A BONDING PLATE MECHANISM FOR USE IN ANODIC BONDING

    公开(公告)号:WO2007127079A3

    公开(公告)日:2007-11-08

    申请号:PCT/US2007/009216

    申请日:2007-04-16

    Abstract: A bonding plate mechanism for use in anodic bonding of first and second material sheets together, the apparatus comprising: a base including first and second spaced apart surfaces; a thermal insulator supported by the second surface of the base and operable to impede heat transfer to the base; a heating disk directly or indirectly coupled to the insulator and operable to produce heat in response to electrical power; and a thermal spreader directly or indirectly coupled to the heating disk and operable to at least channel heat from the heating disk, and impart voltage, to the first material sheet, wherein the heat and voltage imparted to the first material sheet are in accordance with respective heating and voltage profiles to assist in the anodic bonding of the first and second material sheets, and a thermal inertia of the bonding plate mechanism is relatively low such that heating of the first material sheet to a temperature of about 600 ?C or greater is achieved in less than about one-half hour.

    HIGH TEMPERATURE ANODIC BONDING APPARATUS
    3.
    发明申请
    HIGH TEMPERATURE ANODIC BONDING APPARATUS 审中-公开
    高温阳极结合装置

    公开(公告)号:WO2007127111A3

    公开(公告)日:2008-12-11

    申请号:PCT/US2007009423

    申请日:2007-04-18

    Abstract: An anodic bonding apparatus includes: a first bonding plate mechanism operable to engage a first material sheet, and to provide at least one of controlled heating, voltage, and cooling thereto; a second bonding plate mechanism operable to engage a second material sheet, and to provide at least one of controlled heating, voltage, and cooling thereto; a pressure mechanism operatively coupled to the first and second bonding plate mechanisms and operable to urge the first and second bonding plate mechanisms toward one another to achieve controlled pressure of the first and second material sheets against one another along respective surfaces thereof; a control unit operable to produce control signals to the first and second bonding plate mechanisms and the pressure mechanism to provide heating, voltage, and pressure profiles sufficient to achieve anodic bonding between the first and second material sheets.

    Abstract translation: 阳极接合装置包括:第一接合板机构,其可操作以接合第一材料片,并且提供受控加热,电压和冷却中的至少一个; 第二接合板机构,其可操作以接合第二材料片,并且提供受控制的加热,电压和冷却中的至少一个; 压力机构,其可操作地联接到所述第一和第二接合板机构并且可操作以将所述第一和第二接合板机构朝向彼此推动,以实现所述第一和第二材料片在其相应表面上彼此相对的受控压力; 控制单元,可操作以产生对第一和第二接合板机构和压力机构的控制信号,以提供足以实现第一和第二材料片之间的阳极接合的加热,电压和压力分布。

    HIGH TEMPERATURE ANODIC BONDING APPARATUS
    4.
    发明申请
    HIGH TEMPERATURE ANODIC BONDING APPARATUS 审中-公开
    高温阳极结合装置

    公开(公告)号:WO2007127111A2

    公开(公告)日:2007-11-08

    申请号:PCT/US2007/009423

    申请日:2007-04-18

    Abstract: An anodic bonding apparatus includes: a first bonding plate mechanism operable to engage a first material sheet, and to provide at least one of controlled heating, voltage, and cooling thereto; a second bonding plate mechanism operable to engage a second material sheet, and to provide at least one of controlled heating, voltage, and cooling thereto; a pressure mechanism operatively coupled to the first and second bonding plate mechanisms and operable to urge the first and second bonding plate mechanisms toward one another to achieve controlled pressure of the first and second material sheets against one another along respective surfaces thereof; a control unit operable to produce control signals to the first and second bonding plate mechanisms and the pressure mechanism to provide heating, voltage, and pressure profiles sufficient to achieve anodic bonding between the first and second material sheets.

