公开(公告)号：WO2016033349A1

公开(公告)日：2016-03-03

申请号：PCT/US2015/047238

申请日：2015-08-27

Applicant: KIONIX, INC. ,  ADAMS, Scott, G. ,  BLACKMER, Charles, W. ,  LYNCH, Kristin, J.

Inventor： ADAMS, Scott, G. ,  BLACKMER, Charles, W. ,  LYNCH, Kristin, J.

IPC: G01L9/00

CPC classification number: G01L9/003 ,  B81B3/0072 ,  B81B2201/0264 ,  B81C1/00 ,  B81C1/00666 ,  B81C2201/0167 ,  G01L9/0027 ,  G01L9/0055 ,  G01L9/0073 ,  G01L9/008 ,  G01L9/0082 ,  G01L13/00 ,  G01L13/02 ,  G01P15/006 ,  G01P15/08 ,  H01L21/00

Abstract: Techniques are described herein that perform pressure sensing using pressure sensor(s) that include deformable pressure vessel(s). A pressure vessel is an object that has a cross section that defines a void. A deformable pressure vessel is a pressure vessel that has at least one curved portion that is configured to structurally deform (e.g., bend, shear, elongate, etc.) based on a pressure difference between a cavity pressure in a cavity in which at least a portion of the pressure vessel is suspended and a vessel pressure in the pressure vessel.

Abstract translation: 本文描述了使用包括可变形压力容器的压力传感器进行压力感测的技术。 压力容器是具有限定空隙的横截面的物体。 可变形的压力容器是具有至少一个弯曲部分的压力容器，该弯曲部分构造成基于空腔中的腔体压力之间的压力差在结构上变形（例如弯曲，剪切，细长等），其中至少一个 压力容器的一部分被悬浮并且在压力容器中存在容器压力。

公开(公告)号：WO2008121739A8

公开(公告)日：2010-02-18

申请号：PCT/US2008058522

申请日：2008-03-27

Applicant: KIONIX INC ,  KIM DONG YOON ,  MILLER SCOTT A

Inventor： KIM DONG YOON ,  MILLER SCOTT A

IPC: G01P15/18

CPC classification number: G01P15/0891 ,  G11B19/043

Abstract: A system (10) and method detect freefall associated with an object that is spinning or tumbling as it falls. Two tri-axis accelerometers (14, 16) provide inputs to an algorithm (28) that detects the freefall of a spinning object that would not otherwise be detected by a conventional freefall detection system, due to the centrifugal and centripetal forces being placed on the falling object as it spins. The system can be used to detect the freefall of portable devices with onboard memory or hard disk drives, allowing the devices to have time to park the read/write head and reduce the potential of losing data that can be damaged by impact. This freefall detection system may be applied to such portable devices as notebook computers, PDAs, MP3 players, digital cameras, mobile phones and even automobiles.

Abstract translation: 一种系统（10）和方法，用于检测与下降时正在旋转或翻滚的对象相关联的自由落体。 两个三轴加速度计（14,16）为算法（28）提供输入，该算法（28）检测纺丝物体的自由落体，由于离心力和向心力被放置在 坠落的物体，因为它旋转。 该系统可用于检测具有板载内存或硬盘驱动器的便携式设备的自由落体，从而允许设备有时间停放读/写头，并减少丢失可能受到影响而损坏的数据的可能性。 这种自由落体检测系统可以应用于诸如笔记本电脑，PDA，MP3播放器，数码相机，移动电话甚至汽车的便携式设备。

公开(公告)号：WO2007064404A3

公开(公告)日：2007-06-07

申请号：PCT/US2006/039135

申请日：2006-10-03

Applicant: KIONIX, INC. ,  YOUNG, Lincoln ,  ZHOU, Peng

Inventor： YOUNG, Lincoln ,  ZHOU, Peng

IPC: B01L3/00 ,  F04B43/04 ,  B32B27/00 ,  F04B53/10

Abstract: Plastic microfluidic structures having a substantially rigid diaphragm that actuates between a relaxed state wherein the diaphragm sits against the surface of a substrate and an actuated state wherein the diaphragm is moved away from the substrate. As will be seen from the following description, the microfluidic structures formed with this diaphragm provide easy to manufacture and robust systems, as well readily made components such as valves and pumps.

