PENETRATING PLASMA GENERATING APPARATUS FOR HIGH VACUUM CHAMBERS
    1.
    发明申请
    PENETRATING PLASMA GENERATING APPARATUS FOR HIGH VACUUM CHAMBERS 审中-公开
    高真空室用渗透等离子体发生装置

    公开(公告)号:WO2011024174A1

    公开(公告)日:2011-03-03

    申请号:PCT/IL2010/000707

    申请日:2010-08-29

    Inventor: EINAV, Moshe

    CPC classification number: H01J37/32357

    Abstract: Plasma generating apparatus including a high vacuum processing chamber, a transformer type plasmatron, coupled with the high vacuum processing chamber, and at least one gas source, coupled with the transformer type plasmatron, for introducing at least one gas into the transformer type plasmatron, the high vacuum processing chamber comprising at least one entry port, the transformer type plasmatron including a radio frequency power source, for generating alternating current power, a plurality of conductors, coupled with the radio frequency power source, a closed loop discharge chamber, for confining the gas, a plurality of high permeability magnetic cores, coupled around an outer portion of the closed loop discharge chamber and with the conductors, a plurality of apertures, located along an inner portion of the closed loop discharge chamber, and at least two dielectric gaskets, for coupling the inner portion with the outer portion, wherein the entry port is configured to receive the inner portion such that the inner portion physically penetrates the high vacuum processing chamber, the conductors forming a primary winding around the plurality of high permeability magnetic cores, the gas in the closed loop discharge chamber forming a secondary winding around the plurality of high permeability magnetic cores, wherein the transformer type plasmatron igniting the gas into at least one respective plasma when the conductors are provided with the alternating current power, and the apertures releasing the respective plasma from the inner portion into the high vacuum processing chamber.

    Abstract translation: 等离子体发生装置包括高真空处理室,与高真空处理室耦合的变压器型等离子体发生器,以及与变压器型等离子管耦合的至少一个气体源,用于引入至少一个 气体进入变压器型等离子体发生器,高真空处理室包括至少一个入口,变压器型等离子体发生器包括射频功率源,用于产生交流功率;多个导体,与射频功率源耦合; 闭环放电腔室,用于限制气体;多个高磁导率磁芯,其耦合在所述闭环放电腔室的外部部分和所述导体周围;多个孔,其沿着所述闭环放电腔室的内部部分定位 以及至少两个电介质垫片,用于将内部部分与外部部分联接,其中入口端口被构造成r 接收内部部分,使得内部部分物理地穿透高真空处理室,导体围绕多个高磁导率磁芯形成初级绕组,闭合回路放电室中的气体围绕多个高磁导率形成次级绕组 其中当导体被提供交流电时,变压器型等离子体发生器将气体点燃成至少一个相应的等离子体,并且孔将各个等离子体从内部部分释放到高真空处理室中。

    METHOD FOR SURFACTANT CRYSTAL GROWTH OF A METAL-NONMETAL COMPOUND
    2.
    发明申请
    METHOD FOR SURFACTANT CRYSTAL GROWTH OF A METAL-NONMETAL COMPOUND 审中-公开
    金属非金属化合物的表面结晶生长方法

    公开(公告)号:WO2012120497A1

    公开(公告)日:2012-09-13

    申请号:PCT/IL2012/000103

    申请日:2012-03-04

    Inventor: EINAV, Moshe

    Abstract: Method for crystal growth from a surfactant of a metal-nonmetal (MN) compound, including the procedures of providing a seed crystal, introducing atoms of a first metal to contact with the seed crystal thus forming a thin liquid metal wetting layer on a surface of the seed crystal, setting a temperature of the seed crystal below a minimal temperature required for dissolving MN molecules in the wetting layer and above a melting point of the first metal, each one of the MN molecules being formed from an atom of a second metal and an atom of a first nonmetal, introducing the MN molecules which form an MN surfactant monolayer, thereby facilitating a formation of the wetting layer between the MN surfactant monolayer and the surface of the seed crystal, and regulating a thickness of the wetting layer, thereby growing an epitaxial layer of the MN compound on the seed crystal.

