公开(公告)号：WO2013016532A1

公开(公告)日：2013-01-31

申请号：PCT/US2012/048338

申请日：2012-07-26

Applicant: MKS INSTRUMENTS, INC. ,  DAVIDKOVICH, Vladislav ,  RYAN, Martin ,  CHAMBERLAIN, David ,  SULLIVAN, Philip W. ,  LUCAS, Paul D. ,  HILLHOUSE, John Thomas ,  KRMPOTICH, Robert

Inventor： DAVIDKOVICH, Vladislav ,  RYAN, Martin ,  CHAMBERLAIN, David ,  SULLIVAN, Philip W. ,  LUCAS, Paul D. ,  HILLHOUSE, John Thomas ,  KRMPOTICH, Robert

IPC: G05D16/20 ,  C23C16/52

CPC classification number: G05D16/2046 ,  Y10T137/0318 ,  Y10T137/87169

Abstract: An improved gas delivery system and method delivers a sequence of pulses of prescribed amounts of at least two gases to a process chamber of a process tool in accordance with a predetermined recipe of steps of a gas delivery process. The system comprises: a plurality of channels, each including a control valve connected so as to control each pulse of gas flowing through the corresponding channel into the process chamber of the process tool; and an exhaust valve for controlling the pressure within the process chamber, the exhaust valve including a valve controller for controlling the operation of the gas delivery system including the control valves and the exhaust valve in accordance with the predetermined recipe of steps. In one embodiment, the exhaust valve controller is configured to operate in a hybrid feedback mode including both open feedback loop control wherein the exhaust valve is set at a preselected position based on a past learned position for each step of the gas delivery process, and closed feedback loop control of the system for each step of the gas delivery process as a function of the pressure within the process chamber following the open loop control.

Abstract translation: 改进的气体输送系统和方法根据气体输送过程的步骤的预定配方，将规定量的至少两种气体的脉冲序列递送到处理工具的处理室。 该系统包括：多个通道，每个通道包括连接的控制阀，以便控制流过相应通道的气体的每个脉冲进入处理工具的处理室; 以及用于控制处理室内的压力的排气阀，排气阀包括阀控制器，用于根据预定步骤的配方控制包括控制阀和排气阀的气体输送系统的操作。 在一个实施例中，排气门控制器被配置为以包括开放反馈回路控制的混合反馈模式操作，其中基于气体输送过程的每个步骤的过去学习位置将排气阀设置在预选位置，并且关闭 气体输送过程的每个步骤的系统的反馈回路控制作为开环控制之后的处理室内的压力的函数。

公开(公告)号：WO2011056385A1

公开(公告)日：2011-05-12

申请号：PCT/US2010/052839

申请日：2010-10-15

Applicant: MKS INSTRUMENTS, INC. ,  KRMPOTICH, Robert ,  LUCAS, Paul D. ,  JAROSLAW, Pisera W. ,  CHAMBERLAIN, David B.

Inventor： KRMPOTICH, Robert ,  LUCAS, Paul D. ,  JAROSLAW, Pisera W. ,  CHAMBERLAIN, David B.

IPC: F16K1/22

CPC classification number: F16K1/221 ,  Y10T137/0419 ,  Y10T137/043 ,  Y10T137/0435 ,  Y10T137/4238 ,  Y10T137/6164

Abstract: A butterfly valve comprises: a body (12) including a valve opening (14); and a flapper (16) rotatably mounted about a rotation axis (22) so as to be movable relative to the valve opening. The flapper is rotatable at least 180° about the rotation axis so that the flapper is movable to at least one fully opened position, at least one fully closed position 90° apart from the fully opened position, and a third position, either fully opened or fully closed, 180° from the other like position.. In one embodiment the flapper is rotatable at least 360° about the rotation axis so that the flapper is movable to each of two opened positions 180° apart, and two closed positions 180° apart from each other and 90° and 270° apart from each of the fully opened positions. The valve can be easily calibrated and controlled, and cleaned to extend the useful service life between cleanings.

Abstract translation: 蝶阀包括：主体（12），包括阀开口（14）; 以及围绕旋转轴线（22）可旋转地安装以能够相对于阀开口移动的挡板（16）。 挡板可围绕旋转轴线旋转至少180°，使得挡板可移动到至少一个完全打开的位置，至少一个完全关闭位置与完全打开位置相隔90°，以及第三位置，完全打开或 完全关闭，与另一个相似的位置为180°。在一个实施例中，挡板可围绕旋转轴线旋转至少360°，使得挡板可移动到两个打开位置中的每一个180°，两个闭合位置相互间隔180° 彼此相距并且与每个完全打开位置分开90°和270°。 阀门可以轻松校准和控制，并进行清洁，以延长清洁之间的有用使用寿命。

公开(公告)号：WO2005036034A3

公开(公告)日：2005-04-21

申请号：PCT/US2004/025888

申请日：2004-08-10

Applicant: MKS INSTRUMENTS, INC. ,  LUCAS, Paul, D. ,  CARBONE, Anthony, J.

Inventor： LUCAS, Paul, D. ,  CARBONE, Anthony, J.

