公开(公告)号：WO2018144452A1

公开(公告)日：2018-08-09

申请号：PCT/US2018/015945

申请日：2018-01-30

Applicant: APPLIED MATERIALS, INC.

Inventor： PARK, Beom Soo ,  LEE, Dongsuh ,  YANG, Hsiao-Lin ,  CHANG, Fu-Ting ,  AN, Hsiang ,  SU, Tsung-Yao

IPC: C23C16/458 ,  C23C16/505

CPC classification number: H01L21/205 ,  C23C8/36 ,  C23C16/4405 ,  C23C16/455 ,  C23C16/4586 ,  C23C16/505 ,  C23C16/517 ,  H01L21/02131 ,  H01L21/02274 ,  H01L21/68742 ,  H01L21/68757

Abstract: A method and apparatus for equalized plasma coupling is provided herein. Discontinuity marks, also known as golf tee mura, are eliminated or minimized by biasing or grounding lift pins disposed in openings towards the center of a substrate support. To prevent shorting between a biased or grounded lift pin and the substrate support, lift pins are electrically isolated from the substrate support. The electrical isolation of the lift pin includes coating the lift pins with an electrically insulating material or lining a respective substrate support opening with an electrically insulating material.

公开(公告)号：WO2022098486A1

公开(公告)日：2022-05-12

申请号：PCT/US2021/055072

申请日：2021-10-14

Applicant: APPLIED MATERIALS, INC.

Inventor： AN, Hsiang ,  LAM, Andrew C. ,  ZHOU, Jianhua

IPC: C23C16/44 ,  F15D1/02

Abstract: Embodiments described herein provide for a purge system and a method of using the purge system. The methods utilize flowing purge gas using the purge system into a chamber. The purge gas is flowed through a purge gap between an inside surface of a purge ring and a stem. A purge ring facilitates flow of the purge gas into the chamber.

公开(公告)号：WO2020112282A1

公开(公告)日：2020-06-04

申请号：PCT/US2019/057947

申请日：2019-10-24

Applicant: APPLIED MATERIALS, INC.

Inventor： LAU, Allen K. ,  AN, Hsiang ,  ZHAO, Lai ,  ZHOU, Jianhua ,  TINER, Robin L.

IPC: C23C16/455 ,  C23C16/505 ,  C23C16/503 ,  H01L21/67 ,  H01L21/02

Abstract: Embodiments of the present disclosure generally provide apparatus and methods for a gas diffuser assembly for a vacuum chamber, the gas diffuser assembly comprising a mounting plate, the mounting plate comprising a hub, a plurality of curved spokes extending from the hub in a radial direction, a gusset portion coupled between the hub and each of the curved spokes, each of the gusset portions having a convex curve disposed in an axial direction, and one or more mounting holes coupled to the curved spokes.