公开(公告)号：WO2010117861A1

公开(公告)日：2010-10-14

申请号：PCT/US2010/029447

申请日：2010-03-31

Applicant: CYMER, INC. ,  CHROBAK, Christopher, P. ,  PARTLO, William N. ,  FOMENKOV, Igor, V. ,  ERSHOV, Alexander, I. ,  CROUCH, James, H.

Inventor： CHROBAK, Christopher, P. ,  PARTLO, William N. ,  FOMENKOV, Igor, V. ,  ERSHOV, Alexander, I. ,  CROUCH, James, H.

IPC: G01J3/10

CPC classification number: H05G2/005 ,  G03F7/70033 ,  G21K5/00 ,  H05G2/003 ,  H05G2/006

Abstract: An extreme ultraviolet light system includes a drive laser system, an extreme ultraviolet light chamber including an extreme ultraviolet light collector and a target material dispenser including a target material outlet capable of outputting a plurality of portions of target material along a target material path, wherein the target material outlet is adjustable. The extreme ultraviolet light system further includes a drive laser steering device, a detection system including at least one detector directed to detect a reflection of the drive laser reflected from the first one of the plurality of portions of target material and a controller coupled to the target material dispenser, the detector system and the drive laser steering device. The controller includes logic for detecting a location of a first one of the plurality of portions of target material from a first light reflected from the first target material.

Abstract translation: 一种极紫外光系统包括驱动激光系统，包括极紫外光收集器的极紫外光室和包括能够沿目标材料路径输出多个目标材料部分的靶材料出口的目标材料分配器，其中， 目标材料出口可调。 所述极紫外光系统还包括驱动激光转向装置，所述检测系统包括至少一个检测器，所述检测器被引导以检测从所述目标材料的所述多个部分中的第一部分反射的所述驱动激光的反射，以及耦合到所述目标的控制器 材料分配器，检测器系统和驱动激光转向装置。 控制器包括用于从第一目标材料反射的第一光检测目标材料的多个部分中的第一部分的位置的逻辑。

公开(公告)号：WO2013028272A1

公开(公告)日：2013-02-28

申请号：PCT/US2012/046093

申请日：2012-07-10

Applicant: CYMER, INC. ( A NEVADA CORPORATION) ,  GRAHAM, Matthew, R. ,  CHANG, Steven ,  CROUCH, James, H. ,  FOMENKOV, Igor, V.

Inventor： GRAHAM, Matthew, R. ,  CHANG, Steven ,  CROUCH, James, H. ,  FOMENKOV, Igor, V.

IPC: H05G2/00

CPC classification number: G03F7/70033 ,  H05G2/003 ,  H05G2/008

Abstract: An apparatus includes a drive laser system producing an amplified light beam of pulses that travels along a drive axis; a beam delivery system that directs the amplified light beam of pulses toward a target region; a target material delivery system that provides a target mixture containing a target material in the target region; two or more sensors radially separated from a main axis that crosses the target region, the two or more sensors being configured to detect energy of ultraviolet electromagnetic radiation emitted from a plasma state of the target material when the amplified light beam of pulses intersects the target mixture; and a controller that receives the output from the two or more sensors. The controller is configured to estimate a relative radial alignment between the target mixture and the drive axis within the target region based on an analysis of the detected energy.

Abstract translation: 一种装置包括驱动激光系统，其产生沿驱动轴线行进的放大的脉冲光束; 射束传送系统，其将放大的脉冲光束朝向目标区域引导; 目标材料输送系统，其在目标区域中提供含有靶材料的目标混合物; 两个或更多个传感器与跨越目标区域的主轴径向分离，两个或更多个传感器被配置为当被放大的脉冲光束与目标混合物相交时，检测从目标材料的等离子体状态发射的紫外电磁辐射的能量 ; 以及接收来自两个或更多个传感器的输出的控制器。 控制器被配置为基于对所检测的能量的分析来估计目标混合物和目标区域内的驱动轴之间的相对径向对准。