a first focusing optical element for focusing the second laser beam in a first predetermined location so as to generate a Bessel beam.

公开(公告)号：WO2012069898A1

公开(公告)日：2012-05-31

申请号：PCT/IB2011/002657

申请日：2011-11-10

Applicant: GIGAPHOTON INC. ,  WAKABAYASHI, Osamu

Inventor： WAKABAYASHI, Osamu

IPC: H05G2/00

CPC classification number: H05G2/003 ,  H05G2/008

Abstract: An apparatus uses first and second laser beams from a laser apparatus to generate extreme ultraviolet light. The apparatus may include a chamber provided with at least one inlet through which at least one of first and second laser beams outputted from the laser apparatus travels into the chamber. A beam shaping unit is provided on a beam path of the first laser beam for transforming the first laser beam into a hollow laser beam. A first focusing optical element is provided downstream of the beam shaping unit for focusing the hollow laser beam in a first location inside the chamber.

Abstract translation: 一种装置使用来自激光装置的第一和第二激光束产生极紫外光。 该设备可以包括设置有至少一个入口的室，激光装置输出的第一和第二激光束中的至少一个行进到室中。 光束整形单元设置在第一激光束的光束路径上，用于将第一激光束变换成空心激光束。 第一聚焦光学元件设置在光束成形单元的下游，用于将中空激光束聚焦在腔室内的第一位置。

公开(公告)号：WO2011102534A3

公开(公告)日：2011-10-13

申请号：PCT/JP2011053881

申请日：2011-02-16

Applicant: GIGAPHOTON INC ,  YAMANOUCHI YOHICHI ,  SUGANUMA TAKASHI ,  FUJIMOTO JUNICHI ,  WAKABAYASHI OSAMU ,  NAKARAI HIROAKI ,  KAMEDA HIDENOBU ,  OGA HITOSHI

Inventor： YAMANOUCHI YOHICHI ,  SUGANUMA TAKASHI ,  FUJIMOTO JUNICHI ,  WAKABAYASHI OSAMU ,  NAKARAI HIROAKI ,  KAMEDA HIDENOBU ,  OGA HITOSHI

IPC: G03F7/20 ,  H01S3/03 ,  H01S3/223 ,  H01S3/23

CPC classification number: G03F7/70975 ,  G03F7/70033 ,  H01S3/0071 ,  H01S3/03

Abstract: Provided is a laser device (1) which is installed within a predetermined space and on a predetermined floor area, the laser device includes: a master oscillator (11); at least one amplifier unit (MA) that amplifies a laser beam outputted from the master oscillator; at least one power source (D4, D5) unit that supplies excitation energy to the at least one amplifier unit; and a movement mechanism which enables at least one among the at least one amplifier unit and the at least one power source unit to be moved in a direction parallel with a floor surface.

Abstract translation: 提供一种激光装置（1），其安装在预定空间内并在预定的楼层区域上，所述激光装置包括：主振荡器（11）; 至少一个放大单元（MA），放大从主振荡器输出的激光束; 至少一个电源（D4，D5）单元，其向所述至少一个放大器单元提供激励能量; 以及使所述至少一个放大器单元和所述至少一个电源单元中的至少一个能够在与地板表面平行的方向上移动的移动机构。