公开(公告)号：WO2022245712A1

公开(公告)日：2022-11-24

申请号：PCT/US2022/029411

申请日：2022-05-16

Applicant: APPLIED MATERIALS, INC.

Inventor： RAMACHANDRAPPA, PrasannaKalleshwara Buddappa ,  KUNDU, Sambhu Nath ,  LIM, Vicente M. ,  SIVARAMAKRISHNAN, Visweswaren ,  HERLE, Subramanya P.

IPC: C23C14/24 ,  C23C14/22 ,  C23C14/14 ,  C23C14/56

Abstract: Methods and systems for the delivery of molten metals and metal alloys at a fixed volume are provided. The system includes an evaporation system having a fluid inlet port and a fluid delivery system. The fluid delivery system includes an ampoule operable to hold a source material. The ampoule includes a fluid outlet port and a gas inlet port. The fluid delivery system further includes a fluid delivery line operable to deliver the source material to the evaporation system. The fluid delivery line includes a first end fluidly coupled with the fluid outlet port and a second end fluidly coupled to the fluid inlet port. The fluid delivery line further includes a first isolation valve disposed along the fluid delivery line and a second isolation valve disposed along the fluid delivery line which define a fixed volume of the fluid delivery line.

公开(公告)号：WO2023018600A1

公开(公告)日：2023-02-16

申请号：PCT/US2022/039467

申请日：2022-08-04

Applicant: APPLIED MATERIALS, INC.

Inventor： KUNDU, Sambhu ,  RAMACHANDRAPPA, PrasannaKalleshwara Buddappa ,  LIM, Vicente M. ,  HERLE, Subramanya P. ,  SIVARAMAKRISHNAN, Visweswaren

IPC: C23C14/24 ,  C23C14/56

Abstract: A method and apparatus for thermal evaporation are provided. The thermal evaporator includes a flat crucible design, which provides an increased surface area for evaporation of the material to be deposited relative to conventional designs. The increased surface area for evaporation means that the more vapor of the evaporated material can be produced, which increases pressure inside the evaporator body leading to increased flow of the evaporated material out of the nozzles. The flat crucible can be attached to an evaporator body of the thermal evaporator. The flat crucible can be integrated within the evaporator body. The evaporator body can include a plurality of longitudinal grooves, which increase the surface area of the evaporator body. The thermal evaporator can include a plurality of baffles which divide the thermal evaporator into separate compartments.