公开(公告)号：WO2016106153A1

公开(公告)日：2016-06-30

申请号：PCT/US2015/066906

申请日：2015-12-18

Applicant: CHIRP MICROSYSTEMS, INC.

Inventor： GUEDES, Andre ,  PRZYBYLA, Richard ,  SHELTON, Stefon ,  KIANG, Meng-Hsiung ,  HORSLEY, David

IPC: B06B1/06 ,  A61B8/00 ,  G01N29/24

CPC classification number: G01N29/2437 ,  B06B1/0651 ,  G01N2291/0427 ,  G10K13/00

Abstract: A piezoelectric micromachined ultrasonic transducer (pMUT) device may include a piezoelectric membrane transducer designed to have lower sensitivity to residual stress and reduced sensitivity to geometric variations arising from the backside etching process used to release the membrane. These designs allow some of its key feature to be adjusted to achieve desired characteristics, such as pressure sensitivity, natural frequency, stress sensitivity, and bandwidth.

Abstract translation: 压电微加工超声波换能器（pMUT）装置可以包括压电膜换能器，其被设计为对残留应力具有较低的灵敏度，并降低由用于释放膜的背面蚀刻工艺引起的对几何变化的敏感性。 这些设计允许调整其一些关键特征，以实现所需的特性，如压力灵敏度，固有频率，应力灵敏度和带宽。

公开(公告)号：WO2017095396A1

公开(公告)日：2017-06-08

申请号：PCT/US2015/063242

申请日：2015-12-01

Applicant: CHIRP MICROSYSTEMS, INC.

Inventor： SHELTON, Stefon ,  GUEDES, Andre ,  HORSLEY, David

IPC: B06B1/06

CPC classification number: G10K9/22 ,  G10K9/122

Abstract: A package design for a micromachined ultrasound transducer (MUT) utilizing curved geometry to control the presence and frequency of acoustic resonant modes is described. The approach consists of reducing in number and curving the reflecting surfaces present in the package cavity to adjust the acoustic resonant frequencies to locations outside the band of interest. The design includes a cavity characterized by a curved geometry and a MUT mounted to a side of a substrate facing the cavity with a sound emitting portion of the MUT facing an opening in the substrate. The substrate is disposed over an opening of the cavity with the substrate oriented such that the MUT located within the cavity.

Abstract translation: 描述了用于利用弯曲几何形状来控制声学谐振模式的存在和频率的微机械超声换能器（MUT）的封装设计。 该方法包括减少数量并弯曲封装腔中存在的反射表面，以将声共振频率调节到感兴趣带外的位置。 该设计包括以弯曲几何形状为特征的腔体和安装到面对腔体的基板的一侧上的MUT，其中MUT的发声部分面向基板中的开口。 衬底布置在空腔的开口上方，衬底被定向为使得位于空腔内的MUT

公开(公告)号：WO2019099013A1

公开(公告)日：2019-05-23

申请号：PCT/US2017/062059

申请日：2017-11-16

Applicant: CHIRP MICROSYSTEMS, INC.

Inventor： GUEDES, Andre ,  GOERICKE, Fabian ,  SHELTON, Stefon ,  COSTELLO, Benedict ,  HORSLEY, David

IPC: B06B1/06 ,  H01L41/08 ,  H01L41/083 ,  H01L41/09

CPC classification number: H01L41/0973 ,  B06B1/0607 ,  H01L41/318 ,  H01L41/332

Abstract: A piezoelectric micromachined ultrasonic transducer (PMUT) device includes a substrate having an opening therethrough and a membrane attached to the substrate over the opening. An actuating structure layer on a surface of the membrane includes a piezoelectric layer sandwiched between the membrane and an upper electrode layer. The actuating structure layer is patterned to selectively remove portions of the actuating structure from portions of the membrane to form a central portion proximate a center of the open cavity and three or more rib portions projecting radially outward from the central portion.

公开(公告)号：WO2015171224A1

公开(公告)日：2015-11-12

申请号：PCT/US2015/024114

申请日：2015-04-02

Applicant: CHIRP MICROSYSTEMS, INC.

