公开(公告)号：WO2023064062A1

公开(公告)日：2023-04-20

申请号：PCT/US2022/043855

申请日：2022-09-16

Applicant: APPLIED MATERIALS, INC.

Inventor： LEI, Wei-Sheng ,  GOPALAKRISHNAN NAIR, Girish, Kumar ,  ZHAO, Kent, Qiujing ,  STOCK, Daniel ,  STOLLEY, Tobias ,  DEPPISCH, Thomas ,  DELMAS, Jean ,  LEDFORD, Kenneth, S. ,  HERLE, Subramanya, P. ,  VACHHANI, Kiran ,  CHIDAMBARAM, Mahendran ,  TRASSL, Roland ,  MORRISON, Neil ,  SCHNAPPENBERGER, Frank ,  CUNNINGHAM, Kevin, Laughton ,  BANGERT, Stefan ,  CUSHING, James ,  SIVARAMAKRISHNAN, Visweswaren

IPC: H01M10/058 ,  H01M10/052 ,  B23K26/36 ,  B23K26/352

Abstract: Methods and apparatuses for processing lithium batteries with a laser source having a wide process window, high efficiency, and low cost are provided. The laser source is adapted to achieve high average power and a high frequency of picosecond pulses. The laser source can produce a line¬ shaped beam either in a fixed position or in scanning mode. The system can be operated in a dry room or vacuum environment. The system can include a debris removal mechanism, for example, inert gas flow, to the processing site to remove debris produced during the patterning process.

公开(公告)号：WO2021062205A1

公开(公告)日：2021-04-01

申请号：PCT/US2020/052795

申请日：2020-09-25

Applicant: APPLIED MATERIALS, INC.

Inventor： PATEL, Dakshalkumar ,  CHATURVEDI, Girish Kumar ,  UPADHYE, Bahubali S. ,  ACHARYA, Sumedh ,  CHIDAMBARAM, Mahendran ,  BAGUL, Nilesh Chimanrao

IPC: B22F3/105 ,  B23K26/342 ,  B33Y30/00 ,  B33Y40/00

Abstract: An additive manufacturing apparatus includes an environmentally sealed first chamber, a second chamber separated from the first chamber by a first valve, a platform positionable in the first chamber, a dispenser configured to deliver a plurality of successive layers of feed material onto the platform in the first chamber, at least one energy source to selectively fuse feed material in a layer on the platform in the first chamber, and an air knife assembly to direct a laminar flow of air across a layer of feed material on the platform in the first chamber. The air knife assembly includes an inlet module and an exhaust module that are movable through the first valve between the first chamber and the second chamber.

公开(公告)号：WO2022203983A1

公开(公告)日：2022-09-29

申请号：PCT/US2022/021079

申请日：2022-03-21

Applicant: APPLIED MATERIALS, INC.

Inventor： LEI, Wei-Sheng ,  CHIDAMBARAM, Mahendran ,  WANG, Kangkang ,  GODET, Ludovic ,  SIVARAMAKRISHNAN, Visweswaren

IPC: B23K26/364 ,  B23K26/062 ,  B23K26/082 ,  B23K103/00

Abstract: Embodiments of the present disclosure relate to methods for dicing one or more optical devices from a substrate with a laser machining system. The laser machining system utilizes a laser to perform methods for dicing one or more optical devices from a substrate along a dicing path. The methods use one of forming a plurality of laser spots along the dicing path or forming a plurality of trenches along the dicing path.

公开(公告)号：WO2023278115A1

公开(公告)日：2023-01-05

申请号：PCT/US2022/032755

申请日：2022-06-09

Applicant: APPLIED MATERIALS, INC.

Inventor： LEI, Wei-Sheng ,  CHIDAMBARAM, Mahendran ,  WANG, Kangkang ,  GODET, Ludovic ,  SIVARAMAKRISHNAN, Visweswaren

IPC: B23K26/364 ,  B23K26/0622 ,  B23K26/18 ,  B23K103/00 ,  B23K2103/54 ,  B23K26/0624 ,  B23K26/55 ,  C03B33/0222

Abstract: A method and apparatus for substrate dicing are described. The method includes utilizing a laser to dice a substrate along a dicing path to form a perforated line around each device within the substrate. The dicing path is created by exposing the substrate to bursts of laser pulses at different locations around each device. The laser pulses are delivered to the substrate and may have a pulse repetition frequency of greater than about 25 MHz, a pulse width of less than about 15 picoseconds, and a laser wavelength of about 1.0 μm to about 5 μm.

公开(公告)号：WO2021076499A1

公开(公告)日：2021-04-22

申请号：PCT/US2020/055388

申请日：2020-10-13

Applicant: APPLIED MATERIALS, INC.

Inventor： SHMUEL, Erez ,  CHIDAMBARAM, Mahendran

IPC: B22F3/105 ,  B33Y10/00 ,  B33Y30/00

Abstract: A powder bin for an additive manufacturing apparatus has a plurality of walls forming an annular body to surround a build plate. The plurality of walls include an annular outer wall and an annular inner wall that are separated by a cavity, and a gap between a top edge of the inner wall and a top edge of the outer wall is configured to receive powder between the top edges of the outer walls and the inner walls. The annular body has an aperture that extends laterally through the inner wall and outer wall. A base is connected to a bottom edge of the outer wall and a bottom edge of the inner wall, and the base includes one or more ports. A sloped barrier is positioned in the cavity configured to direct powder around the aperture to the one or more ports in the base.

