公开(公告)号：WO0194995A3

公开(公告)日：2003-05-01

申请号：PCT/US0117725

申请日：2001-05-31

Applicant: CALIENT NETWORKS INC

Inventor： KEATING ADRIAN ,  ERWIN BART ,  WELSH DAVID ,  BOWERS JOHN ,  ZHOU PING ,  LEE SEUNG BOK ,  ANDERSON ROBERT ,  HELKEY ROGER

IPC: G02B6/32 ,  G02B6/35 ,  G02B6/36 ,  G02B6/38 ,  G02B26/02

CPC classification number: G02B6/3582 ,  G02B6/32 ,  G02B6/3512 ,  G02B6/3556 ,  G02B6/3636 ,  G02B6/3644 ,  G02B6/3652 ,  G02B6/3672 ,  G02B6/3676 ,  G02B6/3692 ,  G02B6/3834

Abstract: Fiber block (102, 104) construction for optical switches and techniques for making the same are disclosed to achieve high positional accuracy for fiber arrays. High positional accuracy is achieved by using fiber plates (122, 124) with tapered holes, using multiple fiber plates to control both position and angle accuracy of fiber arrays, using tapered fibers for easy insertion of fibers into holes of fiber plates (122, 124), using epoxy to position accurately fiber arrays, using semi-automation to insert accurately fibers (114, 116) into holes of a fiber plate (106, 108), using a custom fiber input block to correct for lens array (106, 108) position errors, and using stackable plates with grooves to position accurately fiber arrays.

Abstract translation: 公开了用于光开关的光纤块（102,104）结构及其制造技术，以实现光纤阵列的高位置精度。 通过使用具有锥形孔的纤维板（122,124），使用多个纤维板来控制纤维阵列的位置和角度精度，使用锥形纤维容易地将纤维插入纤维板（122,124）的孔中来实现高位置精度 ），使用环氧树脂来精确定位光纤阵列，使用半自动化将光纤（114,116）精确地插入光纤板（106,108）的孔中，使用定制光纤输入块来校正透镜阵列（106,108 ）位置误差，并使用具有凹槽的可堆叠板来精确定位光纤阵列。

公开(公告)号：WO0188594A3

公开(公告)日：2003-04-17

申请号：PCT/US0113978

申请日：2001-04-30

Applicant: CALIENT NETWORKS INC

Inventor： MACDONALD NOEL ,  LEE SEUNG BOK

IPC: B81B3/00 ,  G02B26/08 ,  G02B6/35

CPC classification number: B81B3/0086 ,  B81B3/004 ,  B81B2201/033 ,  B81B2201/042 ,  B81B2203/058 ,  G02B26/0841

Abstract: A micro-electro-mechanical-system (MEMS) mirror device includes a mirror component that is capable of moving upon electrostatic actuation. The MEMS mirror device also includes one or more electrostatic actuators providing electrostatic actuation. The electrostatic actuators having plates disposed approximately perpendicular to the mirror component. The plates are disposed to define a gap between the plates that decreases along a direction perpendicular to a surface of the mirror component.

Abstract translation: 微电子机械系统（MEMS）镜装置包括能够在静电致动时移动的反射镜部件。 MEMS反射镜装置还包括提供静电致动的一个或多个静电致动器。 静电致动器具有大致垂直于镜子部件设置的板。 板被设置成限定沿着垂直于镜部件的表面的方向减小的板之间的间隙。

公开(公告)号：WO0157902A3

公开(公告)日：2002-03-14

申请号：PCT/US0103760

申请日：2001-02-05

Applicant: CALIENT NETWORKS INC ,  ADAMS SCOTT ,  DAVIS TIM ,  MILLER SCOTT ,  SHAW KEVIN ,  CHONG JOHN MATTHEW ,  LEE SEUNG BOK

