公开(公告)号：WO2004059704A1

公开(公告)日：2004-07-15

申请号：PCT/US2002/041318

申请日：2002-12-26

Applicant: KIONIX INC. ,  ADAMS, Scott, G. ,  MILLER, Scott, A.

Inventor： MILLER, Scott, A.

IPC: H01L21/00

CPC classification number: H01L21/76229 ,  B81B3/0086 ,  B81B2203/033 ,  B81C1/00126 ,  B81C2201/0178 ,  H01L21/31612 ,  H01L21/31662 ,  H01L21/76208

Abstract: A method of manufacturing an insulating micro-structure (100) by etching a plurality of trenches in a silicon substrate (101) and filling said trenches with insulating materials (105, 107). The trenches are etched and then oxidized until completely or almost completely filled with silicon dioxide. Additional insulating material is then deposited as necessary to fill any remaining trenches, thus forming the structure. When the top of the structure is metallized, the insulating structure increases voltage resistance and reduces the capacitive coupling between the metal (109) and the silicon substrate. Part of the silicon substrate underlying the structure is optionally removed further to reduce the capacitive coupling effect. Hybrid silicon-insulator structures can be formed to gain the effect of the benefits of the structure in three-dimensional configurations, and to permit metallization of more than one side of the structure.

Abstract translation: 一种通过蚀刻硅衬底（101）中的多个沟槽并用绝缘材料（105,107）填充所述沟槽来制造绝缘微结构（100）的方法。 蚀刻沟槽，然后氧化直到完全或几乎完全充满二氧化硅。 然后根据需要沉积额外的绝缘材料以填充任何剩余的沟槽，从而形成结构。 当结构的顶部被金属化时，绝缘结构增加了电阻并降低了金属（109）和硅衬底之间的电容耦合。 可选地，进一步去除结构底层的硅衬底的一部分以降低电容耦合效应。 可以形成混合硅 - 绝缘体结构以获得三维结构中结构的益处的效果，并且允许结构多于一侧的金属化。

公开(公告)号：WO2008121739A1

公开(公告)日：2008-10-09

申请号：PCT/US2008/058522

申请日：2008-03-27

Applicant: KIONIX, INC. ,  KIM, Dong Yoon ,  MILLER, Scott, A.

Inventor： KIM, Dong Yoon ,  MILLER, Scott, A.

IPC: G01P15/18

CPC classification number: G01P15/0891 ,  G11B19/043

Abstract: A system (10) and method detect freefall associated with an object that is spinning or tumbling as it falls. Two tri-axis accelerometers (14, 16) provide inputs to an algorithm (28) that detects the freefall of a spinning object that would not otherwise be detected by a conventional freefall detection system, due to the centrifugal and centripetal forces being placed on the falling object as it spins. The system can be used to detect the freefall of portable devices with onboard memory or hard disk drives, allowing the devices to have time to park the read/write head and reduce the potential of losing data that can be damaged by impact. This freefall detection system may be applied to such portable devices as notebook computers, PDAs, MP3 players, digital cameras, mobile phones and even automobiles.

Abstract translation: 一种系统（10）和方法，用于检测与下降时正在旋转或翻滚的对象相关联的自由落体。 两个三轴加速度计（14,16）为算法（28）提供输入，该算法（28）检测纺丝物体的自由落体，由于离心力和向心力被放置在 坠落的物体，因为它旋转。 该系统可用于检测具有板载内存或硬盘驱动器的便携式设备的自由落体，从而允许设备有时间停放读/写头，并减少丢失可能受到影响而损坏的数据的可能性。 这种自由落体检测系统可以应用于诸如笔记本电脑，PDA，MP3播放器，数码相机，移动电话甚至汽车的便携式设备。

公开(公告)号：WO2004059678A1

公开(公告)日：2004-07-15

申请号：PCT/US2002/041482

申请日：2002-12-26

Applicant: KIONIX, INC.

Inventor： ADAMS, Scott, G. ,  MILLER, Scott, A.