Inventor： SHELTON, Stefon ,  GUEDES, Andre ,  PRZYBYLA, Richard ,  KIANG, Meng-Hsiung ,  HORSLEY, David

IPC: H01L41/08 ,  H04R17/00

CPC classification number: H03H9/174 ,  B06B1/0603 ,  H01L41/0926 ,  H01L41/0973 ,  H01L41/187 ,  H01L41/1873 ,  H01L41/1876 ,  H03H9/02244 ,  H03H9/178 ,  H03H2009/155 ,  H04R17/00

Abstract: A transducer includes first and second piezoelectric layers made of corresponding different first and second piezoelectric materials and three or more electrodes, implemented in two or more conductive electrode layers. The first piezoelectric layer is sandwiched between a first pair of electrodes and the second piezoelectric layer is sandwiched between a second pair of electrodes. The first and second pairs of electrodes contain no more than one electrode that is common to both pairs.

Abstract translation: 传感器包括由相应的不同的第一和第二压电材料制成的第一和第二压电层，以及三个或更多个电极，其实施在两个或多个导电电极层中。 第一压电层夹在第一对电极之间，第二压电层夹在第二对电极之间。 第一和第二对电极包含不超过一对两对电极。

公开(公告)号：WO2017218299A1

公开(公告)日：2017-12-21

申请号：PCT/US2017/036613

申请日：2017-06-08

Applicant: CHIRP MICROSYSTEMS, INC.

Inventor： HORSLEY, David ,  GUEDES, Andre ,  SHELTON, Stefon ,  PRZYBYLA, Richard

IPC: G10K9/122 ,  B06B1/06

Abstract: A piezoelectric micromachined ultrasound transducer (PMUT) is disclosed. The device consists of a flexible membrane that is connected to a rigid substrate via flexures. The flexures are defined by slots etched through the perimeter of the membrane. These features release the stress present on the structural layers of the membrane, making it less sensitive to residual stress. The flexures are designed to act as torsion springs so that the membrane's vibration mode shape is highly curved in the piezoelectric actuation area, thereby increasing the electromechanical coupling.

Abstract translation: 公开了压电微机械超声换能器（PMUT）。 该设备由一个柔性膜组成，通过弯曲连接到一个刚性基板。 挠曲部分由蚀刻穿过膜周边的狭缝限定。 这些特征释放了膜结构层上存在的应力，使其对残余应力不太敏感。 挠曲件被设计成用作扭转弹簧，使得膜片的振动模式形状在压电致动区域中高度弯曲，从而增加机电耦合。

公开(公告)号：WO2016106154A1

公开(公告)日：2016-06-30

申请号：PCT/US2015/066910

申请日：2015-12-18

Applicant: CHIRP MICROSYSTEMS, INC.

Inventor： HORSLEY, David ,  GUEDES, Andre ,  KIANG, Meng-Hsiung ,  PRZBYLA, Richard ,  SHELTON, Stefon

IPC: H04S7/00

CPC classification number: G01S15/10 ,  G01S7/523

Abstract: An ultrasonic time of flight range sensor is based on an array of two or more ultrasound transducers that are arranged as an endfire phased array. The acoustic beam profile of the array can be shaped using two degrees of freedom: the distance between the transducers of the array and the electronic delay applied to the transducers' outputs. This allows the array to have a more directional response, so that objects in a desired direction can be detected while objects in other directions are ignored. Differential measurements are used to reduce or cancel the ring-down signal that follows transmission. This ring-down cancellation is important in micromachined ultrasonic transducers that typically have narrow bandwidth and therefore poor pulse response. The differential endfire array can be used for ultrasonic rangefinding and object detection in consumer electronics devices such as smart phones, tablets, personal computers, monitors, and display devices.

Abstract translation: 飞行距离传感器的超声时间基于被布置为端火相控阵列的两个或更多个超声换能器的阵列。 可以使用两个自由度来形成阵列的声束轮廓：阵列的换能器之间的距离和施加到换能器输出的电子延迟。 这允许阵列具有更多的定向响应，使得可以检测到在其他方向上的对象被忽略的期望方向上的对象。 差分测量用于减少或取消传输后的减振信号。 这种减振取消对于通常具有窄带宽并因此差的脉冲响应的微机械超声波换能器是重要的。 差分端火阵列可用于诸如智能电话，平板电脑，个人计算机，监视器和显示设备的消费电子设备中的超声波测距和物体检测。