公开(公告)号：WO2004059704A1

公开(公告)日：2004-07-15

申请号：PCT/US2002/041318

申请日：2002-12-26

Applicant: KIONIX INC. ,  ADAMS, Scott, G. ,  MILLER, Scott, A.

Inventor： MILLER, Scott, A.

IPC: H01L21/00

CPC classification number: H01L21/76229 ,  B81B3/0086 ,  B81B2203/033 ,  B81C1/00126 ,  B81C2201/0178 ,  H01L21/31612 ,  H01L21/31662 ,  H01L21/76208

Abstract: A method of manufacturing an insulating micro-structure (100) by etching a plurality of trenches in a silicon substrate (101) and filling said trenches with insulating materials (105, 107). The trenches are etched and then oxidized until completely or almost completely filled with silicon dioxide. Additional insulating material is then deposited as necessary to fill any remaining trenches, thus forming the structure. When the top of the structure is metallized, the insulating structure increases voltage resistance and reduces the capacitive coupling between the metal (109) and the silicon substrate. Part of the silicon substrate underlying the structure is optionally removed further to reduce the capacitive coupling effect. Hybrid silicon-insulator structures can be formed to gain the effect of the benefits of the structure in three-dimensional configurations, and to permit metallization of more than one side of the structure.

Abstract translation: 一种通过蚀刻硅衬底（101）中的多个沟槽并用绝缘材料（105,107）填充所述沟槽来制造绝缘微结构（100）的方法。 蚀刻沟槽，然后氧化直到完全或几乎完全充满二氧化硅。 然后根据需要沉积额外的绝缘材料以填充任何剩余的沟槽，从而形成结构。 当结构的顶部被金属化时，绝缘结构增加了电阻并降低了金属（109）和硅衬底之间的电容耦合。 可选地，进一步去除结构底层的硅衬底的一部分以降低电容耦合效应。 可以形成混合硅 - 绝缘体结构以获得三维结构中结构的益处的效果，并且允许结构多于一侧的金属化。

公开(公告)号：WO2022169956A1

公开(公告)日：2022-08-11

申请号：PCT/US2022/015087

申请日：2022-02-03

Applicant: KIONIX, INC.

Inventor： DEWALL, Jonah

IPC: G01P15/08 ,  G01P15/13 ,  G01P15/14 ,  G01P15/18

Abstract: A sensor apparatus includes a resonator, a transducer, a damping resistor, a first switch, a filter stage, a second switch, and a noise rejection stage. The transducer is configured to detect a position of the resonator. The damping resistor is configured to electrostatically actuate the transducer and convert a thermomechanical noise of the resonator to an electromechanical noise. The first switch is configured to receive a first signal from the transducer. The filter stage is configured to receive the first signal and adjust a phase and a gain of the first signal and output a filtered first signal. The second switch is configured to receive a second signal from the transducer. The noise rejection stage is configured to receive the filtered first signal and the second signal and reduce the filtered first signal from an output signal.

公开(公告)号：WO2014137367A3

公开(公告)日：2015-06-25

申请号：PCT/US2013042886

申请日：2013-05-28

Applicant: KIONIX INC

Inventor： STIRLING NATHAN L ,  DEWALT LUKE E ,  STRAIT JAMES E ,  ADAMS SCOTT G

IPC: G01C25/00

CPC classification number: B81C99/005

Abstract: A calibration unit, system, and method for calibrating a device under test are provided. The calibration unit, system, and method use a single axis rotational unit to calibrate devices under test on a test head. The single axis rotation unit is configured to extend at an angle from a known axis. The test head can be designed in the shape of a frustum with, multiple sides. The calibration unit, system, and method can use combinations of gravitational excitation, Helmholtz coil excitation, and rotational rate excitation for calibrating the device under test. The calibration unit, system, and method can calibrate a 3 degree for freedom or higher MEMS devices.