IPC: H01H51/22

CPC classification number: H01L21/76208 ,  H01H59/0009

Abstract: A relay (10) for switching an electrical signal includes switching elements(14, 18), an actuator (12) for closing the switch (18), and an actuator for opening the switch (12), the latter two of which are mechanically decoupled when the relay (10) is in a mechanical rest position. When a relay close signal is applied, the closing actuator (18) electrostatically drives the switching elements (14, 18) to complete a signal path between two terminals for the switched signal (22,24). In the process of closing the switch, the opening actuator (12) remains stationary, i.e., no mass is displaced. Application of a switch open signal electrostatically drives the opening actuator, optionally in combination with a mechanical restoring force on the closing actuator (18) to open the switch (18) to break the signal conduction path for the switched signal.

Abstract translation: 用于切换电信号的继电器（10）包括开关元件（14,18），用于闭合开关（18）的致动器（12）和用于打开开关（12）的致动器，后者两个机械地 当继电器（10）处于机械停止位置时，它被解耦。 当施加继电器闭合信号时，关闭致动器（18）静电驱动开关元件（14,18），以完成用于开关信号（22,24）的两个端子之间的信号路径。 在关闭开关的过程中，打开致动器（12）保持静止，即没有质量位移。 开关开启信号的应用静电地驱动开启致动器，可选地与闭合致动器（18）上的机械恢复力组合以打开开关（18），以断开开关信号的信号传导路径。

公开(公告)号：WO2003036305A2

公开(公告)日：2003-05-01

申请号：PCT/US2002/032993

申请日：2002-10-16

Applicant: KIONIX, INC.

Inventor： ADAMS, Scott, G. ,  MILLER, Scott, A. ,  JOHNSON, Wendy, Jo, H.

IPC: G01P

CPC classification number: G01P15/0802 ,  G01P15/125 ,  G01P2015/0814 ,  G01P2015/0828

Abstract: An accelerometer. A silicon wafer is etched to form a fixed portion, a movable portion, and a resilient coupling between, the fixed and movable portions generally arranged in the plane of the wafer, the mass of the movable portion being concentrated on one side of the resilient coupling. One of the fixed and moveable portions of the silicon structure includes a first electrode. The other of the fixed and moveable portions includes a second electrode oriented parallel to the axis of acceleration, and an electrically-conductive layer electrically connected as a third electrode coplanar and mechanically coupled with the second electrode. The second and third electrodes are arranged in capacitive opposition to the first electrode, the capacitance between the first electrode and third electrode increasing as the movable portion moves in a direction along the axis of acceleration relative to the fixed portion and decreasing as the movable portion moves in an opposite direction. A resilient coupling retains the first and third electrodes in capacitive opposition to each other across a capacitance gap while allowing motion of the first electrode relative to the second and third electrodes in response to acceleration along an axis of acceleration perpendicular to the plane of the wafer, and resiliently restores the first electrode to an equilibrium position when the acceleration ceases. The second electrode is in opposition to a majority of the surface area of the first electrode when the electrodes are in the equilibrium position. Capacitance between the first and third electrodes is measured to obtain a measurement of acceleration along the axis.

Abstract translation: 加速度计 蚀刻硅晶片以形成通常布置在晶片平面中的固定部分和可移动部分之间的弹性联接，可移动部分的质量集中在弹性联轴器的一侧上 。 硅结构的固定和可移动部分之一包括第一电极。 固定和可移动部分中的另一个包括平行于加速轴定向的第二电极，和作为共面的第三电极电连接并与第二电极机械耦合的导电层。 第二电极和第三电极与第一电极电容地相对配置，第一电极和第三电极之间的电容随着可移动部分沿着加速轴相对于固定部分的方向移动而增加，并且随着可移动部分移动 在相反的方向。 弹性联接器保持第一和第三电极跨过电容间隙彼此电容地相对，同时响应于沿垂直于晶片平面的加速轴的加速度，允许第一电极相对于第二和第三电极的运动， 并且当加速停止时，将第一电极弹性恢复到平衡位置。 当电极处于平衡位置时，第二电极与第一电极的大部分表面区域相对。 测量第一和第三电极之间的电容以获得沿轴的加速度的测量。