公开(公告)号：WO2018072943A1

公开(公告)日：2018-04-26

申请号：PCT/EP2017/073509

申请日：2017-09-18

Applicant: ASML NETHERLANDS B.V.

Inventor： JANSSENS, Stef, Marten, Johan ,  CUYPERS, Koen ,  CORTIE, Rogier, Hendrikus, Magdalena ,  SRIVASTAVA, Sudhir ,  RENCKENS, Theodorus, Johannes, Antonius ,  GOSEN, Jeroen, Gerard ,  EUMMELEN, Erik, Henricus, Egidius, Catharina ,  SCHELLENS, Hendrikus, Johannes ,  HEEREN, Adrianus, Marinus, Wouter ,  LENSSEN, Bo

IPC: G03F7/20 ,  F01D17/14 ,  F01D17/16 ,  F02B37/18 ,  G05D7/00 ,  G05D7/01 ,  F16K31/00 ,  H02N2/04

Abstract: A pressure control valve comprising: a passageway (210) having a portion defining an opening (220) for the flow of liquid and/or gas (215) therethrough; an obstructing member (230) displaceable relative to the opening for obstructing the opening by differing amounts thereby to regulate a volumetric flow rate of liquid and/or gas through the opening; a piezo actuator (250); and a linkage mechanism (400) adapted to amplify a magnitude of a dimensional change in the piezo actuator and to use the amplified dimensional change to displace the obstructing member relative to the opening, wherein the linkage mechanism comprises a frame (500) attached to a wall and fixed at a first end (510) in relation to the passageway, a movable portion (508) of the frame moveable in a first direction whilst being substantially restrained in a second direction orthogonal to the first direction, the piezo actuator extending between the wall and the moveable portion such that an expansion of the piezo actuator results in movement of the moveable portion in the first direction by an amount greater than the expansion of the piezo actuator, the moveable portion connected to the obstructing member.

Abstract translation: 压力控制阀，包括：通道（210），其具有限定用于使液体和/或气体（215）流过的开口（220）的部分; 阻塞构件（230），所述阻塞构件（230）相对于所述开口可移位，用于以不同的量阻塞所述开口，从而调节通过所述开口的液体和/或气体的体积流率; 一个压电致动器（250）; 以及连杆机构（400），其适于放大压电致动器中的尺寸变化的大小并且使用放大的尺寸变化来相对于所述开口移动所述阻塞构件，其中所述连杆机构包括框架（500），所述框架 并且相对于所述通道固定在第一端部（510）处，所述框架的可移动部分（508）可沿第一方向移动，同时基本上限制在与所述第一方向正交的第二方向上，所述压电致动器在所述第一方向 壁和可移动部分，使得压电致动器的扩张导致可移动部分在第一方向上的移动量大于压电致动器的扩张量，可移动部分连接到阻隔构件。

公开(公告)号：WO2021004705A1

公开(公告)日：2021-01-14

申请号：PCT/EP2020/065577

申请日：2020-06-05

Applicant: ASML NETHERLANDS B.V.

Inventor： VAN DE KERKHOF, Marcus, Adrianus ,  ACHANTA, Satish ,  MOORS, Johannes, Hubertus, Josephina ,  BANINE, Vadim, Yevgenyevich ,  JANSSENS, Stef, Marten, Johan ,  NIKIPELOV, Andrey

IPC: G03F7/20 ,  G03F1/82 ,  G03F7/16 ,  H01L21/67 ,  H01L21/687

Abstract: A lithographic apparatus comprising: a clamping surface for supporting a substrate, wherein a property of the clamping surface is defined by at least one clamping surface parameter, and wherein the property of the clamping surface has been selected to exhibit low wear; a clamping apparatus for actuating a clamping operation between the clamping surface and the substrate, wherein the clamping operation is defined at least in part by at least one interface characteristic between the clamping surface and the substrate; and a processing station, operable to apply an adjustment to a first property of the substrate to optimize at least one interface characteristic of a particular clamping operation in dependence on the clamping surface parameter and at least one substrate surface parameter which defines a second property of the substrate.

公开(公告)号：WO2018001709A1

公开(公告)日：2018-01-04

申请号：PCT/EP2017/064265

申请日：2017-06-12

Applicant: ASML NETHERLANDS B.V.

Inventor： JANSSENS, Stef, Marten, Johan ,  SCHOLTEN, Bert, Dirk ,  DONDERS, Sjoerd, Nicolaas, Lambertus ,  VAN DAM, Teunis ,  OVERSCHIE, Peter ,  SPAAN-BURKE, Theresa, Mary ,  TROMP, Siegfried, Alexander

IPC: G03F7/20 ,  H01L21/683

Abstract: The present invention relates to a system for positioning, a stage system, a lithographic apparatus, a method for positioning and a method for manufacturing a device in which use is made of a stage system. In accordance with the invention, a plurality of air bearing devices is provided. Each air bearing device comprises: - an air bearing body, which has a free surface, - a primary channel which extends through the air bearing body and has an inlet opening in the free surface, - a secondary channel system which extends through the air bearing body and which has a plurality of discharge openings in the free surface. The flow resistance in the secondary channel system is higher than the flow resistance in the primary channel.

Abstract translation: 本发明涉及用于定位的系统，平台系统，光刻设备，用于定位的方法以及用于制造其中使用平台系统的设备的方法。 根据本发明，提供了多个空气轴承装置。 每个空气轴承装置包括：空气轴承体，其具有自由表面;主要通道，其延伸穿过空气轴承体并且在自由表面中具有入口开口;次要通道系统，其延伸穿过空气轴承 并且在自由表面中具有多个排出口。 次通道系统中的流阻高于主通道中的流阻。