公开(公告)号：WO2012109304A2

公开(公告)日：2012-08-16

申请号：PCT/US2012024243

申请日：2012-02-08

Applicant: BROOKS AUTOMATION INC ,  SYSSOEV SERGEI ,  BARTLETT ALLEN J ,  CASELLO JOHN J ,  WELLS JEFFREY A ,  EACOBACCI MICAHEL J

Inventor： SYSSOEV SERGEI ,  BARTLETT ALLEN J ,  CASELLO JOHN J ,  WELLS JEFFREY A ,  EACOBACCI MICAHEL J

IPC: F04B37/08

CPC classification number: F04B37/08 ,  B01D8/00 ,  Y10T29/49236

Abstract: A cryopump has a simple-to-manufacture frontal baffle plate with improved gas distribution and has a large-area second-stage array plate to capture Type II gases. The cryopump has a first-stage frontal baffle plate having orifices and flaps bent from and attached to the orifices. The cryopump has a second-stage top plate that is larger in area than cooling baffles of the second stage array.

Abstract translation: 低温泵具有易于制造的具有改进的气体分布的前部挡板和具有用于捕获II型气体的大面积第二级阵列板。 低温泵具有第一级正面挡板，该第一级正面挡板具有从孔口弯曲并连接到孔口的孔口和翼片。 低温泵具有面积大于第二级阵列的冷却挡板的第二级顶板。

公开(公告)号：WO2012109304A3

公开(公告)日：2012-08-16

申请号：PCT/US2012/024243

申请日：2012-02-08

Applicant: BROOKS AUTOMATION, INC. ,  SYSSOEV, Sergei ,  BARTLETT, Allen, J. ,  CASELLO, John, J. ,  WELLS, Jeffrey, A. ,  EACOBACCI, Micahel, J.

Inventor： SYSSOEV, Sergei ,  BARTLETT, Allen, J. ,  CASELLO, John, J. ,  WELLS, Jeffrey, A. ,  EACOBACCI, Micahel, J.

IPC: F04B37/08

Abstract: A cryopump has a simple-to-manufacture frontal baffle plate with improved gas distribution and has a large-area second-stage array plate to capture Type II gases. The cryopump has a first-stage frontal baffle plate having orifices and flaps bent from and attached to the orifices. The cryopump has a second-stage top plate that is larger in area than cooling baffles of the second stage array.

公开(公告)号：WO2012071540A3

公开(公告)日：2012-07-19

申请号：PCT/US2011062098

申请日：2011-11-23

Applicant: BROOKS AUTOMATION INC ,  EACOBACCI MICHAEL J ,  BARTLETT ALLEN J ,  CASELLO JOHN J ,  WELLS JEFFREY A

Inventor： EACOBACCI MICHAEL J ,  BARTLETT ALLEN J ,  CASELLO JOHN J ,  WELLS JEFFREY A

IPC: F04B37/08 ,  F04B37/14

CPC classification number: B01D8/00 ,  F04B37/08 ,  F04B37/14

Abstract: A cryopump system includes a cryopump having a first cooling stage and a second cooling stage connected to the first cooling stage, the second cooling stage including a gas adsorber having a hydrogen adsorbing capacity of at least about 2 standard liters. The thermal storage capacity of the second cooling stage is sufficient to enable control of hydrogen pressure within the cryopump to satisfy ignition safety limits and limits on hydrogen flow rate in an exhaust line to be within limits of an abatement system to be coupled to the cryopump, upon warming of the second cooling stage during regeneration of up to a fully loaded cryopump.

Abstract translation: 一种低温泵系统包括具有第一冷却阶段和连接到第一冷却阶段的第二冷却阶段的低温泵，第二冷却阶段包括具有至少约2标准升的氢气吸附能力的气体吸附器。 第二冷却阶段的热存储容量足以实现低温泵内的氢气压力的控制以满足点火安全限制并且排气管线中的氢气流量限制在与低温泵连接的减排系统的限制内， 在第二冷却阶段升温期间再生至满负荷低温泵。

公开(公告)号：WO2008088794A2

公开(公告)日：2008-07-24

申请号：PCT/US2008/000497

申请日：2008-01-15

Applicant: BROOKS AUTOMATION, INC. ,  BARTLETT, Allen, J. ,  DRISCOLL, Michael, A. ,  EACOBACCI, Michael, J., Jr. ,  JOHNSON, William, L. ,  SULLIVAN, Robert, P. ,  SYSSOEV, Sergei ,  STIRA, Mark, A. ,  CASELLO, John, J.

Inventor： BARTLETT, Allen, J. ,  DRISCOLL, Michael, A. ,  EACOBACCI, Michael, J., Jr. ,  JOHNSON, William, L. ,  SULLIVAN, Robert, P. ,  SYSSOEV, Sergei ,  STIRA, Mark, A. ,  CASELLO, John, J.

