公开(公告)号：WO2022245712A1

公开(公告)日：2022-11-24

申请号：PCT/US2022/029411

申请日：2022-05-16

Applicant: APPLIED MATERIALS, INC.

Inventor： RAMACHANDRAPPA, PrasannaKalleshwara Buddappa ,  KUNDU, Sambhu Nath ,  LIM, Vicente M. ,  SIVARAMAKRISHNAN, Visweswaren ,  HERLE, Subramanya P.

IPC: C23C14/24 ,  C23C14/22 ,  C23C14/14 ,  C23C14/56

Abstract: Methods and systems for the delivery of molten metals and metal alloys at a fixed volume are provided. The system includes an evaporation system having a fluid inlet port and a fluid delivery system. The fluid delivery system includes an ampoule operable to hold a source material. The ampoule includes a fluid outlet port and a gas inlet port. The fluid delivery system further includes a fluid delivery line operable to deliver the source material to the evaporation system. The fluid delivery line includes a first end fluidly coupled with the fluid outlet port and a second end fluidly coupled to the fluid inlet port. The fluid delivery line further includes a first isolation valve disposed along the fluid delivery line and a second isolation valve disposed along the fluid delivery line which define a fixed volume of the fluid delivery line.