公开(公告)号：WO2020142367A1

公开(公告)日：2020-07-09

申请号：PCT/US2019/068712

申请日：2019-12-27

Applicant: LAM RESEARCH CORPORATION

Inventor： EMERSON, Mark E. ,  LINEBARGER, Nick Ray, Jr.

IPC: C23C16/52 ,  C23C16/455 ,  G01B11/02 ,  G01B11/14 ,  H01J37/32

Abstract: A substrate processing system includes a laser triangulation sensor configured to transmit and receive light through a window of an exterior wall of a substrate processing chamber. A controller is configured to: position the laser triangulation sensor such that the laser triangulation sensor transmits light onto a measurement feature arranged between a first surface of a substrate support and a second surface of a gas distribution device, where the second surface faces the first surface; and while the laser triangulation sensor transmits light onto the measurement feature, determine a first distance between the first and second surfaces based on a difference between: a second distance between the laser triangulation sensor and the first surface measured using the laser triangulation sensor; and a third distance between the laser triangulation sensor and the second surface measured using the laser triangulation sensor.

公开(公告)号：WO2021022291A1

公开(公告)日：2021-02-04

申请号：PCT/US2020/070300

申请日：2020-07-21

Applicant: LAM RESEARCH CORPORATION

Inventor： SADEGHI, Hossein ,  BLANK, Richard M. ,  THAULAD, Peter S. ,  EMERSON, Mark E. ,  JEYAPALAN, Arulselvam Simon

IPC: H01L21/68 ,  B25J9/16 ,  H01L21/677 ,  H01L21/67

Abstract: Systems and techniques for determining and using multiple types of offsets for providing wafers to a wafer support of a wafer station of a semiconductor processing tool are disclosed; such techniques and systems may use an autocalibration wafer that may include a plurality of sensors, including a plurality of edge-located imaging sensors that may be used to image fiducials associated with two different structures located in a selected wafer station.

公开(公告)号：WO2020180607A1

公开(公告)日：2020-09-10

申请号：PCT/US2020/020116

申请日：2020-02-27

Applicant: LAM RESEARCH CORPORATION

Inventor： BLANK, Richard ,  ALWAN, Aravind ,  BEHZIZ, Behnam ,  THAULAD, Peter ,  EMERSON, Mark E.

IPC: H01L21/677 ,  H01L21/67 ,  G01B11/02 ,  B25J9/16 ,  B25J19/02

Abstract: A robot calibration system includes a calibration fixture configured to be mounted on a substrate processing chamber. The calibration fixture includes at least one camera arranged to capture an image including an outer edge of a test substrate and an edge ring surrounding the test substrate. A controller is configured to receive the captured image, analyze the captured image to measure a distance between the outer edge of the test substrate and the edge ring, calculate a center of the test substrate based on the measured distance, and calibrate a robot configured to transfer substrate to and from the substrate processing chamber based on the calculated center of the test substrate.