公开(公告)号：WO2014176378A3

公开(公告)日：2015-10-29

申请号：PCT/US2014035206

申请日：2014-04-23

Applicant: DIAMON FUSION INTERNATIONAL INC

Inventor： SLAYBAUGH RUSSELL C ,  METCALFE MICHAEL STEPHEN ,  ZAX ADAM ,  SETA GUILLERMO

IPC: C23C16/448

CPC classification number: C23C16/4485 ,  C23C16/44 ,  C23C16/4408 ,  C23C16/4481 ,  C23C16/45519 ,  C23C16/52 ,  C23C16/54

Abstract: A closed chemical introduction system used to deliver active ingredients in liquid chemical to a chemical vapor deposition system includes a robust, moisture-free cartridge containing a defined dose of liquid chemical. The cartridge is placed on a mounting slot specially configured to receive the cartridge. Upon initiating the system, a first linear mechanical actuator securely holds the cartridge in the slot, while an extraction lance attached to a second linear mechanical actuator punctures the cartridge from the bottom, extracts the liquid chemical and delivers it to a vaporization chamber. The vaporization chamber evaporates the liquid chemical and delivers the vapors containing the active ingredients to the chemical vapor deposition system. The chemical vapor deposition system may include a treatment chamber, a conveyor, a compressed clean air system to provide separate treatment compartments within the chamber, a moisture system, a chemical vapor system, and a neutralization system to neutralize harmful byproducts.

Abstract translation: 用于将液体化学物质中的活性成分输送到化学气相沉积系统的封闭的化学物质引入系统包括含有限定剂量的液体化学物质的坚固，无湿气的药筒。 墨盒被放置在专门配置为接收墨盒的安装槽上。 在启动系统时，第一线性机械致动器将卡盒牢固地保持在狭槽中，而附接到第二线性机械致动器的提取枪从底部刺穿墨盒，提取液体化学品并将其输送到蒸发室。 蒸发室蒸发液体化学品并将含有活性成分的蒸气输送到化学气相沉积系统。 化学气相沉积系统可以包括处理室，输送机，压缩清洁空气系统，以在室内提供分离的处理隔室，湿度系统，化学气相系统和中和系统以中和有害副产物。