公开(公告)号：WO2012084045A1

公开(公告)日：2012-06-28

申请号：PCT/EP2010/070644

申请日：2010-12-23

Applicant: REPLISAURUS GROUP SAS ,  MÖLLER, Patrik ,  FREDENBERG, Mikael ,  DAINESE, Matteo ,  CORLEVI, Silvia ,  ARONSSON, Cecilia ,  VAN DEN HOEK, Wilbert ,  CUTHBERTSON, Alan

Inventor： MÖLLER, Patrik ,  FREDENBERG, Mikael ,  DAINESE, Matteo ,  CORLEVI, Silvia ,  ARONSSON, Cecilia ,  VAN DEN HOEK, Wilbert ,  CUTHBERTSON, Alan

IPC: C25D5/02 ,  C25D7/12

CPC classification number: C25D7/12 ,  H05K3/205

Abstract: Master electrodes and a methods for obtaining said master electrodes (100), for forming an electrochemical cell with a substrate, said master electrode comprising a first side (102) for arrangement on the substrate and a second side (104) for connection to a power supply, said master electrode further having at least one cavity (106) on the first side (102) for formation of said electrochemical cell, said cavity (106) having electrically insulating (vertical) side walls (108) and an electrically conductive bottom (110) comprising nickel suicide (112), an electrically conductive surface (114) on the second side (104) for connection to a power supply, said electrically conductive surface (114) being conductively connected to the electrically conductive bottom (110) comprising nickel suicide (112). Layers of Pd (118) and/or Au (116) may then provided in the bottom of the cavities.

Abstract translation: 主电极和用于获得所述主电极（100）的方法，用于形成具有衬底的电化学电池，所述主电极包括用于布置在衬底上的第一侧（102）和用于连接到电力的第二侧（104） 所述主电极还在第一侧（102）上还具有用于形成所述电化学电池的至少一个空腔（106），所述空腔（106）具有电绝缘（垂直）侧壁（108）和导电底部 110），包括镍硅化物（112），在第二侧（104）上的用于连接到电源的导电表面（114），所述导电表面（114）导电连接到包括镍的导电底部 自杀（112）。 然后可以在空腔的底部提供Pd（118）和/或Au（116）的层。

公开(公告)号：WO2012007522A3

公开(公告)日：2012-01-19

申请号：PCT/EP2011/061992

申请日：2011-07-13

Applicant: REPLISAURUS GROUP SAS ,  MÖLLER, Patrik ,  FREDENBERG, Mikael ,  UTTERBÄCK, Tomas ,  SANTOS, Antonio ,  CHAUVET, Jean-Michel ,  ROSÉN, Daniel ,  SVENSSON, Stefan

Inventor： MÖLLER, Patrik ,  FREDENBERG, Mikael ,  UTTERBÄCK, Tomas ,  SANTOS, Antonio ,  CHAUVET, Jean-Michel ,  ROSÉN, Daniel ,  SVENSSON, Stefan

IPC: C25D19/00 ,  H01L21/00 ,  C25D1/20 ,  H01L21/67 ,  C25D5/02 ,  C25D7/12 ,  H01L21/288

Abstract: Methods for separating a master electrode (101, 201) and a substrate (102, 202) in an ECPR process after printing are disclosed. The master electrode (101, 201) or the substrate (102, 202) is arranged on a first chuck (103, 104, 203, 204) and the other one of said master electrode (101, 201) and the substrate (102, 202) is arranged on a second chuck (103, 104, 203, 204. The master electrode (101, 201) and substrate (102, 202) have a planar interaction area during plating.