公开(公告)号：WO2019217690A1

公开(公告)日：2019-11-14

申请号：PCT/US2019/031534

申请日：2019-05-09

Applicant: APPLIED MATERIALS, INC.

Inventor： LEI, Wei-Sheng ,  CHIDAMBARAM, Mahendran ,  SIVARAMAKRISHNAN, Visweswaren ,  MAQSOOD, Kashif

IPC: B29C64/264 ,  G02B26/10 ,  B29C64/236 ,  B29C64/205 ,  B29C64/393 ,  B29C64/153 ,  B33Y30/00 ,  B33Y50/02 ,  B33Y10/00

Abstract: An additive manufacturing apparatus includes a platform, a dispenser configured to deliver a plurality of successive layers of feed material onto the platform, at least one light source configured to generate a first light beam and a second light beam, a polygon mirror scanner, an actuator, and a galvo mirror scanner. The polygon mirror scanner is configured to receive the first light beam and reflect the first light beam towards the platform. Rotation of the first polygon mirror causes the light beam to move in a first direction along a path on a layer of feed material on the platform. The actuator is configured to cause the path to move along a second direction at a non-zero angle relative to the first direction. The galvo mirror scanner system is configured to receive the second light beam and reflect the second light beam toward the platform.

公开(公告)号：WO2019217515A1

公开(公告)日：2019-11-14

申请号：PCT/US2019/031258

申请日：2019-05-08

Applicant: APPLIED MATERIALS, INC.

Inventor： CHIDAMBARAM, Mahendran

IPC: B29C64/295 ,  B29C64/209 ,  B29C64/153 ,  B29C64/393 ,  B29C64/25 ,  B33Y30/00 ,  B33Y10/00 ,  B33Y50/02

Abstract: An additive manufacturing apparatus for forming an object includes a platen to support the object being formed, a dispenser to deliver a plurality of layers of a powder to the platen, an inductive heater configured to generate eddy currents in a region of the powder, and an energy source to apply energy to the powder to form a fused portion of the powder.

公开(公告)号：WO2023064060A1

公开(公告)日：2023-04-20

申请号：PCT/US2022/043693

申请日：2022-09-15

Applicant: APPLIED MATERIALS, INC.

Inventor： LEI, Wei-Sheng ,  YAO, Zhengping ,  CHIDAMBARAM, Mahendran ,  WANG, Kangkang ,  LIN, Zhihong John ,  GODET, Ludovic ,  SIVARAMAKRISHNAN, Visweswaren

IPC: B23K26/354 ,  B23K26/0622 ,  G02B6/122 ,  G02B6/12

Abstract: A method and apparatus for dicing optical devices from a substrate are described herein. The method includes the formation of a plurality of trenches using radiation pulses delivered to the substrate. The radiation pulses are delivered in a pattern to form trenches with varying depth as the trenches extend outward from a top surface of the optical device. The varying depth of the trenches provides edges of each of the optical devices which are slanted. The radiation pulses are UV radiation pulses and are delivered in bursts around the silhouette of the optical devices.

公开(公告)号：WO2021183300A1

公开(公告)日：2021-09-16

申请号：PCT/US2021/019715

申请日：2021-02-25

Applicant: APPLIED MATERIALS, INC.

Inventor： CHIDAMBARAM, Mahendran ,  EREZ, Shmuel ,  LEI, Wei-Sheng ,  RUSCONI, John Bernard

IPC: B23K26/38 ,  B23K26/53 ,  B23K26/03 ,  B23K101/40

Abstract: A process of producing optical devices is provided including transferring a first substrate comprising one or more devices to a laser dicing tool, the laser dicing tool including a filamentation stage and a singulation stage. One or more device contours are created on the first substrate in the filamentation stage. The optical devices are singulated from the first substrate along the one or more device contours in the singulation stage. The devices are transferred to storage or for further backend processing.

公开(公告)号：WO2021076495A1

公开(公告)日：2021-04-22

申请号：PCT/US2020/055383

申请日：2020-10-13

Applicant: APPLIED MATERIALS, INC.

Inventor： SHMUEL, Erez ,  CHIDAMBARAM, Mahendran

IPC: B29C64/153 ,  B29C64/255 ,  B29C64/245 ,  B29C64/227 ,  B29C64/205 ,  B29C64/268 ,  B29C64/393 ,  B22F3/105 ,  B33Y30/00 ,  B33Y50/02

Abstract: An additive manufacturing apparatus includes an annular powder bin to surround a build plate, a support structure to hold the build plate in an interior of the powder bin, and a kinematic mount assembly for the support structure. The kinematic mount assembly includes at least three independently vertically kinematic mounts that support the support structure, and one or more actuators to independently control vertical motion of the kinematic mounts to control a tilt angle of the support structure and build plate.