    Abstract translation: 从金属 - 非金属(MN)化合物的表面活性剂生长晶体的方法,包括提供晶种的步骤,引入第一金属的原子与晶种接触,从而在表面上形成薄的液体金属润湿层 晶种,将晶种的温度设定在将MN分子溶解在润湿层中并且高于第一金属的熔点所需的最小温度之下,每个MN分子由第二金属的原子形成, 引入形成MN表面活性剂单层的MN分子,从而促进在MN表面活性剂单层和晶种表面之间形成润湿层,并调节润湿层的厚度,从而生长第一非金属的原子 在晶种上的MN化合物的外延层。

    GAN CRYSTAL SHEET
    3.
    发明申请
    GAN CRYSTAL SHEET 审中-公开
    GAN水晶板

    公开(公告)号:WO2007057892A2

    公开(公告)日:2007-05-24

    申请号:PCT/IL2006/001319

    申请日:2006-11-15

    Inventor: EINAV, Moshe

    CPC classification number: C30B29/406 C30B23/08

    Abstract: A method for forming a gallium nitride crystal sheet. According to the method a metal melt, including gallium, is brought to a vacuum of 0.01 Pa or lower and is heated to a growth temperature of between approximately 860 o C and approximately 870 o C. A nitrogen plasma is applied to the surface of the melt at a sub-atmospheric working pressure, until a gallium nitride crystal sheet is formed on top. Preferably, the growth temperature is of 863 o C, and the working pressure is within the range of 0.05 Pa and 2.5 Pa. According to a preferred embodiment, application of the plasma includes introducing nitrogen gas to the metal melt at the working pressure, igniting the gas into plasma, directing the plasma to the surface of the metal melt, until gallium nitride crystals crystallize thereon, and maintaining the working pressure and the directed plasma until a gallium nitride crystal sheet is formed.

    Abstract translation: 一种形成氮化镓晶片的方法。 根据该方法,使包括镓的金属熔体达到0.01Pa或更低的真空,并加热至大约860℃至大约870℃之间的生长温度, SUP>℃。 在亚大气压工作压力下将氮等离子体施加到熔体的表面,直到在顶部形成氮化镓晶片。 优选地,生长温度为863℃,工作压力在0.05Pa和2.5Pa的范围内。根据优选实施方案,等离子体的应用包括将氮气引入金属 在工作压力下熔化,将气体点燃到等离子体中,将等离子体引导到金属熔体的表面,直到氮化镓晶体在其上结晶,并保持工作压力和定向等离子体直到形成氮化镓晶片。

    PENETRATING PLASMA GENERATING APPARATUS FOR HIGH VACUUM CHAMBERS
    4.
    发明申请
    PENETRATING PLASMA GENERATING APPARATUS FOR HIGH VACUUM CHAMBERS 审中-公开
    用于高真空灭菌器的等离子体发生装置

    公开(公告)号:WO2011024174A9

    公开(公告)日:2011-10-20

    申请号:PCT/IL2010000707

    申请日:2010-08-29

    Inventor: EINAV MOSHE

    CPC classification number: H01J37/32357

    Abstract: Plasma generating apparatus including a high vacuum processing chamber, a transformer type plasmatron, coupled with the high vacuum processing chamber, and at least one gas source, coupled with the transformer type plasmatron, for introducing at least one gas into the transformer type plasmatron, the high vacuum processing chamber comprising at least one entry port, the transformer type plasmatron including a radio frequency power source, for generating alternating current power, a plurality of conductors, coupled with the radio frequency power source, a closed loop discharge chamber, for confining the gas, a plurality of high permeability magnetic cores, coupled around an outer portion of the closed loop discharge chamber and with the conductors, a plurality of apertures, located along an inner portion of the closed loop discharge chamber, and at least two dielectric gaskets, for coupling the inner portion with the outer portion, wherein the entry port is configured to receive the inner portion such that the inner portion physically penetrates the high vacuum processing chamber, the conductors forming a primary winding around the plurality of high permeability magnetic cores, the gas in the closed loop discharge chamber forming a secondary winding around the plurality of high permeability magnetic cores, wherein the transformer type plasmatron igniting the gas into at least one respective plasma when the conductors are provided with the alternating current power, and the apertures releasing the respective plasma from the inner portion into the high vacuum processing chamber.

    Abstract translation: 等离子体发生装置包括高真空处理室,与高真空处理室耦合的变压器型等离子体,以及至少一个与变压器型等离子体激元耦合的气源,用于将至少一种气体引入变压器型等离子体, 高真空处理室,包括至少一个入口,用于产生交流电力的包括射频电源的变压器型等离子体,与射频电源耦合的多个导体,闭环放电室,用于限制 气体,多个高磁导率磁芯,围绕闭环放电室的外部部分和导体耦合,沿着闭环放电室的内部设置的多个孔,以及至少两个电介质垫圈, 用于将所述内部部分与所述外部部分联接,其中所述入口端口被配置为接纳所述客舱 所述内部物理地穿透所述高真空处理室,所述导体在所述多个高磁导率磁芯周围形成初级绕组,所述闭环放电室中的气体围绕所述多个高磁导率磁芯形成次级绕组 其中当所述导体设置有交流电力时,所述变压器型等离子体激发器将所述气体点燃到至少一个相应的等离子体中,并且所述孔将所述等离子体从所述内部部分释放到所述高真空处理室中。