公开(公告)号：WO2012007526A3

公开(公告)日：2012-01-19

申请号：PCT/EP2011/061996

申请日：2011-07-13

Applicant: REPLISAURUS GROUP SAS ,  MÖLLER, Patrik ,  FREDENBERG, Mikael ,  UTTERBÄCK, Tomas ,  SVENSSON, Stefan ,  SANTOS, Antonio ,  CHAUVET, Jean-Michel ,  ROSÉN, Daniel ,  WIWEN-NILSSON, Peter ,  LINDGREN, Lennart ,  CAVAZZA, Gilbert ,  RAYNAUD, Nicolas

Inventor： MÖLLER, Patrik ,  FREDENBERG, Mikael ,  UTTERBÄCK, Tomas ,  SVENSSON, Stefan ,  SANTOS, Antonio ,  CHAUVET, Jean-Michel ,  ROSÉN, Daniel ,  WIWEN-NILSSON, Peter ,  LINDGREN, Lennart ,  CAVAZZA, Gilbert ,  RAYNAUD, Nicolas

IPC: C25D1/00 ,  C25D7/12 ,  C25D17/06 ,  C25D21/12

Abstract: A device and method for electrochemical pattern replication, ECPR, is provided. The device comprises;a base;a bottom chuck on a X-Y-Theta stage;and a Z-stage with an attached top chuck, said chucks being configured to hold a master electrode or a substrate;a displacement monitor system for measuring displacement of the master electrode relative the substrate, wherein said displacement monitor system comprises a position sensor (22, 28) and a reference frame (21, 29 ), wherein the position sensor measures a distance to the reference frame. The method comprises the steps of measuring x-,y-,and theta values of the master electrode, when the master electrode and the substrate are separated and when the master electrode and the substrate are adjacent calculating a delta value, which is the difference in measured x-,y-,and theta values; comparing the delta value to a reference value;and adjusting the position of the master electrode in relation to the substrate to minimize the delta value. A device for providing electricity to the substrate is also provided. The device comprises a contact module for mounting on the chuck on all sides of the substrate so that electrical contact is possible along the whole perimeter of a substrate.

公开(公告)号：WO2012084048A1

公开(公告)日：2012-06-28

申请号：PCT/EP2010/070647

申请日：2010-12-23

Applicant: REPLISAURUS GROUP SAS ,  DAINESE, Matteo ,  CUTHBERTSON, Alan ,  FREDENBERG, Mikael ,  MÖLLER, Patrik ,  VAN DEN HOEK, Wilbert ,  ARONSSON, Cecilia

Inventor： DAINESE, Matteo ,  CUTHBERTSON, Alan ,  FREDENBERG, Mikael ,  MÖLLER, Patrik ,  VAN DEN HOEK, Wilbert ,  ARONSSON, Cecilia

IPC: C25D5/02 ,  C25D7/12 ,  H01L21/3065 ,  H01L21/288

CPC classification number: C25D7/12 ,  H01L21/2885 ,  H05K3/205

Abstract: A method for providing a topographical pattern on a conducting or semiconducting carrier element of an ECPR master electrode is provided. The method comprises the steps of providing an etch mask on a front side of said carrier element; and etching said front side of said carrier element according to an reactive ion etch sequence, wherein said sequence comprises i) etching a first part of a trench of said carrier element using a predetermined set of constant etch parameters, and ii) etching a second part of said trench using a repeated cycle of a predetermined set of alternating etch parameters.

Abstract translation: 提供了一种在ECPR主电极的导电或半导体载体元件上提供形貌图案的方法。 该方法包括以下步骤：在所述载体元件的正面上提供蚀刻掩模; 并且根据反应离子蚀刻序列蚀刻所述载体元件的所述前侧，其中所述序列包括：i）使用预定的一组恒定蚀刻参数蚀刻所述载体元件的沟槽的第一部分，以及ii）蚀刻第二部分 使用预定的一组交替蚀刻参数的重复循环。

公开(公告)号：WO2012084046A1

公开(公告)日：2012-06-28

申请号：PCT/EP2010/070645

申请日：2010-12-23

Applicant: REPLISAURUS GROUP SAS ,  CUTHBERTSON, Alan ,  MÖLLER, Patrik ,  FREDENBERG, Mikael ,  VAN DEN HOEK, Wilbert

Inventor： CUTHBERTSON, Alan ,  MÖLLER, Patrik ,  FREDENBERG, Mikael ,  VAN DEN HOEK, Wilbert

