公开(公告)号：WO2001061400A2

公开(公告)日：2001-08-23

申请号：PCT/US2001/005309

申请日：2001-02-16

Applicant: XROS, INC., NORTEL NETWORKS ,  SLATER, Timothy, G. ,  NEUKERMANS, Armand, P. ,  BAJIKAR, Sateesh, S. ,  DOWNING, James, P. ,  SCHUMAN, Marc, R. ,  CALMES, Sam ,  ROMANSOVSKY, Alexander, B. ,  GREEN, John

Inventor： SLATER, Timothy, G. ,  NEUKERMANS, Armand, P. ,  BAJIKAR, Sateesh, S. ,  DOWNING, James, P. ,  SCHUMAN, Marc, R. ,  CALMES, Sam ,  ROMANSOVSKY, Alexander, B. ,  GREEN, John

IPC: G02B26/00

CPC classification number: G02B26/085 ,  G02B26/0841

Abstract: A micro-mirror strip assembly having a plurality of two-dimensional micro-mirror structures with improved deflection and other characteristics is presented. In the micro-mirror structures, electrodes for electrostatic deflection are disposed on conical or quasi-conical entities that are machined, attached or molded into a substrate. The electrodes are quartered approximately parallel to or offset by 45 degrees from rotational axes to form quadrants. Torsion sensors are provided along the axes of rotation to control deflection of the quadrant deflection electrodes.

Abstract translation: 提出了具有多个具有改进的偏转和其它特性的二维微镜结构的微镜条组件。 在微镜结构中，用于静电偏转的电极设置在被加工，附接或模制成基底的锥形或准圆锥形实体上。 这些电极与旋转轴大致平行或偏移45度，形成象限。 扭转传感器沿旋转轴提供，以控制象限偏转电极的偏转。

公开(公告)号：WO0161400A3

公开(公告)日：2003-07-10

申请号：PCT/US0105309

申请日：2001-02-16

Applicant: XROS INC NORTEL NETWORKS ,  SLATER TIMOTHY G ,  NEUKERMANS ARMAND P ,  BAJIKAR SATEESH S ,  DOWNING JAMES P ,  SCHUMAN MARC R ,  CALMES SAM ,  ROMANSOVSKY ALEXANDER B ,  GREEN JOHN

Inventor： SLATER TIMOTHY G ,  NEUKERMANS ARMAND P ,  BAJIKAR SATEESH S ,  DOWNING JAMES P ,  SCHUMAN MARC R ,  CALMES SAM ,  ROMANSOVSKY ALEXANDER B ,  GREEN JOHN

IPC: G02B26/08 ,  G02B26/02

CPC classification number: G02B26/085 ,  G02B26/0841

Abstract: A micro-mirror strip assembly having a plurality of two-dimensional micro-mirror structures with improved deflection and other characteristics is presented. In the micro-mirror structures, electrodes for electrostatic deflection are disposed on conical or quasi-conical entities that are machined, attached or molded into a substrate. Torsion sensors (244) are provided along the axes of rotation to control deflection of the quadrant deflection electrodes. The shielded sensor structure (240) includes a silicon layer (241), an insulating layer (242) and a metal layer (243). The structure further includes a sensor implant resistor (244) in the silicon layer (241) and a shield (245) that is applied over the sensor implant resistor (244) to stabilise sensor output and eliminate light sensitivity.

Abstract translation: 提出了具有多个具有改进的偏转和其它特性的二维微镜结构的微镜条组件。 在微镜结构中，用于静电偏转的电极设置在被加工，附接或模制成基底的锥形或准圆锥形实体上。 扭转传感器（244）沿旋转轴提供以控制象限偏转电极的偏转。 屏蔽传感器结构（240）包括硅层（241），绝缘层（242）和金属层（243）。 该结构还包括在硅层（241）中的传感器注入电阻器（244）和施加在传感器注入电阻器（244）上方以稳定传感器输出并消除光敏感的屏蔽件（245）。

公开(公告)号：WO0161400A9

公开(公告)日：2002-10-10

申请号：PCT/US0105309

申请日：2001-02-16

Applicant: XROS INC NORTEL NETWORKS ,  SLATER TIMOTHY G ,  NEUKERMANS ARMAND P ,  BAJIKAR SATEESH S ,  DOWNING JAMES P ,  SCHUMAN MARC R ,  CALMES SAM ,  ROMANSOVSKY ALEXANDER B ,  GREEN JOHN

Inventor： SLATER TIMOTHY G ,  NEUKERMANS ARMAND P ,  BAJIKAR SATEESH S ,  DOWNING JAMES P ,  SCHUMAN MARC R ,  CALMES SAM ,  ROMANSOVSKY ALEXANDER B ,  GREEN JOHN

IPC: G02B26/08 ,  G02B26/00

CPC classification number: G02B26/085 ,  G02B26/0841

Abstract: A micro-mirror strip assembly having a plurality of two-dimensional micro-mirror structures with improved deflection and other characteristics is presented. In the micro-mirror structures, electrodes for electrostatic deflection are disposed on conical or quasi-conical entities that are machined, attached or molded into a substrate. The electrodes are quartered approximately parallel to or offset by 45 degrees from rotational axes to form quadrants. Torsion sensors are provided along the axes of rotation to control deflection of the quadrant deflection electrodes.

Abstract translation: 提出了具有多个具有改进的偏转和其它特性的二维微镜结构的微镜条组件。 在微镜结构中，用于静电偏转的电极设置在被加工，附接或模制成基底的锥形或准圆锥形实体上。 这些电极与旋转轴大致平行或偏移45度，形成象限。 扭转传感器沿旋转轴提供，以控制象限偏转电极的偏转。