STABLE AMORPHOUS MATERIALS SUCH AS SILICON
    1.
    发明申请
    STABLE AMORPHOUS MATERIALS SUCH AS SILICON 审中-公开
    稳定的非晶材料如硅

    公开(公告)号:WO1992022925A1

    公开(公告)日:1992-12-23

    申请号:PCT/US1992005089

    申请日:1992-06-17

    Abstract: An amorphous material such as silicon is doped with a dopant, such as boron, in small amounts effective to reduce light-induced degradation. The dopant preferably is added in the vapor deposition of the amorphous material and results in a concentration of less than about 5x10 atoms/cm in a film. The films may be used in applications such as photovoltaic devices, xerography drums, facsimile elements, thin film transistors, and particle detectors.

    Abstract translation: 诸如硅之类的无定形材料以少量掺杂有掺杂剂,例如硼,以有效降低光致降解。 掺杂剂优选在无定形材料的气相沉积中加入,并导致膜中小于约5×10 18原子/ cm 3的浓度。 这些膜可以用于诸如光伏器件,静电鼓,传真元件,薄膜晶体管和粒子检测器的应用中。

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