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公开(公告)号：WO2009073753A1
公开(公告)日：2009-06-11
申请号：PCT/US2008/085447
申请日：2008-12-03
发明人： HUANG, Yongli
IPC分类号： A61B8/12
CPC分类号： A61B8/12 , A61B8/445 , A61B8/4483 , A61B8/4488 , B06B1/0292 , B06B1/0651 , B06B3/00 , H04R31/00 , Y10T29/49005
摘要： Ultrasonic scanners and methods of manufacturing ultrasonic scanners. One embodiment of a method includes integrating a flexible electronic device (e.g. an IC) and a flexible ultrasonic transducer (e.g. a portion of a circular CMUT array) with a flexible member. The IC, the transducer, and the flexible member can form a flexible subassembly which is rolled up to form an ultrasonic scanner. The integration of the IC and the transducer can occur at the same time. In the alterative, the integration of the electronic device can occur before the integration of the transducer. Moreover, the integration of the transducer can include using a semiconductor technique. Furthermore, the rolled up subassembly can form a lumen or can be attached to a lumen. The method can include folding a portion of the flexible subassembly to form a forward looking transducer. The flexible member of some subassemblies can include a pair of arms.
摘要翻译： 超声波扫描仪和制造超声波扫描仪的方法。 方法的一个实施例包括将柔性电子器件（例如IC）和柔性超声换能器（例如圆形CMUT阵列的一部分）与柔性构件集成。 IC，换能器和柔性构件可以形成柔性子组件，该组件被卷起以形成超声波扫描器。 IC和传感器的集成可以同时进行。 在替代中，电子设备的集成可以在传感器集成之前发生。 此外，换能器的集成可以包括使用半导体技术。 此外，卷起的子组件可以形成内腔或可以附接到管腔。 该方法可以包括折叠柔性子组件的一部分以形成前视换能器。 一些子组件的柔性构件可以包括一对臂。
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公开(公告)号：WO2006123298A3
公开(公告)日：2007-07-05
申请号：PCT/IB2006051566
申请日：2006-05-18
发明人： HUANG YONGLI
CPC分类号： H01L21/76898 , H01L23/481 , H01L2924/0002 , H01L2924/3011 , H01L2924/00012 , H01L2924/00
摘要： A through-wafer interconnect and a method for fabricating the same are disclosed. The method starts with a conductive wafer (300) to form a patterned trench by removing material of the conductive wafer. The patterned trench extends in depth from the front side to the backside of the wafer, and has an annular opening generally dividing the conductive wafer into an inner portion and an outer portion whereby the inner portion of the conductive wafer is insulated from the outer portion and serves as a through-wafer conductor (310). A dielectric material (320) is formed or added into the patterned trench mechanical to support and electrically insulate the through-wafer conductor. Multiple conductors can be formed in an array.
摘要翻译： 公开了一种晶片间互连及其制造方法。 该方法从导电晶片（300）开始，以通过去除导电晶片的材料形成图案化的沟槽。 图案化的沟槽从晶片的前侧延伸到背面，并且具有通常将导电晶片分成内部部分和外部部分的环形开口，从而导电晶片的内部部分与外部部分绝缘， 用作透晶片导体（310）。 介电材料（320）被形成或加入到图案化的沟槽机械中以支撑和电绝缘透晶片导体。 多个导体可以形成为阵列。
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公开(公告)号：WO2006134580A2
公开(公告)日：2006-12-21
申请号：PCT/IB2006/051948
申请日：2006-06-16
发明人： HUANG, Yongli
CPC分类号： H02N1/006 , B06B1/0292 , B81B3/0021 , G01N29/2406 , H01L41/0973 , H01L2924/0002 , Y10T29/49005 , H01L2924/00
摘要： A micro-electro-mechanical transducer (such as a cMUT) having two electrodes separated by an insulator with an insulation extension is disclosed. The two electrodes define a transducing gap therebetween. The insulator has an insulating support disposed generally between the two electrodes and an insulation extension extending into at least one of two electrodes to increase the effective insulation without having to increase the transducing gap. Methods for fabricating the micro-electro-mechanical transducer are also disclosed. The methods may be used in both conventional membrane-based cMUTs and cMUTs having embedded springs transporting a rigid top plate.
