公开(公告)号：WO2014149919A1

公开(公告)日：2014-09-25

申请号：PCT/US2014/021516

申请日：2014-03-07

Applicant: CARDINAL CG COMPANY

Inventor： BURROWS, Keith J. ,  GRUBER, Christopher L. ,  HARTIG, Klaus H.W.

IPC: C23C14/34 ,  C23C14/00 ,  C23C14/54 ,  H01J37/34

CPC classification number: H01J37/32449 ,  C23C14/0042 ,  C23C14/54 ,  C23C14/542 ,  C23C14/544 ,  H01J37/3244 ,  H01J37/32972 ,  H01J37/34

Abstract: A gas manifold for delivery gas to a sputtering chamber is provided with ports (116) to accommodate plasma emission monitors to monitor plasma information in the sputtering chamber to provide feedback control. The collimators of the plasma emission monitors is exposed to gas flow and thus coating of the monitor is greatly reduced.

Abstract translation: 用于将气体输送到溅射室的气体歧管设置有端口（116）以容纳等离子体发射监测器以监测溅射室中的等离子体信息以提供反馈控制。 等离子体发射监测器的准直器暴露于气流，因此显着性的涂层大大降低。

公开(公告)号：WO2013009554A2

公开(公告)日：2013-01-17

申请号：PCT/US2012/045494

申请日：2012-07-05

Applicant: CARDINAL CG COMPANY ,  BURROWS, Keith J. ,  PATIL, Harshad P. ,  KRISKO, Annette J.

Inventor： BURROWS, Keith J. ,  PATIL, Harshad P. ,  KRISKO, Annette J.

IPC: H01B5/14

CPC classification number: H01L31/0392 ,  H01L31/03925 ,  Y02E10/50 ,  Y10T428/24975 ,  Y10T428/261

Abstract: A coated substrate useful as a transparent electrode for electrical or optical devices is provided. The coated substrate includes a transparent sodium-containing substrate with a protective layer disposed over the transparent sodium-containing substrate. Characteristically, the protective layer has a thickness of at least 400 angstroms and comprises aluminum oxides and silicon oxides. An electrically conductive layer is disposed over the protective layer. In other variations, devices incorporating such coated substrates are provided.

Abstract translation: 提供了可用作电气或光学装置的透明电极的涂覆基板。 涂覆的基材包括透明的含钠基材，其中保护层设置在透明的含钠基材上。 特征地，保护层具有至少400埃的厚度，并且包括氧化铝和氧化硅。 导电层设置在保护层上。 在其他变型中，提供了包含这种涂覆的基底的装置。