IPC: C25D5/02 ,  C25D7/12 ,  H01L21/288

CPC classification number: C25D7/12 ,  H01L21/2885 ,  H05K3/205

Abstract: An ECPR master electrode (30, 100, 200) is presented. The master electrode comprises a carrier element (31, 101, 201) having an electrically conducting electrode surface (33, 103, 203) on a back side and a topographical pattern on a front side (32, 102, 202) with an at least partly electrically insulating top, said topographical pattern is forming at least one electrochemical cell (34a-d, 104a-d, 204a-d) comprising a bottom and at least one side wall, said bottom having an electrically conducting surface being conductively connected to the electrically conducting electrode surface (33, 103, 203) on the back side through the carrier element (31, 101, 201), wherein said carrier element (31, 101, 201) further comprises an electrical current suppression or blocking structure (39, 120, 220) between said front side (32, 102, 202) and said back side.

Abstract translation: 提出了一种ECPR主电极（30,100,200）。 主电极包括在背面具有导电电极表面（33,103,203）的载体元件（31,101,201）和在前侧（32,102,202）上的形状图，至少具有至少 所述形貌图形成至少一个包括底部和至少一个侧壁的电化学电池（34a-d，104a-d，204a-d），所述底部具有导电表面，导电表面导电地连接到 通过载体元件（31,101,201）在背侧的导电电极表面（33,103,203），其中所述载体元件（31,101,201）还包括电流抑制或阻挡结构（39， 在所述前侧（32,102,202）和所述后侧之间。

公开(公告)号：WO2012007527A3

公开(公告)日：2012-05-18

申请号：PCT/EP2011061997

申请日：2011-07-13

Applicant: REPLISAURUS GROUP SAS ,  CAVAZZA GILBERT ,  SVENSSON STEFAN ,  UTTERBAECK TOMAS ,  RAYNAUD NICOLAS ,  MOELLER PATRIK ,  DETRY AURELIEN ,  CUNNINGHAM ERIC

Inventor： CAVAZZA GILBERT ,  SVENSSON STEFAN ,  UTTERBAECK TOMAS ,  RAYNAUD NICOLAS ,  MOELLER PATRIK ,  DETRY AURELIEN ,  CUNNINGHAM ERIC

IPC: G05B19/19 ,  G03F7/00

CPC classification number: G05B19/19 ,  B82Y10/00 ,  B82Y40/00 ,  G03F7/0002 ,  G03F7/70816

Abstract: A method and system for setting the spatial situation of a mobile unit is provided. The mobile unit is moving with respect to a movement surface by means of at least one air pad (5, 6) and/or a motorized support structure, and the system (1A, 1B) comprises means (8, 9, 10) for setting an air feeding parameter of at least one such air pad (5, 6) or at least on position parameter for a motorized support structure, when the mobile unit (2) holds a position for which a spatial situation error is detected with respect to a predefined reference spatial situation.

Abstract translation: 提供了一种用于设置移动单元的空间情况的方法和系统。 移动单元借助于至少一个气垫（5,6）和/或电动支撑结构相对于移动表面移动，并且系统（1A，1B）包括用于 当所述移动单元（2）保持相对于所述机动支撑结构检测到空间情况错误的位置时，设置至少一个这样的气垫（5,6）或至少在电动支撑结构的位置参数上的空气供给参数 预定义的参考空间情况。

公开(公告)号：WO2012007524A1

公开(公告)日：2012-01-19

申请号：PCT/EP2011/061994

申请日：2011-07-13

Applicant: REPLISAURUS GROUP SAS ,  MÖLLER, Patrik ,  LINDGREN, Lennart ,  SVENSSON, Stefan ,  CHAUVET, Jean-Michel ,  SANTOS, Antonio ,  FREDENBERG, Mikael

Inventor： MÖLLER, Patrik ,  LINDGREN, Lennart ,  SVENSSON, Stefan ,  CHAUVET, Jean-Michel ,  SANTOS, Antonio ,  FREDENBERG, Mikael

IPC: C25D1/00 ,  C25D7/12 ,  C25D17/06

CPC classification number: C25D7/123 ,  C25D17/001 ,  C25D17/06 ,  C25D17/12 ,  C25D17/14

Abstract: A chuck (100) for holding a substrate or master electrode in an ECPR process is provided. The chuck comprises an interaction surface (101) for holding a master electrode or a substrate; a buffer surface (102) circumferentially of the interaction surface (101). The interaction surface (101) and the buffer surface (102) extend in substantially the same plane. At least one electrolyte injection mouth (103) is arranged in the buffer surface (102) and adjacent the interaction surface (101). A method of operating a filling of an ECPR chamber is also disclosed.