Inventor： ADAMS SCOTT ,  DAVIS TIM ,  MILLER SCOTT ,  SHAW KEVIN ,  CHONG JOHN MATTHEW ,  LEE SEUNG BOK

IPC: H01H59/00 ,  H01H67/22 ,  G02B26/08 ,  B81B3/00

CPC classification number: H02N1/008 ,  H01H67/22 ,  H01H2001/0068

Abstract: A method and apparatus are described that may be used to provide decoupled rotation of structures about different pivot points. The apparatus may include one or more fixed blades mounted to a frame or substrate, one or more movable blades mounted to each structure to be moved, and flexures on which the structures are suspended. Separate movable blades may be provided for each degree of freedom. When voltage is applied between the fixed and movable blades, the electrostatic attraction generates a force attracting movable blades toward blades that are fixed relative to the moveable blades, causing a structure to rotate about the flexures. The angle of rotation that results may be related to the size, number and spacing of the blades, the stiffness of the flexures and the magnitude of the voltage difference applied to the blades. The blades are fabricated using deep silicon etching.

Abstract translation: 描述了可用于提供关于不同枢转点的结构的解耦旋转的方法和装置。 该装置可以包括安装到框架或基板的一个或多个固定刀片，安装到要移动的每个结构的一个或多个可动刀片以及悬挂结构的挠曲件。 可以为每个自由度设置单独的可动叶片。 当在固定刀片和可动刀片之间施加电压时，静电引力产生向可移动刀片固定的刀片吸引可动刀片的力，导致结构围绕弯曲部旋转。 导致的旋转角度可能与叶片的尺寸，数量和间距，弯曲刚度和施加到叶片的电压差的大小有关。 使用深硅蚀刻制造刀片。

公开(公告)号：WO0156919A3

公开(公告)日：2002-03-28

申请号：PCT/US0103357

申请日：2001-02-01

Applicant: CALIENT NETWORKS INC ,  BOWERS JOHN E ,  HELKEY ROGER JONATHAN ,  CORBALIS CHARLES M ,  SINK ROBERT KEHL ,  LEE SEUNG BOK ,  MACDONALD NOEL

Inventor： BOWERS JOHN E ,  HELKEY ROGER JONATHAN ,  CORBALIS CHARLES M ,  SINK ROBERT KEHL ,  LEE SEUNG BOK ,  MACDONALD NOEL

IPC: B81B3/00 ,  G02B26/08

CPC classification number: B81B3/004 ,  B81B2201/042 ,  G02B26/0841

Abstract: A micro-electro-mechanical-system (MEMS) mirror device and methods for fabricating the same allow for a large range of angular motion for a center mirror component. The large range of angular motion for a center mirror component is dictated simply by a thickness of a substrate used or a thickness of a thick film used in making a support structure to support the center mirror component. The MEMS mirror device and methods for fabricating the same allow a large number mirror devices to be fabricated on a substrate. The MEMS mirror device includes a substrate. Electrodes are formed supported by the substrate. A support structure is formed adjacent to the electrodes. A hinge pattern and a mirror pattern having a center mirror component are formed such that the support structure supports the hinge pattern and mirror pattern. The support structure also supports the hinge pattern and mirror pattern such that a bottom surface of the center mirror component in a stationary non-rotating position is capable of exceeding a height of 50 mu m above the electrodes.

Abstract translation: 微机电系统（MEMS）镜装置及其制造方法允许中心镜部件的大范围的角运动。 用于中心镜部件的大范围的角运动简单地由所使用的基板的厚度或用于制造支撑结构以支撑中心镜部件的厚膜的厚度决定。 MEMS镜装置及其制造方法允许在衬底上制造大量镜装置。 MEMS反射镜装置包括基板。 电极由衬底支撑形成。 在电极附近形成支撑结构。 形成具有中心镜部件的铰链图案和反射镜图案，使得支撑结构支撑铰链图案和反射镜图案。 支撑结构还支撑铰链图案和镜面图案，使得在静止非旋转位置的中心镜部件的底面能够超过电极上方50μm的高度。