公开(公告)号：WO2021123135A1

公开(公告)日：2021-06-24

申请号：PCT/EP2020/086982

申请日：2020-12-18

Applicant: ASML NETHERLANDS B.V.

Inventor： ARABUL, Mustafa, Ümit

IPC: B06B1/06 ,  G01N29/06 ,  G03F7/20 ,  B06B1/067 ,  B06B1/0677 ,  G01N2291/2697 ,  G01N29/043 ,  G01N29/069 ,  G01N29/348 ,  G03F7/70633

Abstract: A transducer element comprising a backing structure and an impedance matching structure. The backing structure comprises a multilayer structure. The impedance matching structure comprises a multilayer structure. A method to fabricate a transducer element comprising forming a backing structure, forming a piezoelectric element and forming an impedance matching structure.

公开(公告)号：WO2022136047A1

公开(公告)日：2022-06-30

申请号：PCT/EP2021/085869

申请日：2021-12-15

Applicant: ASML NETHERLANDS B.V.

Inventor： ARABUL, Mustafa, Ümit ,  ZHOU, Zili ,  COENE, Willem, Marie, Julia, Marcel ,  VERSCHUREN, Coen, Adrianus ,  VAN NEER, Paul, Louis, Maria, Joseph ,  PIRAS, Daniele ,  BLAAK, Sandra ,  KOEK, Wouter, Dick ,  WILLEKERS, Robert, Wilhelm

IPC: G01N29/04 ,  G01N29/22 ,  G01N29/24 ,  G01N29/26 ,  G01N29/28 ,  G01N29/34

Abstract: A metrology apparatus for determining one or more parameters of a structure fabricated in or on a semiconductor substrate. The apparatus comprises a transducer array comprising a plurality of transducers positioned in a plane. The plurality of transducers comprises at least one transmitter transducer for emitting acoustic radiation in a frequency range from 1 GHz to 100 GHz towards the structure, and at least one receiver transducer for receiving acoustic radiation reflected and/or diffracted from the structure.

公开(公告)号：WO2021028174A1

公开(公告)日：2021-02-18

申请号：PCT/EP2020/070683

申请日：2020-07-22

Applicant: ASML NETHERLANDS B.V.

Inventor： ZHOU, Zili ,  ARABUL, Mustafa, Ümit ,  VERSCHUREN, Coen, Adrianus

IPC: G03F9/00 ,  G01N29/24 ,  B82Y35/00 ,  G03F7/20 ,  G01N29/34 ,  G01Q60/38

Abstract: The disclosure relates to determining information about a target structure formed on a substrate using a lithographic process. In one arrangement, a cantilever probe is provided having a cantilever arm and a probe element. The probe element extends from the cantilever arm towards the target structure. Ultrasonic waves are generated in the cantilever probe. The ultrasonic waves propagate through the probe element into the target structure and reflect back from the target structure into the probe element or into a further probe element extending from the cantilever arm. The reflected ultrasonic waves are detected and used to determine information about the target structure.