公开(公告)号：WO1995020774A1

公开(公告)日：1995-08-03

申请号：PCT/JP1995000066

申请日：1995-01-23

Applicant: THE NIPPON SIGNAL CO., LTD. ,  ESASHI, Masayoshi ,  ASADA, Norihiro

Inventor： THE NIPPON SIGNAL CO., LTD.

IPC: G02B26/10

CPC classification number: G02B26/0841 ,  G02B26/0816 ,  G02B26/105

Abstract: The present invention relates to a small-sized thin galvanomirror for detecting the displacement angle of a mirror, which is produced by a semiconductor process. By using a semiconductor process, a movable plate (5) and a torsion bar (6) for supporting this movable plate (5) are integrally formed on a silicon substrate (2), and a planar coil (7) and a total reflection mirror (8) are formed on the upper surface of the movable plate (5). Permanent magnets (10A, 10B) and (11A, 11B) for generating magnetic fields are fixedly disposed on the planar coil (7) to thereby control the amount and direction of current to be conducted to the planar coil (7) so as to variably control the swinging angle of the movable plate (5) through the balance between a magnetic force generated and a torsional force by the torsion bar (6). Furthermore, detecting coils (12A, 12B) are provided below the movable plate (5) to thereby cause a detection current to flow to the planar coil (7) by superposing it on a driving current, whereby the detection of a displacement angle of the mirror is performed through the relative inductance variation between the planar coil (7) and the detection coils (12A, 12B) based on this detection current.

Abstract translation: 本发明涉及一种用于检测通过半导体工艺制造的反射镜的位移角的小型薄电流镜。 通过使用半导体工艺，可移动板（5）和用于支撑该可动板（5）的扭杆（6）一体地形成在硅基板（2）上，并且平面线圈（7）和全反射镜 （8）形成在可动板（5）的上表面上。 用于产生磁场的永磁体（10A，10B）和（11A，11B）固定地设置在平面线圈（7）上，从而可变地控制要传导到平面线圈（7）的电流量和方向 通过由扭杆（6）产生的磁力和扭转力之间的平衡来控制可动板（5）的摆动角度。 此外，检测线圈（12A，12B）设置在可动板（5）下方，从而通过将驱动电流叠加在平面线圈（7）上而使检测电流流过平面线圈（7），从而检测线圈 基于该检测电流，通过平面线圈（7）和检测线圈（12A，12B）之间的相对电感变化来执行反射镜。

公开(公告)号：WO1995017698A1

公开(公告)日：1995-06-29

申请号：PCT/JP1994002062

申请日：1994-12-08

Applicant: THE NIPPON SIGNAL CO., LTD. ,  ESASHI, Masayoshi ,  ASADA, Norihiro

Inventor： THE NIPPON SIGNAL CO., LTD.

IPC: G02B26/10

CPC classification number: G02B26/085 ,  G02B26/0816 ,  G02B26/105 ,  Y10S359/90

Abstract: This invention relates to a thin and compact galvanomirror produced by using semiconductor fabrication technology. A flat movable plate (5) and a torsion bar (6) for rotatably supporting this movable plate (5) are integrally formed on a silicon substrate (2) by using semiconductor fabrication technology, and a flat coil (7) and a total reflection mirror (8) are formed on the upper surface of the movable plate (5). Further, glass substrates (3), (4) are disposed on the upper and lower surfaces of the silicon substrate (2), and permanent magnets (10A, 10B and 11A, 11B) for causing magnetic fields to act on the coil (7) are fixed at predetermined positions of these glass substrates. The rocking angle of the movable plate (5) is varied depending on the balance of the resulting magnetic force and the torque by controlling the quantity and direction of the current flowing through the coil (7).

Abstract translation: 本发明涉及通过使用半导体制造技术制造的薄而紧凑的电流镜。 通过使用半导体制造技术，在硅基板（2）上一体地形成用于可旋转地支撑该可动板（5）的平板可动板（5）和扭杆（6），平面线圈（7）和全反射 反射镜（8）形成在可动板（5）的上表面上。 此外，玻璃基板（3），（4）设置在硅基板（2）的上表面和下表面上，并且使磁场作用在线圈（7）上的永磁体（10A，10B和11A，11B） ）固定在这些玻璃基板的预定位置。 通过控制流过线圈（7）的电流的数量和方向，可动板（5）的摇摆角度取决于所得磁力的平衡和转矩的变化。

