公开(公告)号：WO2007051340A1

公开(公告)日：2007-05-10

申请号：PCT/CH2006/000617

申请日：2006-11-02

Applicant: TETRA LAVAL HOLDINGS & FINANCE S.A. ,  FAYET, Pierre ,  OLOFSSON, Torsten ,  TILLER, Hans-Jurgen ,  RICHTER, Thomas

Inventor： FAYET, Pierre ,  OLOFSSON, Torsten ,  TILLER, Hans-Jurgen ,  RICHTER, Thomas

IPC: C23C16/453 ,  C23C16/54 ,  C23C16/40

CPC classification number: C23C16/453 ,  C23C16/401 ,  C23C16/54

Abstract: A web of a polymer film (1) is coated with an oxide layer, in particular with an SiO x barrier layer, by transporting the web with the aid of a rotatable drum (12) through a plurality of flame bands, which are directed in a radial direction from above against the circumferential surface of the drum, which extend at a distance from each other across the width of the web being supported and transported on this circumferential surface, and which are fed with a gas mixture comprising a combustible gas an oxidant and a silicon containing compound. Therein the circumferential surface of the rotatable drum is cooled to a predetermined temperature and the web is transported through the area of the tip of the inner flame region. Polymer films with barrier layers produced in the named way have at small layer thicknesses of less than 10 nm very good barrier properties. In addition, the process being carried out at ambient pressure can be carried out with simple equipment and, if required, in a continuous roll-to-roll or in-line process.

Abstract translation: 聚合物膜（1）的网由氧化物层，特别是SiO 2 x阻挡层涂覆，借助于可旋转的鼓（12）通过多个 火焰带，其从径向方向从上方抵靠着滚筒的圆周表面，该圆周表面在该圆周表面上被支撑和传送的幅材的宽度上彼此间隔一定距离延伸，并且被供给气体 包含可燃气体的氧化剂和含硅化合物的混合物。 其中可旋转滚筒的圆周表面被冷却到预定的温度，并且幅材被输送通过内火焰区域的尖端区域。 具有以指定方式生产的阻挡层的聚合物膜具有小于10nm的小层厚度非常好的阻隔性能。 此外，在环境压力下进行的方法可以用简单的设备进行，如果需要，可以连续的卷对卷或在线工艺进行。

公开(公告)号：WO2007050307A3

公开(公告)日：2007-07-26

申请号：PCT/US2006039875

申请日：2006-10-13

Applicant: GUARDIAN INDUSTRIES ,  RICHERT HENDRYK ,  WIELAND PATRICK ,  SCHMIDT ARMIN ,  JANICKE GERALD ,  WEIDL ROLAND ,  GRUENLER BERND E ,  TILLER HANS-JURGEN ,  KRILTZ UWE

Inventor： RICHERT HENDRYK ,  WIELAND PATRICK ,  SCHMIDT ARMIN ,  JANICKE GERALD ,  WEIDL ROLAND ,  GRUENLER BERND E ,  TILLER HANS-JURGEN ,  KRILTZ UWE

IPC: H01J37/32

CPC classification number: H01J37/3405 ,  H01J37/3497

Abstract: A sputtering target includes an outer target tube (90), an inner support tube (54) of rectangular cross-sectional shape supporting a magnet carrier extending along substantially the entire length of the inner support tube; and a water cooling circuit including at least one passageway within said inner support tube with an inlet at one end thereof adapted to receive cooling water from an external source, at least one outlet aperture at an opposite end thereof opening to a chamber radially between the inner support tube and the outer target tube; and at least one cooling water outlet at the one end of the inner support tube .

Abstract translation: 溅射靶包括外部目标管（90），支撑沿着内部支撑管的整个长度延伸的磁体载体的矩形横截面形状的内部支撑管（54） 以及水冷却回路，其包括在所述内部支撑管内的至少一个通道，其一端处的入口适于接收来自外部源的冷却水，在其相对端处的至少一个出口孔径向地在所述内部 支撑管和外目标管; 以及在内支撑管的一端的至少一个冷却水出口。

公开(公告)号：WO2007050307A2

公开(公告)日：2007-05-03

申请号：PCT/US2006/039875

申请日：2006-10-13

Applicant: GUARDIAN INDUSTRIES CORP. ,  RICHERT, Hendryk ,  WIELAND, Patrick ,  SCHMIDT, Armin ,  JANICKE, Gerald ,  WEIDL, Roland ,  GRUENLER, Bernd, E. ,  TILLER, Hans-jurgen ,  KRILTZ, Uwe

Inventor： RICHERT, Hendryk ,  WIELAND, Patrick ,  SCHMIDT, Armin ,  JANICKE, Gerald ,  WEIDL, Roland ,  GRUENLER, Bernd, E. ,  TILLER, Hans-jurgen ,  KRILTZ, Uwe

CPC classification number: H01J37/3405 ,  H01J37/3497

Abstract: A sputtering target includes an outer target tube, an inner support tube of rectangular cross-sectional shape supporting a magnet carrier extending along substantially the entire length of the inner support tube; and a water cooling circuit including at least one passageway within said inner support tube with an inlet at one end thereof adapted to receive cooling water from an external source, at least one outlet aperture at an opposite end thereof opening to a chamber radially between the inner support tube and the outer target tube; and at least one cooling water outlet at the one end of the inner support tube.

Abstract translation: 溅射靶包括外目标管，支撑沿着内支撑管的整个长度延伸的磁体载体的矩形横截面形状的内支撑管; 以及水冷却回路，其包括在所述内部支撑管内的至少一个通道，其一端处的入口适于接收来自外部源的冷却水，在其相对端处的至少一个出口孔径向地在所述内部 支撑管和外目标管; 以及在内支撑管的一端的至少一个冷却水出口。

公开(公告)号：WO2007050304A1

公开(公告)日：2007-05-03

申请号：PCT/US2006/039855

申请日：2006-10-13

Applicant: GUARDIAN INDUSTRIES CORP. ,  SCHMIDT, Armin ,  JANICKE, Gerald ,  WEIDL, Roland ,  RICHERT, Hendryk ,  GRUENLER, Bernd, E. ,  TILLER, Hans-jurgen ,  KRILTZ, Uwe

Inventor： SCHMIDT, Armin ,  JANICKE, Gerald ,  WEIDL, Roland ,  RICHERT, Hendryk ,  GRUENLER, Bernd, E. ,  TILLER, Hans-jurgen ,  KRILTZ, Uwe

IPC: H01J37/34

CPC classification number: H01J37/3497 ,  H01J37/3405

Abstract: A sputtering target comprising an outer target tube (14), an inner support tube (22) supporting a magnet carrier (24) extending along substantially the entire length of the inner support tube? and a water cooling circuit including at least one passageway within the inner support tube with an inlet at one end thereof adapted to receive cooling water from an external source, at least one outlet aperture at an opposite end thereof opening to a cooling chamber radially between the inner support tube and the outer target tube; and a plurality of spiral vane segments (50, 52) attached to an outer surface of the inner support tube.

Abstract translation: 一种溅射靶，包括外目标管（14），支撑沿着内支撑管的大致整个长度延伸的磁体载体（24）的内支撑管（22） 以及水冷却回路，其包括在所述内部支撑管内的至少一个通道，其一端处的入口适于从外部源接收冷却水;至少一个在其相对端处的出口孔， 内支撑管和外目标管; 以及附接到所述内支撑管的外表面的多个螺旋叶片段（50,52）。