公开(公告)号：WO2011031589A3

公开(公告)日：2011-06-03

申请号：PCT/US2010047380

申请日：2010-08-31

Applicant: LAM RES CORP ,  VALCORE JR JOHN C ,  ZERELLA MARK

Inventor： VALCORE JR JOHN C ,  ZERELLA MARK

IPC: H01L21/66 ,  H01L21/205 ,  H01L21/3065 ,  H01L21/687

CPC classification number: H01L21/6833 ,  H01J37/32091 ,  H01J37/32935

Abstract: A method for identifying an optimal time for mechanically removing a substrate from a lower electrode in a processing chamber of a plasma processing system is provided. The method includes employing a set of sensors to monitor a set of electrical characteristics of a plasma, wherein the plasma is formed over the substrate during a dechuck event. The method also includes sending processing data about the set of electrical characteristics to a data collection device. The method further includes comparing the processing data against a set of threshold values. The method yet also includes, if the processing data traverses the threshold values, removing the substrate from the lower electrode since a substrate-released event has occurred.

Abstract translation: 提供了一种用于识别用于从等离子体处理系统的处理室中的下电极机械地移除衬底的最佳时间的方法。 该方法包括使用一组传感器来监测等离子体的一组电特性，其中在脱钩事件期间等离子体形成在衬底上方。 该方法还包括将关于该组电特性的处理数据发送到数据收集装置。 该方法还包括将处理数据与一组阈值进行比较。 该方法还包括，如果处理数据横越阈值，则由于衬底释放事件已经发生而从下电极移除衬底。

公开(公告)号：WO2005009927A3

公开(公告)日：2005-03-24

申请号：PCT/US2004023681

申请日：2004-07-23

Applicant: UNIV CALIFORNIA ,  BP CHEM INT LTD ,  BELL ALEXIS T ,  MUKHOPADHYAY SUDIP ,  ZERELLA MARK ,  SUNLEY JOHN GLENN ,  GAEMERS SANDER ,  MUSKETT MICHAEL JAMES

Inventor： BELL ALEXIS T ,  MUKHOPADHYAY SUDIP ,  ZERELLA MARK ,  SUNLEY JOHN GLENN ,  GAEMERS SANDER ,  MUSKETT MICHAEL JAMES

IPC: C07C51/56 ,  C07C67/08 ,  C07C309/00 ,  C07C381/00 ,  C07C51/15 ,  C07C53/00 ,  C07C303/00

CPC classification number: C07C309/00 ,  C07C51/56 ,  C07C67/08 ,  C07C381/00 ,  C07C53/18 ,  C07C69/14

Abstract: Acetyl anhydrides such as acetyl sulfate are produced by a process for comprising contacting methane and carbon dioxide in an anhydrous environment in the presence of effective amounts of a transition metal catalyst and a reaction promoter, and an acid anhydride compound, and optionally an acid. The acetyl anhydride can be contacted with water to produce acetic acid or with an alcohol to produce a product comprising an acetate ester and that may also comprise acetic acid. Optionally, water in stoichiometric amounts or less, with respect to the acetic anhydride, may be fed to a continuous process of this type to produce some acetic acid in situ.

Abstract translation: 通过在有效量的过渡金属催化剂和反应促进剂以及酸酐化合物和任选的酸存在下在无水环境中使甲烷和二氧化碳接触的方法来生产乙酰基酸酐如乙酰硫酸酯。 乙酸酐可以与水接触以产生乙酸或与醇接触以产生包含乙酸酯并且还可以包含乙酸的产物。 任选地，相对于乙酸酐，化学计量或更少量的水可以被供给到这种类型的连续过程以原位产生一些乙酸。

公开(公告)号：WO2006014834B1

公开(公告)日：2006-03-30

申请号：PCT/US2005026172

申请日：2005-07-21

Applicant: UNIV CALIFORNIA ,  BP CHEM INT LTD ,  ZERELLA MARK ,  MUKHOPADHYAY SUDIP ,  BELL ALEXIS T ,  SUNLEY JOHN GLENN ,  GAEMERS SANDER ,  HOWARD PHILIP ,  ELLIS BRIAN ,  LUCY ANDREW RICHARD

Inventor： ZERELLA MARK ,  MUKHOPADHYAY SUDIP ,  BELL ALEXIS T ,  SUNLEY JOHN GLENN ,  GAEMERS SANDER ,  HOWARD PHILIP ,  ELLIS BRIAN ,  LUCY ANDREW RICHARD

IPC: C07C51/14

CPC classification number: C07C51/305 ,  C07C53/08

Abstract: Acetic acid is produced by oxidation of methane with an oxygen-containing gas in the presence of an acid selected from an acid selected from concentrated sulfuric acid and fuming sulfuric acid, a palladium-containing catalyst and a promoter, preferably a copper or iron salt. The addition of a promoter and O 2 to a system that includes a palladium-containing catalyst such as PdCl 2 increases the rate of acetic acid formation from methane by more than an order of magnitude as compared with prior art and, in addition, inhibits the precipitation of Pd black.

Abstract translation: 在选自浓硫酸和发烟硫酸的酸，含钯催化剂和促进剂，优选铜或铁盐的酸存在下，用含氧气体氧化甲酸来生产乙酸。 将促进剂和O 2加入到包含含钯催化剂如PdCl 2 N的体系中增加了甲烷形成乙酸的速率超过一个量级 与现有技术相比，并且还抑制了Pd黑的沉淀。