    STATIONARY SOLAR SPECTRUM-SPLITTING SYSTEM AND METHOD FOR STIMULATING A BROAD-BAND PHOTOVOLTAIC CELL ARRAY
    5.
    发明申请
    STATIONARY SOLAR SPECTRUM-SPLITTING SYSTEM AND METHOD FOR STIMULATING A BROAD-BAND PHOTOVOLTAIC CELL ARRAY 审中-公开
    固定式太阳光谱分离系统和用于刺激宽带光伏电池阵列的方法

    公开(公告)号:WO2009122414A3

    公开(公告)日:2010-05-06

    申请号:PCT/IL2009000371

    申请日:2009-04-05

    Inventor: EINAV MOSHE

    Abstract: Solar system for converting solar radiation into electric energy, the system comprising: a refraction array and a converting array, the refracting array including at least one refraction sub array, each of the refraction sub arrays including a plurality of refraction sites, each of the refraction sites refracting variable approach angle collimated solar radiation into a plurality of solar rays, each of the solar rays being of a different waveband, each of the refraction sites directing each of the solar rays, refracted thereby, in a different direction, the different direction being at least dependent on the approach angle of the solar radiation, the converting array including a plurality of broadband converting cells, positioned such that light refracted by the refraction array impinges on the converting array, wherein at any given moment, each of the converting cells receives solar rays of a specific waveband originating from different refraction sites and arriving from different directions thereto.

    Abstract translation: 用于将太阳辐射转换为电能的太阳能系统,该系统包括:折射阵列和转换阵列,折射阵列包括至少一个折射子阵列,每个折射子阵列包括多个折射位置,每个折射 将可变进场角准直太阳辐射折射成多个太阳射线的场地,每个太阳射线具有不同的波段,每个折射位置指向每个太阳射线,从而沿不同的方向折射,不同的方向为 至少取决于太阳辐射的接近角,该转换阵列包括多个宽带转换单元,定位成使得由折射阵列折射的光照射在转换阵列上,其中在任何给定时刻,每个转换单元接收 来自不同折射点的特定波段的太阳光线,并从不同的目录到达 对此。

    STATIONARY SOLAR SPECTRUM-SPLITTING SYSTEM AND METHOD FOR STIMULATING A BROAD-BAND PHOTOVOLTAIC CELL ARRAY
    6.
    发明申请
    STATIONARY SOLAR SPECTRUM-SPLITTING SYSTEM AND METHOD FOR STIMULATING A BROAD-BAND PHOTOVOLTAIC CELL ARRAY 审中-公开
    固定式太阳光谱分离系统和用于刺激宽带光伏电池阵列的方法

    公开(公告)号:WO2009122414A2

    公开(公告)日:2009-10-08

    申请号:PCT/IL2009/000371

    申请日:2009-04-05

    Inventor: EINAV, Moshe

    Abstract: Solar system for converting solar radiation into electric energy, the system comprising: a refraction array and a converting array, the refracting array including at least one refraction sub array, each of the refraction sub arrays including a plurality of refraction sites, each of the refraction sites refracting variable approach angle collimated solar radiation into a plurality of solar rays, each of the solar rays being of a different waveband, each of the refraction sites directing each of the solar rays, refracted thereby, in a different direction, the different direction being at least dependent on the approach angle of the solar radiation, the converting array including a plurality of broadband converting cells, positioned such that light refracted by the refraction array impinges on the converting array, wherein at any given moment, each of the converting cells receives solar rays of a specific waveband originating from different refraction sites and arriving from different directions thereto.

    Abstract translation: 用于将太阳辐射转换为电能的太阳能系统,该系统包括:折射阵列和转换阵列,折射阵列包括至少一个折射子阵列,每个折射子阵列包括多个折射位置,每个折射 将可变进场角准直太阳辐射折射成多个太阳射线的场地,每个太阳射线具有不同的波段,每个折射位置指向每个太阳射线,从而沿不同的方向折射,不同的方向为 至少取决于太阳辐射的接近角,该转换阵列包括多个宽带转换单元,定位成使得由折射阵列折射的光照射在转换阵列上,其中在任何给定时刻,每个转换单元接收 来自不同折射点的特定波段的太阳光线,并从不同的目录到达 对此。

    AMORPHOUS GROUP III-V SEMICONDUCTOR MATERIAL AND PREPARATION THEREOF

    公开(公告)号:WO2009066286A3

    公开(公告)日:2009-05-28

    申请号:PCT/IL2008/001519

    申请日:2008-11-19

    Inventor: EINAV, Moshe

    Abstract: Reactive evaporation method for forming a group III-V amorphous material attached to a substrate, the method including the procedures of subjecting the substrate to an ambient pressure of no greater than 0.01 Pa, and introducing active group-V matter to the surface of the substrate at a working pressure of between 0.05 Pa and 2.5 Pa, and group III metal vapor, until an amorphous group III-V material layer is formed on the surface.