Abstract translation: 提供了用于在ECPR工艺中保持衬底或主电极的卡盘（100）。 卡盘包括用于保持主电极或基板的相互作用表面（101）; 在所述相互作用表面（101）周向的缓冲表面（102）。 相互作用表面（101）和缓冲表面（102）在基本上相同的平面内延伸。 至少一个电解质注入口（103）布置在缓冲表面（102）中并且邻近相互作用表面（101）。 还公开了一种操作ECPR室的填充的方法。

公开(公告)号：WO2012007523A1

公开(公告)日：2012-01-19

申请号：PCT/EP2011/061993

申请日：2011-07-13

Applicant: REPLISAURUS GROUP SAS ,  UTTERBÄCK, Tomas ,  SVENSSON, Stefan ,  LINDGREN, Lennart ,  MÖLLER, Patrik ,  CHAUVET, Jean-Michel ,  SANTOS, Antonio ,  CAVAZZA, Gilbert

Inventor： UTTERBÄCK, Tomas ,  SVENSSON, Stefan ,  LINDGREN, Lennart ,  MÖLLER, Patrik ,  CHAUVET, Jean-Michel ,  SANTOS, Antonio ,  CAVAZZA, Gilbert

IPC: C25D1/00 ,  C25D7/12 ,  C25D17/06 ,  H01L21/687

CPC classification number: H01L21/68735 ,  C25D1/00 ,  C25D7/123 ,  C25D17/06

Abstract: A chuck for holding a substrate or master electrode in an ECPR process is provided. The chuck has a proximal and a distal end, and comprises an interaction surface (205) for holding the substrate or master electrode positioned in a first plane, and holding means for holding the substrate or master electrode to said interaction surface (205). Leveling teeth (210) are arranged laterally and circumferentially of said interaction surface and extending distally of the interaction surface (205). The distal end points of said leveling teeth (210) define a second plane. The second plane is parallel to the first plane and positioned distally of the first plane.

Abstract translation: 提供了用于在ECPR工艺中保持衬底或主电极的卡盘。 卡盘具有近端和远端，并且包括用于保持位于第一平面中的基板或主电极的相互作用表面（205）和用于将基板或主电极保持在所述相互作用表面（205）上的保持装置。 调平齿（210）在所述相互作用表面的横向和周向布置并且相对表面（205）的远端延伸。 所述调平齿（210）的远端限定第二平面。 第二平面平行于第一平面并位于第一平面的远侧。

公开(公告)号：WO2012084047A1

公开(公告)日：2012-06-28

申请号：PCT/EP2010/070646

申请日：2010-12-23

Applicant: REPLISAURUS GROUP SAS ,  CUTHBERTSON, Alan ,  MÖLLER, Patrik ,  FREDENBERG, Mikael ,  DAINESE, Matteo ,  ARONSSON, Cecilia

Inventor： CUTHBERTSON, Alan ,  MÖLLER, Patrik ,  FREDENBERG, Mikael ,  DAINESE, Matteo ,  ARONSSON, Cecilia

IPC: C25D5/02 ,  C25D7/12 ,  C25D17/10 ,  H01L21/288

CPC classification number: C25D7/12 ,  H01L21/2885 ,  H05K3/205

Abstract: An ECPR master electrode(10) and a method for providing such master electrode is provided. The master electrode comprises a carrier element (20) having an electrically conducting electrode surface(23) on a backside (21) and a topographical pattern (30) with an at least partly electrically insulating top (32) on a frontside (22) of said carrier element (20), said topographical pattern (30) is forming at least one electrochemical cell (34) in said carrier element, said electrochemical cell comprising a bottom (36) and at least one side wall (38), said bottom having an electrically conducting surface (40) being conductively connected to the electrically conducting electrode surface (23) on the back side (21) through the carrier element (20), wherein said at least one side wall (38) in said carrier element (20) is at least partly covered by an electrically insulating layer (42).

