PATTERN FORMING MATERIAL, PATTERN FORMING APPARATUS, AND PATTERN FORMING PROCESS
    1.
    发明申请
    PATTERN FORMING MATERIAL, PATTERN FORMING APPARATUS, AND PATTERN FORMING PROCESS 审中-公开
    图案形成材料,图案形成装置和图案形成工艺

    公开(公告)号:WO2005109098A1

    公开(公告)日:2005-11-17

    申请号:PCT/JP2005/008818

    申请日:2005-05-09

    Abstract: The objects of the present invention are to provide pattern forming materials capable of effectively suppressing sensitivity drop of photosensitive layers as well as capable of forming highly fine and precise patterns, pattern forming apparatuses equipped with the pattern forming materials, and pattern forming processes utilizing the pattern forming materials. In order to attain the objects, a pattern forming material is provided which comprises a support, and a photosensitive layer on the support, wherein the photosensitive layer comprises a polymerization inhibitor, a binder, a polymerizable compound, and a photopolymerization initiator, the photosensitive layer is exposed by means of a laser beam and developed by means of a developer to form a pattern, and the minimum energy of the laser beam is 0.1 mJ/cm2 to 10 mJ/cm2, which is required to yield substantially the same thickness of photosensitive layer subsequent to the developing as the thickness of the photosensitive layer prior to the exposing.

    Abstract translation: 本发明的目的是提供能够有效抑制感光层的灵敏度下降以及能够形成高精度和精确图案的图案形成材料,配备有图案形成材料的图案形成装置和利用图案的图案形成工艺 成型材料。 为了达到上述目的,提供了一种图案形成材料,其包括载体和载体上的感光层,其中感光层包含聚合抑制剂,粘合剂,可聚合化合物和光聚合引发剂,感光层 通过激光束曝光并通过显影剂显影以形成图案,并且激光束的最小能量为0.1mJ / cm 2至10mJ / cm 2,这是产生基本上相同厚度的感光体所必需的 在显影之前的感光层的厚度在曝光之前。

    PATTERN FORMING PROCESS AND PATTERN
    3.
    发明申请
    PATTERN FORMING PROCESS AND PATTERN 审中-公开
    图案形成过程和图案

    公开(公告)号:WO2005091078A1

    公开(公告)日:2005-09-29

    申请号:PCT/JP2005/005458

    申请日:2005-03-17

    Abstract: The object of the present invention is to provide pattern forming processes that may properly suppress image distortion on pattern forming materials, and may efficiently form highly fine and precise patterns such as wiring patterns. In order to attain the object, a pattern forming process according to the present invention is provided that comprises modulating a laser beam irradiated from a laser source, compensating the modulated laser beam, and exposing a photosensitive layer in a pattern forming material by means of the modulated and compensated laser beam, wherein the pattern forming material comprises a support and the photosensitive layer, the photosensitive layer comprises a polymerization inhibitor, a binder, a polymerizable compound, and a photopolymerization initiator, the modulating is performed by a laser modulator which comprises plural imaging portions each capable of receiving the laser beam and outputting the modulated laser beam, and the compensating is performed by transmitting the modulated laser beam through plural microlenses each having a non-spherical surface.

    Abstract translation: 本发明的目的是提供可以适当地抑制图案形成材料上的图像失真的图案形成处理,并且可以有效地形成诸如布线图案的高精度和精确的图案。 为了实现该目的,提供了根据本发明的图案形成方法,其包括调制从激光源照射的激光束,补偿调制的激光束,以及通过图案形成材料曝光感光层 调制和补偿的激光束,其中图案形成材料包括支撑体和感光层,感光层包括阻聚剂,粘合剂,可聚合化合物和光聚合引发剂,该调制由包括多个 成像部分,每个能够接收激光束并输出调制的激光束,并且通过将调制的激光束透过多个具有非球面的多个微透镜来进行补偿。

    METHOD FOR MANUFACTURING INTERNAL CELL STRUCTURE, INTERNAL CELL STRUCTURE, AND DISPLAY DEVICE
    4.
    发明申请
    METHOD FOR MANUFACTURING INTERNAL CELL STRUCTURE, INTERNAL CELL STRUCTURE, AND DISPLAY DEVICE 审中-公开
    用于制造内部细胞结构,内部细胞结构和显示装置的方法

    公开(公告)号:WO2007007818A1

    公开(公告)日:2007-01-18

    申请号:PCT/JP2006/313917

    申请日:2006-07-06

    Abstract: The present invention provides a method for producing an internal cell structure without using a photo-mask by alleviating variations in resolution and nonuniformity of density of a pattern formed on an exposed surface of a photosensitive layer; a fine internal cell structure produced by the aforesaid method; and a display device using the internal cell structure. The method for producing an internal cell structure includes exposing a photosensitive layer, using an exposure head by designating pixel parts to be used for N multiple exposure, controlling the pixel parts such that only the designated pixel parts are involved in the exposure, and making the exposure head relatively move toward the scanning direction; and developing the exposed photosensitive layer, wherein the exposure head is arranged such that the column-wise direction of the pixel parts has a setting angle of inclination relative to the scanning direction of the exposure head.

