公开(公告)号：WO2013109701A1

公开(公告)日：2013-07-25

申请号：PCT/US2013/021857

申请日：2013-01-17

Applicant: KLA-TENCOR CORPORATION

Inventor： BEZEL, Ilya ,  SHCHEMELININ, Anatoly ,  SHIFRIN, Eugene ,  PANZER, Matthew ,  DERSTINE, Matthew ,  WANG, Jincheng ,  CHIMMALGI, Anant ,  PATIL, Rajeev ,  BRUNNER, Rudolf

IPC: H01J65/04

CPC classification number: F21V9/06 ,  H01J61/125 ,  H01J61/14 ,  H01J61/16 ,  H01J61/20 ,  H01J61/34 ,  H01J61/35 ,  H01J61/40 ,  H01J61/523 ,  H01J65/04

Abstract: A plasma cell for use in a laser-sustained plasma light source includes a plasma bulb configured to contain a gas suitable for generating a plasma, the plasma bulb being substantially transparent to light emanating from a pump laser configured to sustain the plasma within the plasma bulb, wherein the plasma bulb is substantially transparent to at least a portion of a collectable spectral region of illumination emitted by the plasma, and a filter layer disposed on an interior surface of the plasma bulb, the filter layer configured to block a selected spectral region of the illumination emitted by the plasma.

Abstract translation: 用于激光维持等离子体光源的等离子体单元包括配置成容纳适于产生等离子体的气体的等离子体灯泡，该等离子体灯泡对于配置成维持等离子体灯泡内的等离子体的泵浦激光器发出的光基本上是透明的 ，其中所述等离子体灯泡对于由所述等离子体发射的照明的可收集光谱区域的至少一部分基本上是透明的，以及设置在所述等离子体灯泡的内表面上的滤光层，所述滤光层被配置为阻挡所述等离子体灯泡的选定光谱区域 等离子体发射的照明。

公开(公告)号：WO2014160981A1

公开(公告)日：2014-10-02

申请号：PCT/US2014/032260

申请日：2014-03-28

Applicant: KLA-TENCOR CORPORATION

Inventor： BEZEL, Ilya ,  SHCHEMELININ, Anatoly ,  DERSTINE, Matthew ,  GROSS, Kenneth P. ,  SHORTT, David W. ,  ZHAO, Wei ,  CHIMMALGI, Anant ,  WANG, Jincheng

IPC: H01J61/02

CPC classification number: H01J65/042 ,  H01J61/28 ,  H01J61/523 ,  H01J65/00 ,  H05H1/24

Abstract: A system for controlling convective flow in a light-sustained plasma includes an illumination source configured to generate illumination, a plasma cell including a bulb for containing a volume of gas, a collector element arranged to focus illumination from the illumination source into the volume of gas in order to generate a plasma within the volume of gas contained within the bulb. Further, the plasma cell is disposed within a concave region of the collector element, where the collector element includes an opening for propagating a portion of a plume of the plasma to a region external to the concave region of the collect element.

Abstract translation: 用于控制光持久等离子体中的对流的系统包括被配置为产生照明的照明源，包括用于容纳一定体积的气体的灯泡的等离子体单元，被布置成将来自照明源的照明聚焦到气体体积中的集电器元件 以便在容纳在灯泡内的气体的体积内产生等离子体。 此外，等离子体单元设置在集电器元件的凹入区域内，其中集电器元件包括用于将等离子体的一部分羽流传播到收集元件的凹入区域外部的区域的开口。

公开(公告)号：WO2014036171A1

公开(公告)日：2014-03-06

申请号：PCT/US2013/057132

申请日：2013-08-28

Applicant: KLA-TENCOR CORPORATION

Inventor： WANG, Jincheng ,  CHIMMALGI, Anant ,  PATIL, Rajeev ,  KIM, Erik ,  BRUNNER, Rudolf ,  GIANG, Quang ,  WILSON, Lauren ,  GROSS, Kenneth, P. ,  BEZEL, Ilya ,  LASFARGUES, Cedric ,  SCOTT, Daniel ,  VORA, Younus ,  DERSTINE, Matthew

IPC: F21V29/00 ,  F21V17/00

CPC classification number: F28C3/04 ,  F21V19/00 ,  F21V29/02 ,  F21V29/503 ,  F21V29/60

Abstract: A fluid input manifold distributes injected fluid around the body of a bulb to cool the bulb below a threshold. The injected fluid also distributes heat more evenly along the surface of the bulb to reduce thermal stress. The fluid input manifold may comprise one or more airfoils to direct a substantially laminar fluid flow along the surface of the bulb or it may comprise a plurality of fluid injection nozzles oriented to produce a substantially laminar fluid flow. An output portion may be configured to facilitate fluid flow along the surface of the bulb by allowing injected fluid to easily escape after absorbing heat from the bulb or by applying negative pressure to actively draw injected fluid along the surface of the bulb and away.

Abstract translation: 流体输入歧管将注入的流体分布在灯泡的主体周围以将灯泡冷却到阈值以下。 喷射的流体还可以沿着灯泡的表面更均匀地分布热量以减少热应力。 流体输入歧管可以包括一个或多个翼型件，以引导基本上层流的流体沿着灯泡的表面，或者其可以包括多个流体喷射喷嘴，其被定向以产生基本上层流的流体流。 输出部分可以被配置为通过允许注入的流体在从灯泡吸收热量之后容易地逸出，或者通过施加负压以沿着灯泡的表面主动地吸取注入的流体并且远离，从而促进沿着灯泡表面的流体流动。