公开(公告)号：WO2011044473A1

公开(公告)日：2011-04-14

申请号：PCT/US2010/051996

申请日：2010-10-08

Applicant: RUDOLPH TECHNOLOGIES, INC. ,  COLGAN, Michael ,  KOTELYANSKII, Michael, J. ,  MORATH, Christopher, J. ,  MARIS, Humphrey

Inventor： COLGAN, Michael ,  KOTELYANSKII, Michael, J. ,  MORATH, Christopher, J. ,  MARIS, Humphrey

IPC: G01J1/00

CPC classification number: G01N29/2418 ,  B82Y20/00 ,  B82Y35/00 ,  G01N29/041 ,  G01N29/12 ,  G01N2291/0423 ,  G01Q60/22

Abstract: A system for imposing and analyzing surface acoustic waves in a substrate to determine characteristics of the substrate is disclosed. Optical elements and arrangements for imposing and analyzing surface acoustic waves in a substrate are also disclosed. NSOM's, gratings, and nanolight elements may be used to impose surface acoustic waves in a substrate and may also be used to measure transient changes in the substrate due to the passage of surface acoustic waves therethrough.

Abstract translation: 公开了一种用于强化和分析衬底中表面声波以确定衬底特性的系统。 还公开了用于强化和分析衬底中表面声波的光学元件和布置。 NSOM，光栅和Nightight元件可以用于将表面声波施加在衬底中，并且还可以用于测量由于表面声波通过其中的衬底的瞬态变化。

公开(公告)号：WO2006124475A3

公开(公告)日：2006-11-23

申请号：PCT/US2006/018148

申请日：2006-05-10

Applicant: RUDOLPH TECHNOLOGIES, INC. ,  KOTELYANSKII, Michael ,  VERTIKOV, Andrey P. ,  MORATH, Christopher J.

Inventor： KOTELYANSKII, Michael ,  VERTIKOV, Andrey P. ,  MORATH, Christopher J.

IPC: G01N23/20

Abstract: A system comprising a means for generating an optical pump beam pulse (15) and for directing the optical pump beam pulse (15) to a first area of a surface of a sample (27) having a plurality of film layers to generate an acoustic signal, a means for generating an x-ray probe pulse (17) and for directing the x-ray probe pulse (17) to a second area of the surface, a means for detecting (33) an intensity of a diffracted x-ray probe pulse (17') the intensity varying in response to the acoustic signal to form a probe pulse response signal, and a means for calculating (51) an expected transient response to a theoretical acoustic signal propagated through a model of the sample and fitting the probe pulse response to the transient response to derive at least one characteristic of the sample (27).

公开(公告)号：WO2006041493A1

公开(公告)日：2006-04-20

申请号：PCT/US2004/033405

申请日：2004-10-07

Applicant: RUDOLPH TECHNOLOGIES, INC. ,  INTEL CORPORATION ,  LEARY, Sean, P. ,  TAS, Guray ,  MORATH, Christopher, J. ,  KOTELYANSKII, Michael ,  ZHENG, Tong ,  LAZAROV, Guenadiy ,  MILLER, Andre, D. ,  ANTONELLI, George, A. ,  LUDKE, Jamie, L.

Inventor： LEARY, Sean, P. ,  TAS, Guray ,  MORATH, Christopher, J. ,  KOTELYANSKII, Michael ,  ZHENG, Tong ,  LAZAROV, Guenadiy ,  MILLER, Andre, D. ,  ANTONELLI, George, A. ,  LUDKE, Jamie, L.

IPC: G01B9/02

CPC classification number: G01N21/211 ,  G01N21/8422

Abstract: An optical metrology system (50) is provided with a data analysis method to determine the elastic moduli of optically transparent dielectric films (310) such as silicon dioxide, other carbon doped oxides over metal or semiconductor substrates. An index of refraction is measured by an ellipsometer and a wavelength of a laser beam is measured using a laser spectrometer. The angle of refraction is determined by directing a light pulse (325)focused onto a wafer surface, measuring a first set of x 1 , y 1 and z 1 coordinates (330) moving the wafer in the z direction, directing the light pulse (325) onto the wafer surface and measuring a second set of x 2 , y 2 and z 2 coordinates, using the coordinates to calculate an angle of incidence, calculating an angle of refraction from the calculated angle of incidence, obtaining a sound velocity v, from the calculated angle of refraction and using the determined sound velocity v, to calculate a bulk modulus. Hardware calibration and adjustments for the optical metrology system are also provided in order to minimize the variation of the results from tool to tool down to about 0.5 % or below.

Abstract translation: 光学计量系统（50）具有数据分析方法，以确定诸如二氧化硅，金属或半导体衬底上的其它碳掺杂氧化物的光学透明介电膜（310）的弹性模量。 使用椭偏仪测量折射率，使用激光光谱仪测量激光束的波长。 通过将聚焦在晶片表面上的光脉冲（325）引导，测量第一组x

公开(公告)号：WO2006124475A2

公开(公告)日：2006-11-23

申请号：PCT/US2006018148

申请日：2006-05-10

Applicant: RUDOLPH TECHNOLOGIES INC ,  KOTELYANSKII MICHAEL ,  VERTIKOV ANDREY P ,  MORATH CHRISTOPHER J

Inventor： KOTELYANSKII MICHAEL ,  VERTIKOV ANDREY P ,  MORATH CHRISTOPHER J

IPC: G01N23/20

CPC classification number: G01N23/20

Abstract: A system comprising a means for generating an optical pump beam pulse and for directing the optical pump beam pulse to a first area of a surface of a sample having a plurality of film layers to generate an acoustic signal, a means for generating an x-ray probe pulse and for directing the x-ray probe pulse to a second area of the surface, a means for detecting an intensity of a diffracted x-ray probe pulse the intensity varying in response to the acoustic signal to form a probe pulse response signal, and a means for calculating an expected transient response to a theoretical acoustic signal propagated through a model of the sample and fitting the probe pulse response to the transient response to derive at least one characteristic of the sample.

Abstract translation: 一种系统，包括用于产生光泵浦波束脉冲并用于将光泵浦波束脉冲引导到具有多个膜层的样品的表面的第一区域以产生声信号的装置，用于产生X射线 探针脉冲并用于将X射线探针脉冲引导到表面的第二区域;用于检测衍射X射线探针脉冲的强度的装置，该强度响应于声信号而变化，以形成探针脉冲响应信号， 以及用于计算通过样本模型传播的理论声学信号的预期瞬态响应的装置，并将探针脉冲响应拟合到瞬态响应以导出样本的至少一个特性。