摘要翻译： 公开了具有由具有绝缘延伸部的绝缘体隔开的两个电极的微机电换能器（例如cMUT）。 两个电极在它们之间限定换能间隙。 绝缘体具有通常设置在两个电极之间的绝缘支撑和延伸到两个电极中的至少一个电极中的绝缘延伸部，以增加有效绝缘，而不必增加换能间隙。 还公开了用于制造微电子机械换能器的方法。 这些方法可以用于具有传送刚性顶板的嵌入弹簧的常规膜基cMUT和cMUT中。
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公开(公告)号：WO2006123300A2
公开(公告)日：2006-11-23
申请号：PCT/IB2006/051568
申请日：2006-05-18
发明人： HUANG, Yongli
IPC分类号： F22B1/02
CPC分类号： B06B1/0292 , H01L2924/0002 , Y10T29/49005 , H01L2924/00
摘要： A micro-electro-mechanical transducer (such as a cMUT) is disclosed. The transducer has a substrate, a top plate, and a resilient structure therebetween. The resilient structure has multiple connectors distributed over the device element area to vertically transport the top player with distributed support. The resilient structure may be cantilevers formed using a middle spring layer covering cavities on the substrate. Connectors define a transducing space below the top plate. The resilient structure enables a vertical displacement of the connectors, which transports the top plate in a piston-like motion to change the transducing space and to effectuate energy transformation. No separate cells are necessary for each addressable transducer element. Multiple device elements can be made on the same substrate.
摘要翻译： 公开了一种微机电换能器（例如cMUT）。 换能器具有基板，顶板和它们之间的弹性结构。 弹性结构具有分布在设备元件区域上的多个连接器，以垂直地传送具有分布式支撑的顶级玩家。 弹性结构可以是使用覆盖基板上的空腔的中间弹簧层形成的悬臂。 连接器在顶板下面定义一个传感空间。 弹性结构能够使连接器的垂直位移，其以活塞状运动传送顶板以改变换能空间并实现能量转换。 对于每个可寻址的换能器元件，不需要单独的单元。 可以在同一基板上制造多个器件元件。
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公开(公告)号：WO2006123301A3
公开(公告)日：2009-06-04
申请号：PCT/IB2006051569
申请日：2006-05-18
发明人： HUANG YONGLI
CPC分类号： B06B1/0292 , H01L2924/0002 , Y10T29/49005 , H01L2924/00
摘要： A micro-electro-mechanical transducer (such as a cMUT) is disclosed. The transducer (500) has a substrate (501), a top plate (540), a middle spring (520) layer therebetween. The substrate (501) and the middle spring layer (520) define cavities therebetween sidewalle standing features. The middle spring layer (520) is anchored by the standing features to create cantilevers over the cavities to enab vertical displacement of connectors placed on the middle spring layer (520). The connectors define a transducing space between th middle spring layer (520) and the top plate (540). The top plate (540) is transported by the vertical displacement of the connectors in piston-like motion to change the transducing space and to effectuate energy transformation. Various configurations of cantilevers including single cantilevers, back-to-back double cantilevers and head-to-head double cantilevers (bridges) are possible.
摘要翻译： 公开了一种微机电换能器（例如cMUT）。 换能器（500）具有基板（501），顶板（540），中间弹簧（520）之间。 衬底（501）和中间弹簧层（520）在侧面间隔特征之间限定空腔。 中间弹簧层（520）由竖立特征锚固以在空腔上形成悬臂，以使得放置在中间弹簧层（520）上的连接器具有垂直位移。 连接器在中间弹簧层（520）和顶板（540）之间限定换能空间。 顶板（540）通过活塞式运动中连接器的垂直位移传送，以改变传感空间并实现能量转换。 包括单悬臂，背对背双悬臂和头对头双悬臂（桥）的悬臂的各种构型是可能的。
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公开(公告)号：WO2007115283A3
公开(公告)日：2008-02-21
申请号：PCT/US2007065888
申请日：2007-04-03
发明人： HUANG YONGLI
IPC分类号： H02N1/00
CPC分类号： B06B1/0292 , B06B1/0238 , G01N29/2406 , Y10T29/49005
摘要： A capacitive micromachined ultrasonic transducer (cMUT) system uses a modulation technique to increase cMUT sensitivity. An AC carrier signal is applied to the cMUT through a modulation signal port to modulate the signal. The higher frequency of the AC carrier signal carries the real signal to a high frequency range to increase the output current signal level. The real signal is later recovered by demodulation. The technique is applicable in both the reception mode and the transmission mode.
摘要翻译： 电容式微加工超声波换能器（cMUT）系统使用调制技术来提高cMUT灵敏度。 交流载波信号通过调制信号端口施加到cMUT，以调制信号。 交流载波信号的较高频率将实际信号传送到高频范围以增加输出电流信号电平。 实际信号随后通过解调恢复。 该技术适用于接收模式和发送模式。
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公开(公告)号：WO2007115283A2
公开(公告)日：2007-10-11
申请号：PCT/US2007/065888
申请日：2007-04-03
发明人： HUANG, Yongli
IPC分类号： H01L41/00
CPC分类号： B06B1/0292 , B06B1/0238 , G01N29/2406 , Y10T29/49005
摘要： A capacitive micromachined ultrasonic transducer (cMUT) system uses a modulation technique to increase cMUT sensitivity. An AC carrier signal is applied to the cMUT through a modulation signal port to modulate the signal. The higher frequency of the AC carrier signal carries the real signal to a high frequency range to increase the output current signal level. The real signal is later recovered by demodulation. The technique is applicable in both the reception mode and the transmission mode.
