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    FLAT PANEL DISPLAY AND METHOD INVOLVING COLUMN ELECTRODE
    1.
    发明申请
    FLAT PANEL DISPLAY AND METHOD INVOLVING COLUMN ELECTRODE 审中-公开
    平板显示器和涉及柱电极的方法

    公开(公告)号：WO0051154A8

    公开(公告)日：2000-11-23

    申请号：PCT/US0001940

    申请日：2000-01-26

    Applicant: CANDESCENT TECH CORP

    Inventor： CHAKRAVORTY KISHORE K ,  NADI FARIBORZ ,  SPINDT CHRISTOPHER J ,  HANSEN RONALD L ,  STANNERS COLIN D

    IPC: H01J3/02 ,  H01J9/02 ,  H01J29/02 ,  H01J1/02

    CPC classification number: H01J9/148 ,  H01J3/022 ,  H01J29/02

    Abstract: A structure and method for forming a column electrode for a field emission display device wherein the column electrode (702) is disposed beneath the field emitters and the row electrode. In one embodiment, the present invention comprises depositing a resistor layer (706) over portions of a column electrode (702). Next, an inter-metal dielectric layer (708) is deposited over the column electrode. In the present embodiment, the inter-metal dielectric layer (708) is deposited over portions of the resistor layer (706) and over pad areas (704a, 704b) of the column electrode (702). After the deposition of the inter-metal dielectric layer (708), the column electrode (702) is subjected to an anodization process such that the exposed regions of the column electrode (702) are anodized. In so doing, the present invention provides a column electrode structure (702) which is resistant to column to row electrode shorts and which is protected from subsequent processing steps.

    Abstract translation: 一种用于形成用于场致发射显示装置的列电极的结构和方法，其中列电极（702）设置在场发射极和行电极之下。 在一个实施例中，本发明包括在列电极（702）的部分上沉积电阻层（706）。 接下来，在列电极上沉积金属间介电层（708）。 在本实施例中，金属间介电层（708）沉积在列电极（702）的电阻层（706）和焊盘区域（704a，704b）的部分上。 在沉积金属间介电层（708）之后，对列电极（702）进行阳极氧化处理，使得列电极（702）的暴露区域被阳极氧化。 在这样做时，本发明提供了一种对柱对电极短路有抵抗能力的列电极结构（702），其不受后续处理步骤的保护。

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