IPC: F16K3/00

Abstract: A valve assembly including a housing having a flow channel and an annular surface surrounding the flow channel, a slide plate movable to a closed position, and a seal ring positioned between the annular surface and the slide plate. The seal ring includes a first and second sides, a first surface extending between the first and the second sides and facing towards the annular surface of the housing, and a second surface axially spaced from the first surface and extending between the first and the second sides and facing towards the slide plate. The second surface includes a continuous annular sealing portion for contacting the slide plate when the seal ring is biased against the slide plate so that a fluid-tight seal can be formed between the continuous annular sealing portion and the slide plate, and at least one passageway positioned between the annular sealing portion and the second side.

公开(公告)号：WO2013055882A1

公开(公告)日：2013-04-18

申请号：PCT/US2012/059697

申请日：2012-10-11

Applicant: MKS INSTRUMENTS, INC. ,  BLANKENSHIP, Steven, D. ,  LUCAS, Paul, D.

Inventor： BLANKENSHIP, Steven, D. ,  LUCAS, Paul, D.

IPC: G01L9/00 ,  G01L19/06

CPC classification number: G01N27/227 ,  G01L9/0075 ,  G01L19/0636

Abstract: One or more reactive gases are introduced to a capacitance manometer at a particular area or areas between the inner and outer capacitive electrodes so the error-inducing measurement effects of positive and negative bending is neutralized or minimized. Additionally, a guard structure may be used for the electrode structure of the capacitance manometer. The guard structure presents an area that is relatively insensitive to the diffusion of the gas into the diaphragm and the resulting changing surface tension, curvature and deflection, thus providing increased or optimal stability of the zero reading and pressure reading of the manometer. The guard may also provide electrostatic isolation of the electrodes.

Abstract translation: 将一个或多个反应性气体引入电容式压力计中的内部和外部电容电极之间的特定区域或区域，从而中和或最小化正和负弯曲的误差测量效应。 此外，可以使用保护结构用于电容式压力计的电极结构。 防护结构呈现对气体扩散到隔膜中相对不敏感的区域以及由此产生的变化的表面张力，曲率和偏转，从而提供压力计的零读数和压力读数的增加或最佳的稳定性。 护罩还可以提供电极的静电隔离。

公开(公告)号：WO2005036034A2

公开(公告)日：2005-04-21

申请号：PCT/US2004025888

申请日：2004-08-10

Applicant: MKS INSTR INC ,  LUCAS PAUL D ,  CARBONE ANTHONY J

Inventor： LUCAS PAUL D ,  CARBONE ANTHONY J

IPC: F16K3/06 ,  F16K

CPC classification number: F16K3/06

Abstract: A valve assembly including a housing having a flow channel and an annular surface surrounding the flow channel, a slide plate movable to a closed position, and a seal ring positioned between the annular surface and the slide plate. The seal ring includes a first and second sides, a first surface extending between the first and the second sides and facing towards the annular surface of the housing, and a second surface axially spaced from the first surface and extending between the first and the second sides and facing towards the slide plate. The second surface includes a continuous annular sealing portion for contacting the slide plate when the seal ring is biased against the slide plate so that a fluid-tight seal can be formed between the continuous annular sealing portion and the slide plate, and at least one passageway positioned between the annular sealing portion and the second side.

Abstract translation: 一种阀组件，包括具有流动通道和围绕流动通道的环形表面的壳体，可移动到关闭位置的滑动板以及定位在环形表面和滑动板之间的密封环。 密封环包括第一侧和第二侧，在第一侧和第二侧之间延伸并且面向壳体的环形表面的第一表面以及与第一表面轴向间隔开并且在第一侧和第二侧之间延伸的第二表面 并朝向滑板。 第二表面包括连续的环形密封部分，用于当密封环偏置在滑板上时与滑板接触，从而在连续的环形密封部分和滑板之间形成流体密封，并且至少一个通道 位于环形密封部分和第二侧之间。

公开(公告)号：WO2006091380A1

公开(公告)日：2006-08-31

申请号：PCT/US2006/004448

申请日：2006-02-07

Applicant: MKS INSTRUMENTS, INC. ,  LUCAS, Paul, D. ,  PISERA, Jaroslaw, W.

Inventor： LUCAS, Paul, D. ,  PISERA, Jaroslaw, W.

IPC: F16K3/06 ,  F16K39/04 ,  F16K51/02

CPC classification number: F16K39/045 ,  F16K3/06 ,  F16K51/02 ,  Y10T137/87394

Abstract: A valve assembly including a housing (12) having a flow path (14) extending to an outlet (20) and a valve seat (24) in the flow path and around the outlet, a slide plate (26) located in the housing and movable transversely to a longitudinal axis of the flow path between a closed position, in which the slide plate is in contact with the valve seat and blocks flow through the flow path, and an opened position, in which the slide plate allows flow through the flow path, and wherein at least one of the slide plate and the valve seat includes at least one passageway (76) for providing a predetermined amount of conductance between the slide plate and the valve seat .

Abstract translation: 一种阀组件，包括：壳体（12），其具有延伸到出口（20）的流动路径（14）和在所述流动路径中并围绕所述出口的阀座（24）;位于所述壳体中的滑动板（26） 在所述滑动板与所述阀座接触并且阻挡流过所述流动路径的关闭位置之间横向于所述流动路径的纵向轴线移动，并且所述滑动板允许流过所述流动的打开位置 并且其中所述滑板和所述阀座中的至少一个包括用于在所述滑动板和所述阀座之间提供预定量的电导的至少一个通道（76）。