Abstract translation: 提供了用于校准被测器件的校准单元，系统和方法。 校准单元，系统和方法使用单轴旋转单元在测试头上校准被测设备。 单轴旋转单元构造成从已知轴线以一定角度延伸。 测试头可以设计成具有多边形的截头锥体的形状。 校准单元，系统和方法可以使用重力激励，亥姆霍兹线圈激励和旋转速率激励的组合来校准被测器件。 校准单元，系统和方法可以自由地校准3度或更高的MEMS器件。

公开(公告)号：WO2014137367A2

公开(公告)日：2014-09-12

申请号：PCT/US2013/042886

申请日：2013-05-28

Applicant: KIONIX, INC.

Inventor： STIRLING, Nathan, L. ,  DEWALT, Luke, E. ,  STRAIT, James, E. ,  ADAMS, Scott, G.

IPC: G01D18/00 ,  G01B21/00

CPC classification number: B81C99/005

Abstract: A calibration unit, system, and method for calibrating a device under test are provided. The calibration unit, system, and method use a single axis rotational unit to calibrate devices under test on a test head. The single axis rotation unit is configured to extend at an angle from a known axis. The test head can be designed in the shape of a frustum with, multiple sides. The calibration unit, system, and method can use combinations of gravitational excitation, Helmholtz coil excitation, and rotational rate excitation for calibrating the device under test. The calibration unit, system, and method can calibrate a 3 degree for freedom or higher MEMS devices.

Abstract translation: 提供了用于校准被测器件的校准单元，系统和方法。 校准单元，系统和方法使用单轴旋转单元在测试头上校准被测设备。 单轴旋转单元构造成从已知轴线以一定角度延伸。 测试头可以设计成具有多边形的截头锥体的形状。 校准单元，系统和方法可以使用重力激励，亥姆霍兹线圈激励和旋转速率激励的组合来校准被测器件。 校准单元，系统和方法可以自由地校准3度或更高的MEMS器件。

公开(公告)号：WO03036305A3

公开(公告)日：2003-10-16

申请号：PCT/US0232993

申请日：2002-10-16

Applicant: KIONIX INC

Inventor： ADAMS SCOTT G ,  MILLER SCOTT A ,  JOHNSON WENDY JO H

IPC: G01P9/04 ,  G01P15/125 ,  G01P15/08 ,  H01L29/00

CPC classification number: G01P15/0802 ,  G01P15/125 ,  G01P2015/0814 ,  G01P2015/0828

Abstract: An accelerometer (100) comprising a silicon wafer is etched to form a fixed portion (400), a movable portion (300), and a resilient coupling (120) between, the fixed and movable portions generally arranged in the plane of the wafer, the mass of the movable portion being concentrated on one side of the resilient coupling. One of the fixed and moveable portions of the silicon structure includes a first electrode. The other of the fixed and moveable portions includes a second electrode oriented parallel to the axis of acceleration, and an electrically-conductive layer electrically connected as a third electrode coplanar and mechanically coupled with the second electrode. The second and third electrodes are arranged in capacitive opposition to the first electrode, the capacitance between the first electrode and third electrode increasing as the movable portion moves in a direction along the axis of acceleration relative to the fixed portion and decreasing as the movable portion moves in an opposite direction. A resilient coupling retains the first and third electrodes in capacitive opposition to each other across a capacitance gap while allowing motion of the first electrode relative to the second and third electrodes in response to acceleration along an axis of acceleration perpendicular to the plane of the wafer, and resiliently restores the first electrode to an equilibrium position when the acceleration ceases. The second electrode is in opposition to a majority of the surface area of the first electrode when the electrodes are in the equilibrium position. Capacitance between the first and third electrodes is measured to obtain a measurement of acceleration along the axis.