    GAN CRYSTAL SHEET
    9.
    发明申请
    GAN CRYSTAL SHEET 审中-公开
    GAN水晶板

    公开(公告)号:WO2007057892A3

    公开(公告)日:2009-04-09

    申请号:PCT/IL2006001319

    申请日:2006-11-15

    Inventor: EINAV MOSHE

    CPC classification number: C30B29/406 C30B23/08

    Abstract: A method for forming a gallium nitride crystal sheet. According to the method a metal melt, including gallium, is brought to a vacuum of 0.01 Pa or lower and is heated to a growth temperature of between approximately 860oC and approximately 870oC. A nitrogen plasma is applied to the surface of the melt at a sub-atmospheric working pressure, until a gallium nitride crystal sheet is formed on top. Preferably, the growth temperature is of 863oC, and the working pressure is within the range of 0.05 Pa and 2.5 Pa. According to a preferred embodiment, application of the plasma includes introducing nitrogen gas to the metal melt at the working pressure, igniting the gas into plasma, directing the plasma to the surface of the metal melt, until gallium nitride crystals crystallize thereon, and maintaining the working pressure and the directed plasma until a gallium nitride crystal sheet is formed.

    Abstract translation: 一种形成氮化镓晶片的方法。 根据该方法,使含有镓的金属熔体达到0.01Pa或更低的真空,并加热至约860℃至约870℃之间的生长温度。 在亚大气压工作压力下将氮等离子体施加到熔体的表面,直到顶部形成氮化镓晶片。 优选地,生长温度为863℃,工作压力在0.05Pa和2.5Pa的范围内。根据优选实施例,等离子体的应用包括在工作压力下将氮气引入金属熔体中,点燃气体 将等离子体引导到金属熔体的表面,直到氮化镓晶体在其上结晶,并保持工作压力和定向等离子体直到形成氮化镓晶片。

    CRYSTAL GROWTH METHOD AND APPARATUS
    10.
    发明申请
    CRYSTAL GROWTH METHOD AND APPARATUS 审中-公开
    水晶生长方法和装置

    公开(公告)号:WO2005122691A2

    公开(公告)日:2005-12-29

    申请号:PCT/IL2005/000630

    申请日:2005-06-15

    Inventor: EINAV, Moshe

    Abstract: A method for forming a uniformly oriented crystalline sheet, wherein a plurality of crystallites are introduced into a liquid. At least a portion of the crystallites float on the surface of the liquid, and are induced to self orientate until they are uniformly oriented in a compact mosaic configuration, while their sintering is prevented. A uniformly oriented crystalline sheet is formed from the compact mosaic configuration, for example, by sintering the crystallites. An apparatus for forming a crystalline sheet includes a container containing a liquid, wherein a plurality of crystallites are introduced and at least a portion thereof float on the surface of the liquid without sintering. The apparatus also includes a flow unit for inducing a flow of the liquid which moves the floating crystallites, and self-orientation means for allowing self-orientation of the floating crystallites, without sintering, until the floating crystallites are uniformly oriented in a compact mosaic configuration, ready for forming a uniformly oriented crystalline sheet, for example, by sintering the crystallites.

    Abstract translation: 一种形成均匀取向的结晶片的方法,其中多个微晶被引入到液体中。 至少一部分微晶漂浮在液体的表面上,并被诱导自我定向,直到它们均匀地定向成紧凑的镶嵌结构,同时防止其烧结。 由紧凑的镶嵌结构形成均匀取向的结晶片,例如烧结微晶。 用于形成结晶片的装置包括容纳液体的容器,其中引入多个微晶,并且其至少一部分浮在液体的表面上而不烧结。 该装置还包括用于诱导移动浮动微晶的液体流动的流动单元和用于允许漂浮微晶的自取向而不进行烧结的自动取向装置,直到浮动微晶均匀地定向成紧凑的镶嵌结构 ,准备形成均匀取向的结晶片,例如烧结微晶。

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