摘要翻译： 电容式微加工超声波换能器（cMUT）系统使用调制技术来提高cMUT灵敏度。 交流载波信号通过调制信号端口施加到cMUT，以调制信号。 交流载波信号的较高频率将实际信号传送到高频范围以增加输出电流信号电平。 实际信号随后通过解调恢复。 该技术适用于接收模式和发送模式。
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公开(公告)号：WO2007015218A3
公开(公告)日：2007-02-08
申请号：PCT/IB2006/052657
申请日：2006-08-03
发明人： HUANG, Yongli
IPC分类号： H02N10/00
摘要： A micro-electro-mechanical transducer (such as a cMUT) having a non-flat surface (740-744) is disclosed. The non-flat surface (740-744) may include a variable curve or slope in an area where a spring layer (720) contacts a support (730), thus making a variable spring model as the spring layer (720) vibrates. The non-flat surface (740-744) may be that of a non-flat electrode optimized to compensate the dynamic deformation of the other electrode during operation and thus enhance the uniformity of the dynamic electrode gap during operation. Methods for fabricating the micro-electro-mechanical transducer are also disclosed The methods may be used in both conventional membrane-based cMUTs and cMUTs having embedded springs transportion a rigid top plate.
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公开(公告)号：WO2006123300A3
公开(公告)日：2009-06-04
申请号：PCT/IB2006051568
申请日：2006-05-18
发明人： HUANG YONGLI
CPC分类号： B06B1/0292 , H01L2924/0002 , Y10T29/49005 , H01L2924/00
摘要： A micro-electro-mechanical transducer (such as a cMUT) that has a movable mechanical part to transform energy. The transducer (511) has a substrate (501), a top plate (540), and a resilient structure (520) therebetween. The resilient structure has multiple connectors (530) distributed over the device element area to vertically transport the top player with distributed support not limited to edges. The resilient structure (520) may be cantilevers, or cantilever-containing structures such as bridges or crossbars, formed using a middle spring layer coveting cavities on the substrate. Connectors (530) define a transducing space below the top plate (540). The resilient structure (520) such as cantilevers enable a vertical displacement of the connectors, which transports the top plate (540) in a piston-like motion to change the transducing space and to effectuate energy transformation. No separate cells are necessary for each addressable transducer element. Multiple device elements can be made on the same substrate.
摘要翻译： 具有可移动机械部件以转换能量的微机电传感器（例如cMUT）。 换能器（511）具有衬底（501），顶板（540）和它们之间的弹性结构（520）。 弹性结构具有分布在设备元件区域上的多个连接器（530），以垂直地传送顶级玩家具有不限于边缘的分布式支持。 弹性结构（520）可以是悬臂式的，或者是使用基板上的中间弹簧层共同形成空腔形成的悬臂式结构，例如桥梁或横梁。 连接器（530）在顶板（540）下面限定换能空间。 诸如悬臂的弹性结构（520）能够使连接器的垂直位移，其以类似活塞的运动传送顶板（540），以改变换能空间并实现能量转换。 对于每个可寻址的换能器元件，不需要单独的单元。 可以在同一基板上制造多个器件元件。
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10.发明申请
公开(公告)号：WO2007115294A2
公开(公告)日：2007-10-11
申请号：PCT/US2007/065932
申请日：2007-04-04
发明人： HUANG, Yongli
IPC分类号： H01L41/00
CPC分类号： B06B1/0292 , B06B1/0238 , G01N29/2406 , Y10T29/49005
摘要： An electrostatic actuator/transducer has a comb driver and can be adapted for a variety of applications, particularly as a capacitive micromachined ultrasonic transducer. The comb driver has two electrodes each connected to a set of comb fingers. The two sets of comb fingers interdigitate with each other, and in one embodiment each has a saw-toothed shape. One electrode is connected to a spring structure and movable along a vertical direction to engage and disengage the two sets of comb fingers. The movable portion is adapted to perform an actuation function and/or a sense of function. Fabrication methods for making the electrostatic actuator/transducer are also disclosed.
摘要翻译： 静电致动器/换能器具有梳状驱动器，并且可以适用于各种应用，特别是作为电容式微加工超声换能器。 梳子驱动器具有两个电极，每个电极连接到一组梳齿。 两组梳齿相互交错，在一个实施例中，每组具有锯齿状。 一个电极连接到弹簧结构并且可沿着垂直方向移动以接合和分离两组梳指。 可移动部分适于执行致动功能和/或功能感。 还公开了用于制造静电致动器/换能器的制造方法。
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