Abstract translation: 蚀刻包括硅晶片的加速度计（100），以形成固定部分（400），可移动部分（300）以及通常设置在晶片平面中的固定部分和可移动部分之间的弹性联接件（120） 活动部分的质量集中在弹性联轴器的一侧。 硅结构的固定和可移动部分之一包括第一电极。 固定和可移动部分中的另一个包括平行于加速轴定向的第二电极，和作为共面的第三电极电连接并与第二电极机械耦合的导电层。 第二电极和第三电极与第一电极电容地相对配置，第一电极和第三电极之间的电容随着可移动部分沿着加速轴相对于固定部分的方向移动而增加，并且随着可移动部分移动 在相反的方向。 弹性联接器保持第一和第三电极跨过电容间隙彼此电容地相对，同时响应于沿垂直于晶片平面的加速轴的加速度，允许第一电极相对于第二和第三电极的运动， 并且当加速停止时，将第一电极弹性恢复到平衡位置。 当电极处于平衡位置时，第二电极与第一电极的大部分表面区域相对。 测量第一和第三电极之间的电容以获得沿轴的加速度的测量。

公开(公告)号：WO2003068672A2

公开(公告)日：2003-08-21

申请号：PCT/US2003/004228

申请日：2003-02-12

Applicant: KIONIX, INC.

Inventor： MOON, James, E. ,  YOUNG, Lincoln, C.

IPC: B81C1/00

CPC classification number: B81C1/00071 ,  B01F5/061 ,  B01F5/0644 ,  B01F13/0059 ,  B01F2005/0621 ,  B01J19/0093 ,  B01J2219/00783 ,  B01J2219/00828 ,  B01J2219/00831 ,  B01J2219/00864 ,  B01J2219/00934 ,  B01L3/5027 ,  B81B2201/058 ,  B81B2203/0338 ,  B81B2203/0376 ,  G01N30/6078 ,  G01N30/6095 ,  Y10T137/0402 ,  Y10T137/2224

Abstract: A method for etching an ultra-shallow channel includes using an etch process that is selective for one material to etch a different material in order to achieve a very precise channel depth in the different material. Channels as shallow as 10nm can be fabricated in silicon with precisions of 5nm or better using the method. Stepped channels can be fabricated where each segment is a different depth, with the segments being between 10nm and 1000nm in depth. The method is applied to creat a fluidic channel which includes a channel substrate to which is bonded a lid substrate to confine fluids to the fluidic channels so fabricated.

Abstract translation: 蚀刻超浅沟道的方法包括使用对一种材料选择性蚀刻不同材料的蚀刻工艺，以便在不同材料中实现非常精确的沟道深度。 使用该方法可以在5nm或更好的精度的硅中制造浅10nm的通道。 可以制造阶梯通道，其中每个段是不同的深度，其中该段的深度在10nm和1000nm之间。 该方法被应用于创建流体通道，该流体通道包括通道基底，粘合了盖基底以将流体限制在如此制造的流体通道上。

公开(公告)号：WO2020097117A3

公开(公告)日：2020-05-14

申请号：PCT/US2019/059922

申请日：2019-11-05

Applicant: ROHM CO., LTD. ,  KIONIX, INC.

Inventor： SAMUELSON, Brian Thomas ,  DEKEN, Richard Alan ,  YAMASHIRO, Yo

IPC: G01P3/483 ,  G01P15/08 ,  G01P15/125

Abstract: Accelerometers are described herein that have RMS outputs. For instance, an example accelerometer may include a MEMS device and an ASIC. The MEMS device includes a structure having an attribute that changes in response to acceleration of an object. The ASIC determines acceleration of the object based at least in part on changes in the attribute. The ASIC includes analog circuitry, an ADC, and firmware. The analog circuitry measures the changes in the attribute and generates analog signals that represent the changes. The ADC converts the analog signals to digital signals. The firmware includes RMS firmware. The RMS firmware performs an RMS calculation on a representation of the digital signals to provide an RMS value that represents an amount of the acceleration of the object.