公开(公告)号：WO2020064240A1

公开(公告)日：2020-04-02

申请号：PCT/EP2019/072680

申请日：2019-08-26

Applicant: ASML NETHERLANDS B.V. ,  ASML HOLDING N.V.

Inventor： BLOKS, Ruud, Hendrikus, Martinus, Johannes ,  KUNNEN, Johan, Gertrudis, Cornelis ,  ZAAL, Oxana ,  LYONS, Joseph, Harry ,  SRIVASTAVA, Sudhir

IPC: G03F9/00 ,  G01B13/12 ,  G03F7/20 ,  G01B13/06

Abstract: A level sensor system having a pneumatic sensor, a temperature sensor and a controller. The pneumatic sensor (10) has a reference outlet (100) for forming a reference gap (GR) with a reference surface (R) and a measurement outlet (200) for forming a measurement gap (GM) with a measurement surface, wherein the pneumatic sensor is configured to make a pneumatic sensor measurement indicative of a difference between a flow of gas out of the reference outlet and a flow of gas out of the measurement outlet. The temperature sensor (510a, b) is configured to make a temperature measurement indicative of a temperature of the reference surface and/or a temperature of the measurement surface. The controller (700) is configured to adjust the pneumatic sensor measurement based on the temperature measurement to generate a signal indicative of a difference in height between the reference gap and the measurement gap.

公开(公告)号：WO2018166741A1

公开(公告)日：2018-09-20

申请号：PCT/EP2018/053772

申请日：2018-02-15

Applicant: ASML NETHERLANDS B.V.

Inventor： SRIVASTAVA, Sudhir ,  ROOBOL, Sander, Bas ,  MATHIJSSEN, Simon, Gijsbert, Josephus ,  LIN, Nan ,  DONDERS, Sjoerd, Nicolaas, Lambertus ,  BUSTRAAN, Krijn, Frederik ,  SMORENBURG, Petrus, Wilhelmus ,  BRUSSAARD, Gerrit, Jacobus, Hendrik

IPC: G03F7/20 ,  G03F1/84 ,  G01N21/956 ,  G02F1/35 ,  H01S3/00

Abstract: Disclosed is gas delivery system which is suitable for a high harmonic generation (HHG) radiation source which may be used to generate measurement radiation for an inspection apparatus. In such a radiation source, a gas delivery element delivers gas in a first direction. The gas delivery element has an optical input and an optical input, defining an optical path running in a second direction. The first direction is arranged relative to the second direction at an angle that is not perpendicular or parallel. Also disclosed is a gas delivery element having a gas jet shaping device, or a pair of gas delivery elements, one of which delivers a second gas, such that the gas jet shaping device or second gas is operable to modify a flow profile of the gas such that the number density of the gas falls sharply.

公开(公告)号：WO2018072943A1

公开(公告)日：2018-04-26

申请号：PCT/EP2017/073509

申请日：2017-09-18

Applicant: ASML NETHERLANDS B.V.

Inventor： JANSSENS, Stef, Marten, Johan ,  CUYPERS, Koen ,  CORTIE, Rogier, Hendrikus, Magdalena ,  SRIVASTAVA, Sudhir ,  RENCKENS, Theodorus, Johannes, Antonius ,  GOSEN, Jeroen, Gerard ,  EUMMELEN, Erik, Henricus, Egidius, Catharina ,  SCHELLENS, Hendrikus, Johannes ,  HEEREN, Adrianus, Marinus, Wouter ,  LENSSEN, Bo

IPC: G03F7/20 ,  F01D17/14 ,  F01D17/16 ,  F02B37/18 ,  G05D7/00 ,  G05D7/01 ,  F16K31/00 ,  H02N2/04

Abstract: A pressure control valve comprising: a passageway (210) having a portion defining an opening (220) for the flow of liquid and/or gas (215) therethrough; an obstructing member (230) displaceable relative to the opening for obstructing the opening by differing amounts thereby to regulate a volumetric flow rate of liquid and/or gas through the opening; a piezo actuator (250); and a linkage mechanism (400) adapted to amplify a magnitude of a dimensional change in the piezo actuator and to use the amplified dimensional change to displace the obstructing member relative to the opening, wherein the linkage mechanism comprises a frame (500) attached to a wall and fixed at a first end (510) in relation to the passageway, a movable portion (508) of the frame moveable in a first direction whilst being substantially restrained in a second direction orthogonal to the first direction, the piezo actuator extending between the wall and the moveable portion such that an expansion of the piezo actuator results in movement of the moveable portion in the first direction by an amount greater than the expansion of the piezo actuator, the moveable portion connected to the obstructing member.

Abstract translation: 压力控制阀，包括：通道（210），其具有限定用于使液体和/或气体（215）流过的开口（220）的部分; 阻塞构件（230），所述阻塞构件（230）相对于所述开口可移位，用于以不同的量阻塞所述开口，从而调节通过所述开口的液体和/或气体的体积流率; 一个压电致动器（250）; 以及连杆机构（400），其适于放大压电致动器中的尺寸变化的大小并且使用放大的尺寸变化来相对于所述开口移动所述阻塞构件，其中所述连杆机构包括框架（500），所述框架 并且相对于所述通道固定在第一端部（510）处，所述框架的可移动部分（508）可沿第一方向移动，同时基本上限制在与所述第一方向正交的第二方向上，所述压电致动器在所述第一方向 壁和可移动部分，使得压电致动器的扩张导致可移动部分在第一方向上的移动量大于压电致动器的扩张量，可移动部分连接到阻隔构件。