CPC classification number: F04B37/08

Abstract: A cryopump includes a refrigerator with at least first and second stages. A radiation shield surrounds the second stage and is in thermal contact with the first stage. The radiation shield includes a drain hole to permit cryogenic fluid to traverse through the drain hole during regeneration. The cryopump also includes a primary pumping surface supporting adsorbent in thermal contact with the second stage. The second stage array assembly includes a primary condensing surface, protected surfaces having adsorbent, and non-primary condensing surfaces. A baffle is disposed over the drain hole. The baffle redirects gas from an annular space disposed between the radiation shield and the vacuum vessel that attempts to traverse through the drain hole to prevent the gas from condensing on a non-primary condensing surface. The baffle directs gas to condense on the primary condensing surface.

Abstract translation: 低温泵包括至少具有第一和第二阶段的冰箱。 辐射屏蔽围绕第二级并与第一级热接触。 辐射屏蔽包括排水孔，以允许低温流体在再生期间穿过排水孔。 低温泵还包括支撑与第二级热接触的吸附剂的初级泵送表面。 第二级阵列组件包括主冷凝表面，具有吸附剂的保护表面和非初级冷凝表面。 挡板设置在排水孔上。 挡板将气体从设置在辐射屏蔽和真空容器之间的环形空间重新引导，试图穿过排水孔，以防止气体在非主冷凝表面上冷凝。 挡板引导气体冷凝在主冷凝表面上。

公开(公告)号：WO2012071540A2

公开(公告)日：2012-05-31

申请号：PCT/US2011/062098

申请日：2011-11-23

Applicant: BROOKS AUTOMATION, INC. ,  EACOBACCI, Michael, J. ,  BARTLETT, Allen, J. ,  CASELLO, John, J. ,  WELLS, Jeffrey, A.

Inventor： EACOBACCI, Michael, J. ,  BARTLETT, Allen, J. ,  CASELLO, John, J. ,  WELLS, Jeffrey, A.

IPC: F04B37/08

CPC classification number: B01D8/00 ,  F04B37/08 ,  F04B37/14

Abstract: A cryopump system includes a cryopump having a first cooling stage and a second cooling stage connected to the first cooling stage, the second cooling stage including a gas adsorber having a hydrogen adsorbing capacity of at least about 2 standard liters. The thermal storage capacity of the second cooling stage is sufficient to enable control of hydrogen pressure within the cryopump to satisfy ignition safety limits and limits on hydrogen flow rate in an exhaust line to be within limits of an abatement system to be coupled to the cryopump, upon warming of the second cooling stage during regeneration of up to a fully loaded cryopump.

Abstract translation: 低温泵系统包括具有第一冷却级的冷冻泵和连接到第一冷却级的第二冷却级，第二冷却级包括具有至少约2标准升的氢吸附能力的气体吸附器。 第二冷却阶段的蓄热能力足以使得能够控制低温泵内的氢气压力，以满足排气管线中的点火安全限制和氢气流量的限制，使之在与低温泵连接的减排系统的限度内， 在再次达到完全负载的低温泵的第二冷却阶段变暖。

公开(公告)号：WO2008088794A3

公开(公告)日：2009-03-26

申请号：PCT/US2008000497

申请日：2008-01-15

Applicant: BROOKS AUTOMATION INC ,  BARTLETT ALLEN J ,  DRISCOLL MICHAEL A ,  EACOBACCI MICHAEL J JR ,  JOHNSON WILLIAM L ,  SULLIVAN ROBERT P ,  SYSSOEV SERGEI ,  STIRA MARK A ,  CASELLO JOHN J

Inventor： BARTLETT ALLEN J ,  DRISCOLL MICHAEL A ,  EACOBACCI MICHAEL J JR ,  JOHNSON WILLIAM L ,  SULLIVAN ROBERT P ,  SYSSOEV SERGEI ,  STIRA MARK A ,  CASELLO JOHN J

IPC: F04B37/08

CPC classification number: F04B37/08

Abstract: A cryopump includes a refrigerator with at least first and second stages. A radiation shield surrounds the second stage and is in thermal contact with the first stage. The radiation shield includes a drain hole to permit cryogenic fluid to traverse through the drain hole during regeneration. The cryopump also includes a primary pumping surface supporting adsorbent in thermal contact with the second stage. The second stage array assembly includes a primary condensing surface, protected surfaces having adsorbent, and non-primary condensing surfaces. A baffle is disposed over the drain hole. The baffle redirects gas from an annular space disposed between the radiation shield and the vacuum vessel that attempts to traverse through the drain hole to prevent the gas from condensing on a non-primary condensing surface. The baffle directs gas to condense on the primary condensing surface.

Abstract translation: 低温泵包括至少具有第一和第二阶段的冰箱。 辐射屏蔽围绕第二级并与第一级热接触。 辐射屏蔽包括排水孔，以允许低温流体在再生期间穿过排水孔。 低温泵还包括支撑与第二级热接触的吸附剂的初级泵送表面。 第二级阵列组件包括主冷凝表面，具有吸附剂的保护表面和非初级冷凝表面。 挡板设置在排水孔的上方。 挡板将气体从设置在辐射屏蔽和真空容器之间的环形空间重新引导，试图穿过排水孔，以防止气体在非主冷凝表面上冷凝。 挡板引导气体冷凝在主冷凝表面上。