    Abstract translation: 本发明提供一种通过减轻在感光层的暴露表面上形成的图案的分辨率和密度不均匀性的变化而不使用光掩模来制造内部单元结构的方法; 通过上述方法制造的精细的内部细胞结构; 以及使用内部单元结构的显示装置。 内部单元结构的制造方法包括通过指定要用于N倍曝光的像素部分,使用曝光头曝光感光层,控制像素部分,使得只有指定的像素部分参与曝光,并且使 曝光头相对于扫描方向移动; 以及显影所述曝光的感光层,其中所述曝光头被布置成使得所述像素部件的列方向具有相对于所述曝光头的扫描方向的倾斜度的设定角度。

    POSITION CORRECTION SYSTEM
    6.
    发明申请
    POSITION CORRECTION SYSTEM 审中-公开
    位置校正系统

    公开(公告)号:WO1991013387A1

    公开(公告)日:1991-09-05

    申请号:PCT/JP1991000146

    申请日:1991-02-06

    Inventor: FANUC LTD

    Abstract: A position correction system in a machine tool having a plurality of machining positions of a work. A position correction quantity corresponding to each machining position is stored in a position correction register (81) of a control block (80). Pre-processing operation means (72) calculates distribution data (X1, Z1) from a machining program (71). A position correction quantity (ΔX1, ΔZ1) is added to the distribution data (X1, Z1) by an adder (82), and a position instruction of a machining head corresponding to a machining position is outputted. Receiving this position instruction, interpolation means (83) executes pulse interpolation and outputs an output pulse. Such a control block (80) is attempted for each machining head (90, 100). In this manner, the error between the work and the machining head can be corrected for all the machining positions and accurate machining can be made.

    NUMERICAL CONTROLLER
    7.
    发明申请
    NUMERICAL CONTROLLER 审中-公开
    数字控制器

    公开(公告)号:WO1989008874A1

    公开(公告)日:1989-09-21

    申请号:PCT/JP1989000223

    申请日:1989-03-02

    Inventor: FANUC LTD

    Abstract: A numerical controller which controls multiple spindles through multiple channels. The numerical controller includes a channel bus (1) having a plurality of slots; a plurality of channels (10, 20, 30) connected to the channel bus (1) to read, decode and execute numerical control instructions of a group of axes; and axis control modules (3, 4) for controlling a plurality of servomotors. These channels (10, 20, 30) share the processing, commonly utilize the external equipment, and constitute a more flexible numerical control system.

    Abstract translation: 数字控制单元通过多个通道提供多个引脚的控制。 数字控制单元包括具有一组位置的通道总线(1) 连接到通道总线(1)的多个通道(10,20,30),用于读取,解码和执行一组轴的数字控制命令; 轴控制模块(3,4),用于控制多个伺服电动机。 这些通道(10,20,30)共享处理,共同使用外部设备,并构成更加灵活的数字控制系统。

    NUMERICAL CONTROLLER
    8.
    发明申请
    NUMERICAL CONTROLLER 审中-公开
    数字控制器

    公开(公告)号:WO1989005005A1

    公开(公告)日:1989-06-01

    申请号:PCT/JP1988001178

    申请日:1988-11-21

    Inventor: FANUC LTD

    Abstract: A numerical controller in which a servo motor is used selectively for position control or speed control. A distribution processing unit (3) forms a position instruction signal based on a part program (1) decoded by a decode processing unit (2). A mode control processing and speed instruction unit (41) or PMC (5) forms a mode signal and a speed instruction signal. A servo control processing unit (71) drives a servo motor (9) based on a mode signal, position instruction signal and speed instruction signal that are input through an axis control processing unit (61).

    Abstract translation: 数字控制器,其中伺服电机有选择地用于定位或速度控制。 分配处理单元(3)基于由解码处理单元(2)解码的零件程序(1)形成位置命令信号。 模式控制和速度指令处理单元(41)或PMC(5)形成模式信号和速度指令信号。 伺服控制单元(71)根据经由模拟信号,位置指令信号和速度指令信号施加的伺服电动机(9) 轴控制处理单元(61)。

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