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    HIGH MASS THROUGHPUT PARTICLE GENERATION USING MULTIPLE NOZZLE SPRAYING
    4.
    发明申请
    HIGH MASS THROUGHPUT PARTICLE GENERATION USING MULTIPLE NOZZLE SPRAYING 审中-公开
    使用多个喷嘴喷射的高质量颗粒物生成

    公开(公告)号：WO01087491A1

    公开(公告)日：2001-11-22

    申请号：PCT/US2001/015703

    申请日：2001-05-16

    Applicant: REGENTS OF THE UNIVERSITY OF MINNESOTA ,  PUI, David, Y., H. ,  CHEN, Da, Ren

    Inventor： PUI, David, Y., H. ,  CHEN, Da, Ren

    IPC: B05B5/025

    CPC classification number: B05B5/032 ,  A61F2/86 ,  B05B1/14 ,  B05B5/025 ,  B05B5/0255 ,  B05B5/08 ,  B05B5/087 ,  B05B7/0408 ,  B05B7/066 ,  B05B13/06

    Abstract: Spraying apparatus and methods that employ multiple nozzle structures (54) for producing multiple sprays of particles, e.g., nanoparticles, for various applications, e.g., pharmaceuticals, are provided. For example, an electrospray dispensing device may include a plurality of nozzle structures, wherein each nozzle structure is separated from adjacent nozzle structures by an internozzle distance (L). Sprays of particles are established from the nozzle structures by creating a nanuniform electrical field between the nozzle structures and an electrode electrically isolated therefrom.

    Abstract translation: 提供了用于多种喷嘴结构（54）的喷涂设备和方法，用于产生多种喷雾剂颗粒，例如用于各种应用例如药物的纳米颗粒。 例如，电喷雾分配装置可以包括多个喷嘴结构，其中每个喷嘴结构通过内部喷嘴距离（L）与相邻的喷嘴结构分离。 通过在喷嘴结构和与其电隔离的电极之间产生纳米级电场，从喷嘴结构建立颗粒喷雾。

    METHODS, DEFECT REVIEW TOOLS, AND SYSTEMS FOR LOCATING A DEFECT IN A DEFECT REVIEW PROCESS
    5.
    发明申请
    METHODS, DEFECT REVIEW TOOLS, AND SYSTEMS FOR LOCATING A DEFECT IN A DEFECT REVIEW PROCESS 审中-公开
    方法，缺陷审查工具的缺陷评估过程中的缺陷定位系统

    公开(公告)号：WO2007111696A3

    公开(公告)日：2008-10-02

    申请号：PCT/US2006060701

    申请日：2006-11-09

    Applicant: KLA TENCOR TECH CORP ,  CHEN DA ,  FOUQUET CHRISTOPHE ,  BANERJEE SAIBAL ,  BHATTACHARYYA SANTOSH ,  WANG JOSEPH ,  YAO LIAN ,  VAN RIET MIKE ,  GERMANENKO IGOR

    Inventor： CHEN DA ,  FOUQUET CHRISTOPHE ,  BANERJEE SAIBAL ,  BHATTACHARYYA SANTOSH ,  WANG JOSEPH ,  YAO LIAN ,  VAN RIET MIKE ,  GERMANENKO IGOR

    IPC: H01L21/66

    CPC classification number: G06T7/001 ,  G01N21/8851 ,  G01N21/9501 ,  G01N21/95607 ,  G06T2207/30148

    Abstract: Methods, defect review tools, and systems for locating a defect in a defect review process are provided. One method includes acquiring one or more images and data from an inspection tool. The one or more images illustrate an area on a specimen in which a defect to be reviewed is located. The data indicates a position and features of the defect within the area. The method also includes acquiring one or more additional images of the specimen proximate the position of the defect indicated in the data using an imaging subsystem of a defect review tool. In addition, the method includes identifying a portion of the one or more additional images that corresponds to the one or more images. The method further includes determining a position of the defect within the portion of the one or more additional images using the data.

    Abstract translation: 提供了方法，缺陷评估工具和用于在缺陷评估过程中定位缺陷的系统。 一种方法包括从检查工具获取一个或多个图像和数据。 一个或多个图像示出了待检查缺陷所在的样本上的区域。 数据表示该区域内缺陷的位置和特征。 该方法还包括使用缺陷评估工具的成像子系统获取在数据中指示的缺陷的位置附近的样本的一个或多个附加图像。 此外，该方法包括识别对应于一个或多个图像的一个或多个附加图像的一部分。 所述方法还包括使用所述数据确定所述一个或多个附加图像的所述部分内的所述缺陷的位置。

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