公开(公告)号：WO2001032555A1

公开(公告)日：2001-05-10

申请号：PCT/JP2000007556

申请日：2000-10-27

Applicant: JAPAN SCIENCE AND TECHNOLOGY CORPORATION ,  ESASHI, Masayoshi

Inventor： JAPAN SCIENCE AND TECHNOLOGY CORPORATION

IPC: B81C5/00

CPC classification number: H01L21/6835 ,  H01L21/486 ,  H01L2221/68377 ,  H01L2224/48463 ,  H05K3/06 ,  H05K3/4038 ,  H05K2201/09563 ,  H05K2203/0369

Abstract: A substrate used for a package of a microdevice has flat front and back surfaces and a wiring extending between the surfaces and conduct electricity between the surfaces through the wiring.

Abstract translation: 用于微型装置的封装的基板具有平坦的前后表面和在表面之间延伸的布线，并且通过布线在表面之间导电。

公开(公告)号：WO1995017760A1

公开(公告)日：1995-06-29

申请号：PCT/JP1994002063

申请日：1994-12-08

Applicant: THE NIPPON SIGNAL CO., LTD. ,  ESASHI, Masayoshi ,  ASADA, Norihiro

Inventor： THE NIPPON SIGNAL CO., LTD.

IPC: H01H51/26

CPC classification number: H01H50/005 ,  H01H1/20 ,  H01H2050/007 ,  H01H2050/025 ,  H01H2059/0054

Abstract: This invention relates to a thin and compact solenoid relay produced by employing semiconductor production technique. A flat sheet-like movable plate (5) and a torsion bar (6) for pivotally supporting the movable plate (5) are integrally formed on a silicon substrate (2) by employing semiconductor production technique. A flat surface coil (7) is disposed on the upper surface of the movable plate (5) and a movable contact (9), on the lower surface side. Further, glass substrates (3) and (4) are disposed on the upper and lower surfaces of the silicon substrate (2), and a fixed contact (11) capable of coming into contact with the movable contact (9) is disposed on the lower glass substrate (4). Permanent magnets (13A, 13B and 14A, 14B for causing a magnetic field to act ont the flat surface coil are fixedly disposed on the glass substrates (3) and (4). Power is fed to the flat surface coil (7) to generate the magnetic force so as to rotate the movable plate (5) against torsion of the torsion bar (6) and to bring the movable contact (9) and the fixed contact (11) into contact with, or out of contact from, each other.

Abstract translation: 本发明涉及采用半导体生产技术制造的薄而紧凑的电磁继电器。 通过采用半导体制造技术，在硅基板（2）上一体地形成用于枢转地支撑可动板（5）的平板状可动板（5）和扭杆（6）。 平面表面线圈（7）设置在可动板（5）的上表面和可动触头（9）的下表面侧。 此外，玻璃基板（3）和（4）设置在硅基板（2）的上表面和下表面上，并且能够与可动触头（9）接触的固定触头（11）设置在 下玻璃基板（4）。 在玻璃基板（3）和（4）上固定设置永磁体（13A，13B，14A，14B，使磁场作用在平面线圈上）供给平面线圈（7） 磁力使得可移动板（5）抵抗扭杆（6）的扭转而旋转，并使可动触头（9）和固定触头（11）彼此接触或脱离接触 。

公开(公告)号：WO1994002992A1

公开(公告)日：1994-02-03

申请号：PCT/JP1992000911

申请日：1992-07-16

Applicant: THE NIPPON SIGNAL CO., LTD. ,  ESASHI, Masayoshi ,  ASADA, Norihiro ,  KATO, Masakazu ,  FUTUHARA, Koichi

Inventor： THE NIPPON SIGNAL CO., LTD.

IPC: H03K19/007

CPC classification number: H03K19/007

Abstract: A fail-safe logical operation circuit which includes a transformer (T) for converting binary input signals to magnetic flux to sum them up, and a level detector (1) for detecting this sum and generating binary outputs having logical values of "1" and "0". In this way, the fail-safe circuit can simplify the circuit construction and can reduce the level of the logical output.

Abstract translation: 一种故障安全逻辑运算电路，包括用于将二进制输入信号转换为磁通以将其相加的变压器（T）和用于检测该和的电平检测器（1），并产生具有逻辑值“1”的二进制输出和 “0”。 以这种方式，故障安全电路可以简化电路结构，并可以降低逻辑输出电平。