Abstract translation: 提供ECPR主电极（10）和提供这种主电极的方法。 主电极包括载体元件（20），其在背面（21）上具有导电电极表面（23）和在前侧（22）上具有至少部分电绝缘顶部（32）的形状图案（30） 所述载体元件（20），所述形貌图案（30）在所述载体元件中形成至少一个电化学电池（34），所述电化学电池包括底部（36）和至少一个侧壁（38），所述底部具有 导电表面（40）通过载体元件（20）导电地连接到背侧（21）上的导电电极表面（23），其中所述载体元件（20）中的至少一个侧壁（38） ）至少部分被电绝缘层（42）覆盖。

公开(公告)号：WO2012007520A1

公开(公告)日：2012-01-19

申请号：PCT/EP2011/061990

申请日：2011-07-13

Applicant: REPLISAURUS GROUP SAS ,  MÖLLER, Patrik ,  FREDENBERG, Mikael ,  LINDGREN, Lennart ,  SANTOS, Antonio ,  CHAUVET, Jean-Michel ,  UTTERBÄCK, Tomas ,  ROSÉN, Daniel ,  WIWEN-NILSSON, Peter

Inventor： MÖLLER, Patrik ,  FREDENBERG, Mikael ,  LINDGREN, Lennart ,  SANTOS, Antonio ,  CHAUVET, Jean-Michel ,  UTTERBÄCK, Tomas ,  ROSÉN, Daniel ,  WIWEN-NILSSON, Peter

IPC: C25D1/00 ,  C25D7/12 ,  C25D17/06 ,  H01L21/683 ,  H01L21/67

CPC classification number: H01L21/67092 ,  C25D7/123 ,  C25D17/001 ,  C25D17/005 ,  C25D17/06 ,  C25D17/14 ,  H01L21/6838 ,  H01L21/68735

Abstract: A chuck (100, 200, 500) for holding a master electrode (107, 207) or a substrate (111, 211) during an ECPR process is provided. The chuck comprises an interaction surface (102, 201) onto which the master electrode (107, 207) or the substrate (111, 211) is arranged, and attaching means (105, 205) for clamping said master electrode (107, 207) or said substrate (111, 211) to said interaction surface (102, 201) such that said master electrode (107, 207) or said substrate (111, 211) is conforming to the shape of said interaction surface (102, 201). Further, a method for bringing a master electrode in contact with a substrate in an ECPR process is provided. The method comprises the steps of arranging a master electrode or a substrate on a chuck, arranging a substrate or a master electrode on a second chuck, aligning said master electrode and said substrate such that a front side of said master electrode is at a distance from and facing a front side of said substrate, and bringing the front side of the master electrode into contact with the front side of the substrate by decreasing said distance such that a centre of the master electrode contacts a centre of the substrate, and continuously decreasing said distance while also continuously decreasing said convex shape.

Abstract translation: 提供了一种用于在ECPR处理期间保持主电极（107,207）或基板（111,211）的卡盘（100,200,500）。 所述卡盘包括配置有所述主电极（107,207）或所述基板（111,211）的相互作用面（102,201），以及用于夹持所述主电极（107,207）的连接单元（105,205） 或所述衬底（111,211）到所述相互作用表面（102,201），使得所述主电极（107,207）或所述衬底（111,211）符合所述相互作用表面（102,201）的形状。 此外，提供了在ECPR处理中使主电极与基板接触的方法。 该方法包括以下步骤：将主电极或基板布置在卡盘上，将基板或主电极布置在第二卡盘上，使所述主电极和所述基板对准，使得所述主电极的前侧距离 并且面向所述基板的前侧，并且通过减小所述距离使主电极的前侧与基板的前侧接触，使得主电极的中心接触基板的中心，并且连续地减小所述 距离同时也连续地减小所述凸形。