公开(公告)号：WO2021262841A1

公开(公告)日：2021-12-30

申请号：PCT/US2021/038668

申请日：2021-06-23

Applicant: L'AIR LIQUIDE, SOCIETE ANONYME POURL'ETUDE ET L'EXPLOITATION DES PROCEDES GEORGES CLAUDE ,  AMERICAN AIR LIQUIDE, INC.

Inventor： MARCHEGIANI, Fabrizio

IPC: H01L21/3065 ,  H01L27/11582 ,  H01L21/02321 ,  H01L21/0234 ,  H01L21/3086 ,  H01L21/31116 ,  H01L21/3115 ,  H01L21/32137 ,  H01L27/1157 ,  H01L27/11578

Abstract: Disclosed are methods for etching a silicon-containing film to form a patterned structure, methods for reinforcing and/or strengthening and/or minimizing damage of a patterned mask layer while forming a patterned structure and methods for increasing etch resistance of a patterned mask layer in a process of forming a patterned structure. The methods include using an activated iodine-containing etching compound having the formula CnHxFylz, wherein 4≤ n ≤ 10, 0 ≤ x ≤ 21, 0 ≤ y ≤ 21, and 1 ≤ z ≤ 4 as an etching gas. The activated iodine-containing etching compound produces iodine ions, which are implanted into the patterned hardmask layer, thereby strengthening the patterned mask layer.

公开(公告)号：WO2011041179A1

公开(公告)日：2011-04-07

申请号：PCT/US2010/049759

申请日：2010-09-22

Applicant: L'AIR LIQUIDE SOCIETE ANONYME POURL'ETUDE ET L'EXPLOITATION DES PROCEDES GEORGES CLAUDE ,  SHANBHAG, Purushottam V. ,  SANDERS, JR., Edgar S.

Inventor： SHANBHAG, Purushottam V. ,  SANDERS, JR., Edgar S.

IPC: B01D53/22 ,  C07C7/144 ,  C07C9/08 ,  C07C11/06 ,  B01D61/36

CPC classification number: B01D53/72 ,  B01D53/226 ,  B01D2256/24 ,  B01D2257/7022 ,  B01D2311/04 ,  B01D2317/02 ,  C07C7/144 ,  C07C9/08 ,  C07C11/06 ,  B01D2311/2673

Abstract: Disclosed are membrane-based systems and methods for the separation of mixtures containing close-boiling hydrocarbon components that overcome certain issues associated with prior art devices.

Abstract translation: 公开了用于分离含有近沸点烃组分的混合物的膜系统和方法，其克服了与现有技术装置相关的某些问题。