    Abstract translation: 阳极接合装置包括:第一接合板机构,其可操作以接合第一材料片,并且提供受控加热,电压和冷却中的至少一个; 第二接合板机构,其可操作以接合第二材料片,并且提供受控制的加热,电压和冷却中的至少一个; 压力机构,其可操作地联接到所述第一和第二接合板机构并且可操作以将所述第一和第二接合板机构朝向彼此推动,以实现所述第一和第二材料片在其相应表面上彼此相对的受控压力; 控制单元,可操作以产生对第一和第二接合板机构和压力机构的控制信号,以提供足以实现第一和第二材料片之间的阳极接合的加热,电压和压力分布。

    A BONDING PLATE MECHANISM FOR USE IN ANODIC BONDING
    6.
    发明申请
    A BONDING PLATE MECHANISM FOR USE IN ANODIC BONDING 审中-公开
    用于阳极结合的粘合板机构

    公开(公告)号:WO2007127079A2

    公开(公告)日:2007-11-08

    申请号:PCT/US2007009216

    申请日:2007-04-16

    CPC classification number: H01L21/67092 H01L21/67121 H01L21/68 H01L21/76254

    Abstract: A bonding plate mechanism for use in anodic bonding of first and second material sheets together, the apparatus comprising: a base including first and second spaced apart surfaces; a thermal insulator supported by the second surface of the base and operable to impede heat transfer to the base; a heating disk directly or indirectly coupled to the insulator and operable to produce heat in response to electrical power; and a thermal spreader directly or indirectly coupled to the heating disk and operable to at least channel heat from the heating disk, and impart voltage, to the first material sheet, wherein the heat and voltage imparted to the first material sheet are in accordance with respective heating and voltage profiles to assist in the anodic bonding of the first and second material sheets, and a thermal inertia of the bonding plate mechanism is relatively low such that heating of the first material sheet to a temperature of about 600 ?C or greater is achieved in less than about one-half hour.

    Abstract translation: 一种用于将第一和第二材料片阳极接合在一起的粘合板机构,所述装置包括:基部,包括第一和第二间隔开的表面; 由所述基座的第二表面支撑并且可操作以阻止对所述基座的热传递的绝热绝缘体; 直接或间接地耦合到所述绝缘体并且可操作以响应于电功率产生热量的加热盘; 以及直接或间接地联接到所述加热盘并且可操作以至少将来自所述加热盘的热传递到所述第一材料片的热扩散器,并且向所述第一材料片施加电压,其中施加到所述第一材料片的热和电压根据相应的 加热和电压分布以帮助第一和第二材料片的阳极接合,并且接合板机构的热惯性相对较低,使得第一材料片材的加热达到约600℃或更高的温度 在不到一个半小时。

    KINEMATIC WELLPLATE MOUNTING METHOD
    7.
    发明申请
    KINEMATIC WELLPLATE MOUNTING METHOD 审中-公开
    动力式井筒安装方法

    公开(公告)号:WO2007018855A1

    公开(公告)日:2007-02-15

    申请号:PCT/US2006/026357

    申请日:2006-07-06

    Abstract: A mechanism for positionally restraining a microplate is disclosed. The mechanism is defined by a base having at least one surface with a receptacle for the insertion of a microplate into the base. Supports and/or positioning structures on a surface of the base have point contacts to restrain movement of the microplate in a stable position for repeatable optical detection measurements. The supports and/or positioning structures permit insertion of the microplate for an initial measurement, removal of the microplate for analytical manipulation, and re-insertion of the microplate to an exact position so as to allow analysis of precise comparative measurements by an optical reader.

    Abstract translation: 公开了一种用于定位微孔板的机构。 该机构由具有至少一个具有用于将微孔板插入基座的容器的至少一个表面的底座限定。 基座表面上的支撑和/或定位结构具有点接触以限制微孔板在稳定位置的运动,用于可重复的光学检测测量。 支撑和/或定位结构允许插入微孔板进行初步测量,移除微孔板用于分析操作,以及将微孔板重新插入精确位置,以便允许通过光学读取器分析精确的比较测量结果。

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